1 / 13

Global Warming Science: Status and Statistics

Global Warming Science: Status and Statistics. Phyllis Pei Walter Worth Sematech  1999 Arizona Board of Regents for The University of Arizona. Perfluorocompounds (NF 3 , SF 6 , C 2 F 6 , CF 4 , CHF 3 ). Have long atmospheric lifetimes Stable, non-toxic Strong infrared absorbers

maeve
Télécharger la présentation

Global Warming Science: Status and Statistics

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. Global Warming Science: Status and Statistics Phyllis Pei Walter Worth Sematech  1999 Arizona Board of Regents for The University of Arizona

  2. Perfluorocompounds (NF3, SF6, C2F6, CF4, CHF3) • Have long atmospheric lifetimes • Stable, non-toxic • Strong infrared absorbers • Continuing emissions will likely accumulate with unknown consequences • Some, such as C2F6, are made solely for use in semiconductor manufacturing • Most PFC gas is not “consumed” in the etch and CVD processes

  3. Key Greenhouse Gases Affected by Human Activity ATMOSPHERIC CONCENTRATION NOTE: H2O has largest greenhouse effect, but is not affected by human sources and sinks

  4. PFC Lifetimes and GWPs GWP = Global Warming Potential @ 100 year time horizon Source: IPCC

  5. Global Warming Potential (GWP) The following equation is used to calculate GWP: t  a i c i dt 0 GWPt= t a c dt  co2 co2 0 where: a1 = the instantaneous radiative forcing resulting from a unit increase in the atmospheric concentration of trace gas, i c1 = concentration of trace gas, i, remaining in the atmosphere at time, t, after release of unit mass at t=0 t = number of years over which the calculation is performed

  6. Million Metric Tons Of Carbon Equivalents (MMTCE) MMTCE= 12 x Kg x GWP100 44 109 GWP100 = global warming potential at 100 yr. time horizon Kg = weight of PFC emitted

  7. Global Warming Calculations Wavelength & Molecular Size & Lifetime [ Rad. Forcing & Conc. & Time ] {[GWPt] & Mass } {Million Metric Tons Carbon Equivalent }

  8. U.S. Greenhouse Gas Emissions Each source, although small, contributes to the whole

  9. PFC Emissions/Use Chart Data Source: EPA & Dataquest Tons/year

  10. 1993 PFC Purchases (U.S. Semiconductor Industry) 1993 Purchases of PFCs (metric tons)

  11. Chronology - PFC Technology Development 1994 - Tested first commercial PFC thermal destruction device (Delatech’s CDO) - Alzeta develops and installs first inwardly-fired burner at SEMATECH - MIT starts screening PFC alternative chemicals 1995 - Alzeta licenses burner technology to Edwards - IBM demonstrates 50% C2F6 reduction by process optimization

  12. Chronology - PFC Technology Development (Cont’d) • - Edwards develops and SEMATECH tests prototype burnbox • - MIT successfully destroys destruction of PFCs in microwave reactor • - Novellus and 3M develop C3F8 as C2F6 replacement • 1996 - Beta testing of PFC capture technologies • Air Products/Radian at TI • Air Liquide at TI • BOC at IMEC

  13. Chronology - PFC Technology Development (Cont’d) • - Schumacher unveils potential PFC alternative (TFAA) • - C3F8 is being evaluated in fabs at TI and AMD as drop-in replacement for C2F6 • - Edwards improves burnbox to destroy CF4, tested at Motorola • - DuPont announces PFC replacement studies

More Related