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XP62X Piezo Stage Nanopositioning Stages

Key Specifications/Special Features:<br>Type:XP-620.1SL, XP-621.1SL, XP-623.1SL XP-620.1OL, XP-621.1OL, XP-623.1OL<br>Active axes: X<br>Travel: 12~48um<br>Closed-loop travel: 17~68um<br>Open-loop resolution: 0.15~0.5nm<br>Closed-loop resolution 0.5~2nm<br>Closed-loop linearity: 0.1%F.S.<br>Closed-loop repeatability: 0.05%F.S.<br>Stiffness in motion direction: 40~10N/um<br>Unloaded response frequency: 4.2~2.5kHz<br>Response frequency @120g: 2.8~2.0kHz<br>Push/pull force capacity in motion direction: 480/160N<br>Load capacity: 100N<br>El.capacitance: 1.8~7.2uF<br>Weight: 0.15~0.45kg<br>Cable length: 1.5m<br>Cable way: side lead

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XP62X Piezo Stage Nanopositioning Stages

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  1. Harbin Core Tomorrow Science & Technology Co., Ltd. sjl@coremorrow.com http://www.coremorrow.com/en/

  2. sjl@coremorrow.com http://www.coremorrow.com/en/ Harbin Core Tomorrow Science & Technology Co., Ltd.

  3. sjl@coremorrow.com Harbin Core Tomorrow Science & Technology Co., Ltd. http://www.coremorrow.com/en/

  4. sjl@coremorrow.com http://www.coremorrow.com/en/ Harbin Core Tomorrow Science & Technology Co., Ltd.

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