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DP Series Springless Diaphragm Valves

DP Series Springless Diaphragm Valves. Why develop a new valve?. Semiconductor industry driving for lower costs Availability of new technology Swagelok’s drive to help customers win. Provide a 1/4 inch UHP valve for low and high-pressure applications Provide a high-performance seat

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DP Series Springless Diaphragm Valves

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  1. DP Series Springless Diaphragm Valves

  2. Why develop a new valve? • Semiconductor industry driving for lower costs • Availability of new technology • Swagelok’s drive to help customers win

  3. Provide a 1/4 inch UHP valve for low and high-pressure applications Provide a high-performance seat Improve flow capabilities Provide integral locking handle Drop in replacement Provide a competitively priced valve DP Series Objectives

  4. Technology Design tools Seat performance Valve overview DP specifications DP components Valve highlights Topics to be Discussed

  5. DP Series Computer Modeling Technology

  6. Fully Swept Flow Path Diaphragms CFDAnalysis Valve inlet Valve outlet

  7. Finite Element Analysis Featured area

  8. Repeatable Shutoff Performance FEA Analysis

  9. Finite Element Analysis Featured area

  10. Diaphragm Cycle Life FEA Analysis Bonnet nut Actuator button Diaphragms

  11. DP Series Valve Seat Technology

  12. Helium Leak Test Performance Inboard helium leak testing of the seat with 145 psig inlet pressure 1x10-7 _ 1x10-8 _ (std cm3/s) 1x10-9 _ 1x10-10 _ *Minimum required by SEMI F1-96 *15 Time in seconds

  13. Pressure Rating: 145 psi / 10 bar:Low Pressure 3045 psi / 210 bar:High Pressure Cv: 0.27: Low Pressure 0.20: High Pressure Dimensions: Same O.A.L. HLT: 1 x 10-9 std cm3/s Surface Finish: 5 in Ra ¼ in. DP Series Technical Issues

  14. Low Pressure Internal Components

  15. Actuator Options High-pressure air actuator Low- and high- pressure locking handle Low-pressure air actuator Low- and high- pressure “T” handle Common body, diaphragms and seat

  16. Locking Handle

  17. Both high- and low-pressure options Improved seat performance Improved flow capabilities Standard locking handle option for safety Drop in replacement Competitively priced DP Series Valve Highlights

  18. DP Series Springless Diaphragm Valves

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