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Choice of the cleanroom

Choice of the cleanroom. Laser specifications  class 10,000. a) Hard wall cleanroom. b) Softwall cleanroom. Entire room = cleanroom. Laser size = cleanroom. - Special hard wall, Powerfull filter, Special clothing. Movable: used in H4/USC55 best control. Entire room = cleanroom.

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Choice of the cleanroom

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  1. Choice of the cleanroom Laser specifications  class 10,000 a) Hard wall cleanroom b) Softwall cleanroom Entire room = cleanroom Laser size = cleanroom • - Special hard wall, • Powerfull filter, • Special clothing • Movable: used in H4/USC55 • best control Entire room = cleanroom

  2. Softwall cleanroom  customer design 2.4 m With FFU 1.3 m 1.9 m Main problem:safety agreement for curtain TIS approval for one industrial product (non-transparency) One company agree to apply it.

  3. Fan filter unit (FFU): 2 choices, dependent on air-conditioning Old air-unit from Aleph OK NO b) FFU with air-conditioning included softwall: special design • Standard FFU, • Standard softwall, • installation ? Question: air renewal inside each room ?

  4. Air-conditioning Laser specifications  +/- 1 oC HEPair Class 10,000 & +/- 0.5 oF (+/- 0.28 oC) HEPair • 208vac, 50Hz • Cooling capacity: 9050 BTU/H • Temperature: 0.6/2.0 kW • type: PID • Accuracy: +/- 0.5 oF 36cm • Condenser: • Flow rate: 1-2.5 GPM (0.3 – 0.68 m3/h) • water temperature maxi: 85 oF (29 oC) • water side pressure drop: 0.8-3.4 psi (55-234 mbar) 60cm 120cm

  5. Old air-unit from Aleph: (R.Pintus) 12kW, Chilled water air-conditioning unit.  Temperature ? ~ 6oC Control ? (PID, thermostat)… ? USC55: mixed water, 16oC for each laser enclosure Laser2 (Spare) laser3 laser1 +/- 1 oC (+/- 1 oC) +/- 1 oC

  6. Cost estimation Softwall : Solution handling, Germany 3 softwalls with special curtain ~ 12 000 € + Fan Filter Unit: + HEPair: 3 units MAC 10XL ~ 13 000 € ~ 2 200 € + + Old air-unit Cost installation & test, H4? Cost installation H4 ?

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