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F.L. Lewis, Assoc. Director for Research Moncrief-O’Donnell Endowed Chair Head, Controls, Sensors, MEMS Group

F.L. Lewis, Assoc. Director for Research Moncrief-O’Donnell Endowed Chair Head, Controls, Sensors, MEMS Group Automation & Robotics Research Institute (ARRI) The University of Texas at Arlington Bruno Borovic MEMS Modeling and Control With Ai Qun Liu, NTU Singapore Thermal Model

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F.L. Lewis, Assoc. Director for Research Moncrief-O’Donnell Endowed Chair Head, Controls, Sensors, MEMS Group

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  1. F.L. Lewis, Assoc. Director for Research Moncrief-O’Donnell Endowed Chair Head, Controls, Sensors, MEMS Group Automation & Robotics Research Institute (ARRI)The University of Texas at Arlington

  2. Bruno Borovic MEMS Modeling and Control With Ai Qun Liu, NTU Singapore Thermal Model Mechanical Model Electrical Model Optical Model FEA Experiment

  3. MEMS Power Generation Vibration-driven E-Mag generator Fab Layout of Coils with Folded Beam Suspension

  4. Pressure Sensors for Pulmonary Ventilator Control Load-deflection relation for square membrane Maximum membrane slope occurs at (x,y)= (a,a/2),(a,3a/2), (a/2,a), (3a/2,a). maximum slope is Optical Pressure Sensor FEA of membrane deflection Fiber intensity loss vs. beam offset with Wendell McCulley- InterMEMS, Inc. MEMS process Fab layout

  5. Testing and Calibration of Optical Pressure Sensors Array of membranes with different dimensions MicroFAB, Inc. - fiberoptics Optical micro-lenses David Wallace Optical Pressure Sensor Calibration Facility

  6. Flow Sensors for Pulmonary Ventilator Control Self-Assembly Sequence Drag Force FEA Optical Flow Sensor For a wide range of Reynolds numbers, CD= 1.28 Reynolds Number Drag torque about the hinged bottom Where a Cermak flow velocity profile is assumed Steady-state tilt angle is Surface Micromachined Design

  7. Flow Sensor based on von Karman Vortices No moving parts!

  8. MicroFluidics for VLSI Chip Cooling Number of transistors on a chip is now limited by heat dissipation. Fabricate micro-channels on the back of the chip for cooling. With Dereje Agonafer, Director UTA Packaging Center Intellisuite simulation showing dry (RIE) etching of 110 Si to get Micro Channels. Channels are more than 100 microns high (ARRI).

  9. Biochemical Monitoring • MEMS sensors for biochemical species including anthrax, nerve gases, NOx, organophosphorus • Wireless Sensor Networks for remote site biochemical monitoring 1. BCW Detectors Molecular Recognition and Supramolecular Chemistry - D. Rudkevich In miniaturized supramolecular devices – sensors, surfaces, and membranes - communication between the analyte-guests and their receptors on a molecular level is transformed to measurable macroscopic effects calixarenes as unique, specific NO2-sensing species these interactions are reversible, unique, and specific

  10. 1. BCW Detectors Proteins (enzymes and antibodies) and aptamers as BCW sensors – R. Gracy, UNT Health Science Center Functional protein microarrays bind specific capture molecules to solid matrix materials Immunoassay for oxidized Fibrinogen isoforms as biomarkers for Alzheimer’s disease Oligonucleotide aptamers bind selected molecules Anti-ricin Aptamer as potential Biosensor for ricin

  11. template-directed growth of thin films and composites. 2. Thin Films for BCW Detector Support Structured chemically-activenanosphere thin films- K. Rajeshwar Deposit chemically active agent and dissolve nanospheres Electrostatically self-assembled polystyrene nanospheres To improve sensitivity to challenge agents down to ppb, it is necessary to improve charge separation to prevent recombination of electron/hole photogenerated charges. Site-proximity mechanism in a Ni/TiO2 composite film illustrating the complementary roles of the Ni and TiO2 components.

  12. 3. MEMS Platforms for BCW Detection Agents Interdigitated Finger Gate Electrode FET Uses induced resistivity changes 3x3 IGEFET sensor micro-array – E. Kolesar Microcantilever MEMS sensor array- Kolesar DSP and C&C User Interface for wireless networks- Lewis Uses induced mass changes Neural network classification for unique signatures

  13. Microassembly Station

  14. Micro Manipulator MP-285 Probe Controller Manual Control Automatic Probe MP-285

  15. NI Hardware * Already in use **Ideally, PXI system + SCXI signal conditioning • NI 1411 IMAQ card (Image Acquisition)* • NI6711 PCI card (Data Aquisition)* • NI 485/8 Serial Port Card (serial com. with controlller) • SCXI – Signal conditioning (thermocouple,…etc.)

  16. Vision & Automatic Probe Front Panel

  17. Vision Feedback Vision info Stored map Map From MEMS-Pro 3D info Feature-based Localization With 3D info Based or pre-programmed behaviours

  18. OpenGL LabWindows /CVI

  19. MEMS Packaging with Wendell McCulley Dereje Agonafer Packaging for MEMS Pressure Sensor- W. McCulley

  20. Piet Mondrian

  21. Pantographs for Position & Force Scaling

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