1 / 43

How Do We “See”, “Touch” and “Move” Nano-Stuffs? How Do We “Make” Nano-scale Devices?

How Do We “See”, “Touch” and “Move” Nano-Stuffs? How Do We “Make” Nano-scale Devices?. Yonhua Tzeng, Professor Electrical and Computer Engineering Auburn University, Alabama USA. July 7, 2003. To “See”. Eyeballs Optical Microscopes Scanning Electron Microscopes (SEM)

gardenia
Télécharger la présentation

How Do We “See”, “Touch” and “Move” Nano-Stuffs? How Do We “Make” Nano-scale Devices?

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. How Do We “See”, “Touch” and “Move” Nano-Stuffs? How Do We “Make” Nano-scale Devices? Yonhua Tzeng, Professor Electrical and Computer Engineering Auburn University, Alabama USA July 7, 2003

  2. To “See” • Eyeballs • Optical Microscopes • Scanning Electron Microscopes (SEM) • Transmission Electron Microscopes (TEM) • Scanning Probe Microscopes • Atomic Force Microscopes (AFM) • Scanning Tunneling Microscopes (STM) • Scanning Near-Field Optical Microscopes (SNOM)

  3. Can’t See the Nanoworld http://www.abdn.ac.uk/physics/px2010/diffsum.pdf

  4. SEM As the electron beam hits each spot on the sample, secondary electrons are knocked loose from its surface. A detector counts these electrons and sends the signals to an amplifier. The final image is built up from the number of electrons emitted from each spot on the sample. http://www.mos.org/sln/SEM/works/slideshow/nstour20.html

  5. Transmission Electron Microscope (TEM) http://bioweb.usu.edu/emlab/TEM-SEM%20Teaching/How%20TEM%20works.html

  6. SPM Family Scanning Tunneling Microscope - STM Atomic Force Microscope - AFM Force-Modulated AFM (FMM) Lateral Force Microscope - LFM Magnetic Force Microscope - MFM Scanning Thermal Microscope - SThM Electrical Force Microscope – EFM Near-field Scanning Optical Microscope – NSOM (SNOM) . . . A Whole Family Gerd Binnig and Heinrich Rohrer http://invsee.asu.edu/Invsee/listmod.htm

  7. AFM http://invsee.asu.edu/Invsee/listmod.htm

  8. AFM SEM AFM http://invsee.asu.edu/nmodules/spmmod/timetable.html

  9. STM http://invsee.asu.edu/Invsee/listmod.htm

  10. http://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdfhttp://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdf

  11. Quantum Mechanics: Quantum Corral http://www.wtec.org/loyola/nano/IWGN.Research.Directions/IWGN_rd.pdf

  12. Magnetic Force Microscopy a magnetic tip is used to probe the magnetic stray field above the sample surface. The magnetic tip is mounted on a small cantilever which translates the force into a deflection which can be measured.The Microscope can sense the deflection of the cantilever which will result in a force image (static mode) or the resonance frequency change of the cantilever which will result in a force gradient image.The sample is scanned under the tip which results in a mapping of the magnetic forces or force gradients above the surface. http://www.el.utwente.nl/tdm/istg/research/mfm/mfm.htm

  13. MFM Image (3.5 x 3.5 µm) of a domain pattern in a Co-Ni/Pt Multilayer http://www.el.utwente.nl/tdm/istg/research/mfm/mfm.htm

  14. Confocal fluorescence microscopy The same objective is used to both focus the excitation laser (symbolized by the yellow beam) and collect the fluorescence emitted from the sample (orange). Spectral filters which separate the exciation light from the red-shifted fluorescence can be used conveniently in the infinity-region between the objective and the tube lens. These filters are multilayer structures of dielectric materials with different indices of refraction. The thicknesses of the layers can be chosen such that the beams reflected at each interface interfere constructively for the laser wavelength which will then be reflected efficiently by the overall structure. For the fluorescence emission, on the other hand, this interference is largely destructive so that most of it is transmitted through the filter. The dichroic beamsplitter satisfies the same conditions for an angle of incidence of 45 degrees. The tube lens focuses the transmitted beam onto a pinhole which - if its size is chosen properly - blocks all light not originating form the (nearly) diffraction limited focus. http://www.monos.leidenuniv.nl/smo/index.html?http&&&www.monos.leidenuniv.nl/smo/basics/spectroscopy.htm

  15. Near-field optics A common way to confine the optical field is to stretch an optical fiber, so as to obtain a conical tip, and to coat it with a thin, but opaque metal layer, usually aluminium. The end of the fiber is uncoated, and is therefore a small pinhole through which an evanescent light wave can pass. The diameter of the hole is often 50-100 nm. The transmission decreases very rapidly with diametre, approximately like the 6th power for small sizes. A scanning near-field optical microscope (SNOM) can be used in excitation (via the fiber) or detection (or pick-up) mode. To detect fluorescent single molecules, it is important not to irradiate the sample too long, therefore the excitation mode is preferable. The tip is scanned across the sample, and the total fluorescence is collected by auxiliary optics (a microscope objective) as a function of tip position. While scanning, the distance between tip and surface must be kept constant. Several methods can be used, among which shear-force AFM is very common. http://www.monos.leidenuniv.nl/smo/index.html?http&&&www.monos.leidenuniv.nl/smo/basics/spectroscopy.htm

