1 / 17

— Automatic Optical Alignment for AFM

The Project on Micro Manipulation Contest. — Automatic Optical Alignment for AFM. Adviser: Li-Chen Fu. Team Members: S. K. Hung, C. F. Tsai, Y. P. Shyu, D. J. Tzou. 2003 Sep. 19. Outlines. Introduction A Novel Optical Design for AFM The Profile of This Project. 2/17. 1. Introduction.

miakoda-young
Télécharger la présentation

— Automatic Optical Alignment for AFM

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. The Project on Micro Manipulation Contest — Automatic Optical Alignment for AFM Adviser: Li-Chen Fu Team Members: S. K. Hung, C. F. Tsai, Y. P. Shyu, D. J. Tzou 2003 Sep. 19

  2. Outlines • Introduction • A Novel Optical Design for AFM • The Profile of This Project 2/17

  3. 1. Introduction Question: Move the Sample or Move the Probe? Typical AFM Block Diagram 3/17

  4. Scanning Sample Type v.s. Scanning Probe Type Scanning Sample Type (move the sample / fix the probe) simple detective optical arrangement limited sample size / mass Scanning Probe Type (move the probe / fix the sample) unlimited sample size / mass detective optical head is too massive (700g) to move tracking laser path is hard to implement (nm scale tracking error) 4/17

  5. Scanning Sample Type v.s. Scanning Probe Type Detective Optical Head 4 DOFs to adjust! → complex mechanism embedded → massive (700g) → limited scanning frequency 5/17

  6. Scanning Sample Type v.s. Scanning Probe Type 6/17

  7. Scanning Sample Type v.s. Scanning Probe Type Question:Move the Sample or Move the Probe? Answer: Move the Sample in Horizontal Directions (x, y) and Move the Probe in the Vertical Direction (z). Reason: 1. Horizontal scanning motion is slow (<10Hz) a massive sample is OK 2. Vertical tracking motion is fast (>1000Hz) a light probe is OK Remark: I propose a novel optical design to cause the detective laser spot to track the probe’s vertical motion. 7/17

  8. 2. A Novel Optical Design for AFM • Detective Laser Spot Tracking (novel) • Traditional Optical Microscope • Combination 8/17

  9. Detective Laser Spot Tracking The two lenses can move relatively KEY: Keep the optical path parallel 9/17

  10. Traditional Optical Microscope Magnitude = f2 / f1 The two lenses can move relatively KEY: Keep the optical path parallel CCD camera 10/17

  11. Novel AFM + Traditional Optical Microscope 11/17

  12. 3. The Profile of This Project Integrating AFM with a traditional optical microscope Automatic tip exchange (2-dof) and optical alignment (4-dof) Combining advantages of both scanning types (scanning sample type and scanning probe type) The Targets of This Projects 12/17

  13. Automation Flow Diagram D/A card 6208 with control software 13/17

  14. base protection piezo z-scanner bimorph magnet lens set steel plate probe Z-Scanner Mechanism with Lens 14/17

  15. Robot Mechanism Coil 15/17

  16. Human Resources S. K. Hung C. F. Tsai Y. P. Shyu D. J. Tzou

  17. Any Comment Is Appreciated! ~ The End ~

More Related