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An Introduction to SIMS and the MiniSIMS alpha

An Introduction to SIMS and the MiniSIMS alpha. © Millbrook Instruments Limited Blackburn, UK www.millbrook-instruments.com www.minisims.com. Secondary Ion Mass Spectrometry (SIMS) & The Millbrook MiniSIMS. The SIMS Process. simulation courtesy of Dr Postawa Zbigniew

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An Introduction to SIMS and the MiniSIMS alpha

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  1. An Introduction to SIMS andthe MiniSIMS alpha © Millbrook Instruments Limited Blackburn, UK www.millbrook-instruments.com www.minisims.com

  2. Secondary Ion Mass Spectrometry (SIMS)&The Millbrook MiniSIMS

  3. The SIMS Process simulation courtesy of Dr Postawa Zbigniew at the Jagiellonian University in Poland

  4. A Conventional SIMS System

  5. The MiniSIMS Instrument

  6. Design Objectives • Increase routine use of Surface Analysis • more affordable • more accessible • Not a replacement for conventional SIMS • not state-of-the-art performance • restricted analysis conditions

  7. Transform one of these …..

  8. ….. into one of these.

  9. Operational Strengths • Low Capital & Running Costs • Fast, On-Site Analysis • Compact Design, Single Electrical Supply • Full Automation & Control for Ease of Use • High Reliability • Rapid Sample Throughput • Simplified Data Interpretation • Remote Control via Internet

  10. Static SIMS (Surface Analysis)

  11. Static SIMS (Surface Analysis)

  12. Structurally significant peaks Characterisation of Layer

  13. Structurally significant peaks Characterisation of Layer

  14. Light Element Detection

  15. Dynamic SIMS (Depth Analysis)

  16. Dynamic SIMS (Depth Analysis)

  17. Before Annealing

  18. Copper has diffused into silicon oxide After Annealing

  19. Profile Before Annealing

  20. Profile After Annealing

  21. Imaging SIMS (Spatial Analysis)

  22. Imaging SIMS (Spatial Analysis)

  23. Distribution of Organic Film • Incomplete coverage of both organic and inorganic components in a battery electrode • CxHyOz- (blue) and Li+(red) on Al+ (green) • Image size 4.5 mm x 4.5 mm

  24. Distribution of Metal Overlayer • Uneven coverage of the silver coating on the contacts of a semiconductor connection frame • Cu+ (red) and Ag+ (green) • Image size 3.0 mm x 3.0 mm

  25. Typical Applications for the MiniSIMS alpha • Repetitive analysis (quality monitoring) • Large area organic surface contamination • Fast imaging of millimetre scale areas • 3 dimensional analysis of multi-layer structures • Comparative rather than quantitative analysis

  26. Surface Coatings Surface Treatments Electronic Components Semiconductors Electrodes & Sensors Catalysts Adhesives Lubricants Packaging Materials Corrosion Studies Typical Application Areas

  27. Alternatives to a MiniSIMS ? • No Other Benchtop SIMS Instrument • Conventional SIMS Systems • much more complex and expensive • Contract Analysis Laboratories • not convenient, contamination during transport • Other Surface Analysis Techniques • generally less sensitive

  28. Comparison of SEM / EDS and SIMS

  29. Advantages of SEM / EDS • High magnification physical image • Quantitative elemental information

  30. Advantages of SIMS • Surface specific analysis • Organic structure identification • Profiling for depth distribution • Light element detection

  31. For many applications surface sensitivity is needed… EDX sampling depth is typically 1 micron 509 m Not 100 x Not 10 x But 1000 x – SIMS can offer true surface analysis

  32. Conclusions • SIMS & EDS give complementary information • SIMS has advantages for • Organic surface contamination • 3 dimensional analysis of multi-layer structures • SEM / EDS has advantages for • High magnification physical imaging • Quantitative analysis

  33. Summary

  34. MiniSIMS Summary • SIMS is a powerful technique for the 3-D analysis of the surfaces of materials and thin films • Information easily available by SIMS may be difficult or impossible by any other technique • SIMS is especially valuable for the detection of:- • organic species (e.g. silicones, fluorocarbons) • light elements (lithium, beryllium, boron …) • group IA & IIA metals, group VII halides

  35. MiniSIMS Summary • SIMS is a fast analysis technique, especially for imaging applications • MiniSIMS alpha is most applicable for running routine repetitive analyses • Desktop MiniSIMS means SIMS is now affordable and accessible to all

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