  16. Scanning Near Field Optical Microscope (SNOM) • SNOM ( NSOM ) utilises tiny apertures of a diameter in the range from typically 50 - 100 nm (1), i.e. smaller than half the wavelength of visible light. • Typically such apertures are prepared in the metal coating at the apex of an optically transparent, sharp tip. • Light cannot pass through such an aperture. • An evanescent field, the optical near-field, protrudes from it. • The optical near-field decays exponentially with distance, and is thus only detectable in the immediate vicinity of the tip. Light emitted form the location opposite to the aperture is used to form the high resolution optical image. http://www.snom.omicron.de/principle/snom.html

  17. Reflection SNOM of IC Test Structures The structure sizes in IC failure analysis and testing are now below the limit of resolution of conventional and laser scanning optical microscopy. Scanning Near-Field Optical Microscopy overcomes this limit, allowing optical images with resolutions in the 50 nm range.Even the 100 nm and 70 nm lines, which cannot be resolved by conventional optical microscopy, are visible in SNOM. 70 nm lines Topography: max. corrugation 38 nm. Dark field optical microscopy: 50x objective. SNOM: Reflection http://www.snom.omicron.de/examples/twinsnom/x-tsnom_6.html

  18. STM Manipulation of Ag Atoms Quantum Corral Approaching the STM-tip toward an Ag atom at its initial location and then move the tip along A chosen path toward the final destination, Where the tip is retracted back to the initial Imaging height leaving the atom at the desired Location on the surface. http://plato.phy.ohiou.edu/~hla/22.pdf

  19. To “Touch” and “Move” by Atomic Force Microprobe Fpull DNA Substrate DNA Carbon Nanotube

  20. Grab an Atom with an AFM Phys. Rev. Lett. 90, 176102 (2003) The researchers lowered a silicon AFM tip toward a silicon surface and pushed down on a single atom. The focused pressure apparently forced the atom free of its bonds to neighboring atoms, which allowed it to bind to the AFM tip. When they lifted the tip and imaged the material, they saw a hole where the atom had been. Finally, they used the tip to press into the vacancy left behind and replace the selected atom--this time using the pressure to break the bond with the tip. Team member Óscar Custance says that in terms of precision, the task is like using the apex of the Empire State Building to lift a single watermelon out of a watermelon field. http://focus.aps.org/story/v11/st19

  21. Carbon Nanotube Tweezer http://www.chems.msu.edu/classes/s03/891/003/Bieber_science99_berkely.pdf

  22. DNA Nano- Machine http://www.trnmag.com/Stories/090600/DNA_Machine_090600.htm

  23. STM Direct Molecular Writing http://www.nano.geo.uni-muenchen.de/external/research/topics/Nanomanipulation

  24. How Do We “Make” Nano-scale Devices? Nanolithography and Nanofabrication

  25. Lithography http://personal.cityu.edu.hk/~appkchu/AP4120/5v.pdf

  26. http://personal.cityu.edu.hk/~appkchu/AP4120/5v.pdf

  27. Nanolithography

  28. http://personal.cityu.edu.hk/~appkchu/AP4120/5v.pdf

  29. http://users.ece.gatech.edu/~alan/11-6-Mohanty-Extreme%20UV%20Litho.pdfhttp://users.ece.gatech.edu/~alan/11-6-Mohanty-Extreme%20UV%20Litho.pdf

  30. http://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdfhttp://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdf

  31. http://personal.cityu.edu.hk/~appkchu/AP4120/5v.pdf

  32. Electron Beam Lithography http://personal.cityu.edu.hk/~appkchu/AP4120/5v.pdf

  33. Focused Ion Beam Lithography http://personal.cityu.edu.hk/~appkchu/AP4120/5v.pdf

  34. Etching Technology

  35. Nanofabrication http://www.darpa.mil/mto/optocenters/presentations/yablonovitch.pdf

  36. focused ion beam workstation (FIB) Using surface milling and deposition, a focused ion beam becomes a powerful tool in IC design by allowing circuitry modifications to be performed at the prototype stage. http://www.irsi.com/Site1/fibwork.html

  37. http://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdfhttp://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdf

  38. Nano-Jets (6 nm wide) Tool in the embryonic field of nanotechnology. May be used to build nanoscale structures or form patterns for other manufacturing technique. Injecting drugs directly into individual cells. Producing integrated circuits. Nano-inkjet printing. http://www.trnmag.com/Stories/090600/Nanojets_090600.htm

  39. http://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdfhttp://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdf

More Related