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Ajay P. Malshe, Ph.D. Mechanical Engineering University of Arkansas, Fayetteville, AR, U.S.A.

Metrology and Instrumentation Challenges for Nanomanufacturing and Product Realization of Integrated Systems. Convergence of Scales-Signals-Domains for Integrated Systems…. Ajay P. Malshe, Ph.D. Mechanical Engineering University of Arkansas, Fayetteville, AR, U.S.A.

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Ajay P. Malshe, Ph.D. Mechanical Engineering University of Arkansas, Fayetteville, AR, U.S.A.

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  1. Metrology and Instrumentation Challenges for Nanomanufacturing and Product Realization of Integrated Systems Convergence of Scales-Signals-Domains for Integrated Systems… Ajay P. Malshe, Ph.D. Mechanical Engineering University of Arkansas, Fayetteville, AR, U.S.A. Ajay P. Malshe, Tel (479) 575-6561 / E-mail <apm2@engr.uark.edu>

  2. Nanotechnology for Mechanical Engineers Glimpses of Work in Malshe’s Materials and Manufacturing Research Group: • Examples of integration of nano-micro-bio for • nanomanufacturing of integrated systems, • nano mechanical machining system on chip (status- fabrication complete and is being released); • femto second, 380 fs, written periodic feature on diamond, smallest feature is about 50 nm; • E. Coli Cellular actuation using 30 nm flagilar motors (see attached movie); • 3D assembled cBN 0-2 um sized particles in TiN matrix (technology used to spin-off NanoMech); • nanomechanical silicon beam for NEMS devices; • nano mechanical patterning of GaAs surface for growing array of quantum structures 1.5μm scan of sample after a 5x5 grid of 25 (30 nm) 40μN indents spaced approximately 200nm apart. (a) (b) (c) (c) 50nm NanoMEEG (111 ) _____ 15nm _ cBN-TiN composite coating (d) (d) (d) (f) (e) Ajay P. Malshe, Tel (479) 575-6561 / E-mail <apm2@engr.uark.edu>

  3. Nano-Manufacturing new products or adding value to current products to improve quality of life throughintegration of nano materials. GRAND challenge: “Retaining functional signature of the NANO materials, devices, and components during nanomanufacturing and application.” Ajay P. Malshe, Tel (479) 575-6561 / E-mail <apm2@engr.uark.edu>

  4. Typical needs of manufacturing: • Dimensional Repeatability • Functional Reproducibility • Behavioral Reliability • Low cost • Known standards • Evolutionary production • Environmentally benign Ajay P. Malshe, Tel (479) 575-6561 / E-mail <apm2@engr.uark.edu>

  5. Example 1: Nano Machining (Time 90sec) Ajay P. Malshe, Tel (479) 575-6561 / E-mail <apm2@engr.uark.edu>

  6. Example 2: Nano Machining Time (120sec) Ajay P. Malshe, Tel (479) 575-6561 / E-mail <apm2@engr.uark.edu>

  7. Key challenges for metrology and instrumentation… • Nano materials- functional and dimensional classification • Tools and systems for reproducible nano manipulation* and post-synthesis processing (* self and/or intentional)- tolerance, materials and interfacial analysis • Integration and packaging- interconnects across the scale and functional boundaries • Addressing component reliability and system durability- knownstandards • Addressing “application specific” scientific and engineering designing-to-processing issues- proven design , modeling and scale up tools Trend of Progress in the Field of Micro and Nano Systems Micro Electro Mechanical Systems (MEMS) Quantum structure, Laser Dots Integrated Circuits ICs DNA Computing Ajay P. Malshe, Tel (479) 575-6561 / E-mail <apm2@engr.uark.edu>

  8. ACKNOWLEDGEMENTS DMII- National Science Foundation (NSF) EPSCoR- National Science Foundation (NSF) ECS- National Science Foundation (NSF) Air Force Office of Scientific Research (AFOSR) Students and post-doctoral fellows, and colleagues. Collaborators from SNL, LBNL, UNL and OSU, Valenite, Coherent and Texas A&M. Fayetteville and Springdale high schools. Ajay P. Malshe, Tel (479) 575-6561 / E-mail <apm2@engr.uark.edu>

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