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UW NANO ROBOTICS GROUP

Microfluidics Propulsion & System Integration in MEMS Devices. UW NANO ROBOTICS GROUP. About UW_NRG. An undergraduate led research group comprised of students from multiple disciplines of engineering Mentored by faculty members including Professors Mustafa Yavuz and Omar Ramahi

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UW NANO ROBOTICS GROUP

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  1. Microfluidics Propulsion & System Integration in MEMS Devices UW NANOROBOTICS GROUP

  2. About UW_NRG • An undergraduate led research group comprised of students from multiple disciplines of engineering • Mentored by faculty members including Professors Mustafa Yavuz and Omar Ramahi Research interests in: • Integration of microfluidics, RF, photovoltaics, and digital logic for creating advanced devices • Improving MEMS technologies for industry adoption

  3. PROJECT • Designing a 300 micron diameter device to compete at the 2009 NanogramRobocup Competition • Robocup is an annual competition held to promote AI, robotics and related fields since 1993 • Nanogram is a NIST supported initiative to advance integrated MEMS devices

  4. DESIGN Overview • Cylindrical design utilizing a photovoltaic cell and two 10 micron air compressors • Pump actuation controlled by two phototransistors • Power delivery through photovoltaic cell • Two phototransistors control pump actuation

  5. Microcompressor – Principle • Flexible conductive membrane placed above fixed electrode forms compression chamber • Attraction between membrane and electrode with potential difference leads to air compression

  6. Microcompressor – Design • Shaped nozzles direct air flow to create net force in one direction • Variation between two pumps allow for steering • Computationally derived oscillation of 1mhz creates optimum thrust without resonant effects

  7. POWER TRANSFER • Germanium based IR detector on aluminum substrate • 100 micron diameter • Detects wavelengths from 850nm to 1550nm • 0 to 10V bias • 1 uA dark current

  8. PUMP Fabrication • Substrate is cleaned and Positive Photoresist is spincoated • PMMA (Microchem) • Achieve thickness of 2 microns • Substrate with photoresist is baked

  9. PUMP Fabrication • Mask patterns the electrode layer • Mask is removed and substrate is developed • Electrode layer is sputtered onto the substrate • Chromium (for adhesion) is used and sputtered to ~1 micron thickness • Remaining resists are removed

  10. PUMP Fabrication • PMMA and Copolymer is spincoated above the substrate • Used to pattern walls • Achieve thickness of 4 microns • Shape of pump and channels patterned with “v”-shape

  11. PUMP Fabrication • Patterned membrane shape and developed • Aluminum deposited onto Pattern • Approximately 2-3 microns thick • Remaining resist is removed

  12. PUMP Fabrication • Above membrane, photoresist is spincoated above again • Use of both PMMA and Copolymer • Bake photoresist and then deposit Aluminum • Remove Resist • Formation of top chamber

  13. CFD ANALYSIS

  14. Control of Microcompressor • Utilization of two different wavelengths for microcompressor control • Control each microcompressor individually

  15. Next steps • Complete solar array design for integration onto robot • Theoretical design will be outsourced to a photovoltaic foundry for fabrication • Development of a thin-film RF antenna has begun to use inductive coupling as a method of power transfer • Biocompatibility materials studies • Surface interaction optimization for robotic device movement

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