1 / 52

NMDC Cleanroom Operations

Learn about the policies, procedures, and safety practices for working in the Cleanroom at the Nano and Micro Device Center (NMDC) at the University of Alabama in Huntsville. This information is sourced from Georgia Tech MiRC and UC Berkeley Microlab.

pself
Télécharger la présentation

NMDC Cleanroom Operations

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. NMDC Cleanroom Operations Nano and Micro Device Center ( NMDC ) University of Alabama in Huntsville Part of content is borrowed from the website information of Georgia Tech MiRC, and UC Berkeley Microlab. Chemical Safety Training Nano and Micro Device Center (NMDC) UAH

  2. NMDC Contact List • NMDC Staff • Director: Dr. R. Lindquist 400 Optics Building (256) 824 -2882 • Associate Director: Dr. J. D. Williams 406 Optics Building (256) 824 -2898 • Research staff: Dr. Yongbin Lin 438 Optics Building (256) 824 - • Process Engineer: Frank Berisford 103 Optics Building (256) 824 -2981 • Operational support: Rozella Coggin 412 Optics Building (256) 824 -2907 • Other Emergency Contacts • Campus Police 400 Optics Building (256) 824 -2882 • Campus Chemical Safety 406 Optics Building (256) 824 -2898 • Facilities Services See an NMDC Staff member Nano and Micro Device Center (NMDC) UAH

  3. Agenda • General policies • Terminology • Cleanroom hazards • Safety Practices • Storage and disposal of chemicals • Accidents and emergencies Nano and Micro Device Center (NMDC) UAH

  4. POLICIES AND PROCEDURES HIGHLIGHTS (1) • Everyone must sign in/out in the log. • REQUIRED ATTIRE: Hood, gown, booties w/shoe covers, bouffant caps, gloves, and safety eyewear. • Keep all hair and ears covered with hood or cap. • Never open your gown in the cleanroom. • Never touch your skin with your gloves. If you do, put on clean gloves immediately. • Only authorized users may enter the cleanroom unescorted. Nano and Micro Device Center (NMDC) UAH

  5. POLICIES AND PROCEDURES HIGHLIGHTS (2) • Visitors must be escorted by a cleanroom qualified faculty/staff member. • No food or drink is permitted in the cleanroom. • No corrugated cardboard, styrofoam, foam rubber or non-cleanroom paper is permitted in the cleanroom. • No pencil, erasers or retractable pens are permitted in the cleanroom. • Be considerate. (Clean up your own mess, don’t mess up someone else's work, order new supplies if they are needed.) Nano and Micro Device Center (NMDC) UAH

  6. POLICIES AND PROCEDURES HIGHLIGHTS (3) • Ask for permission before bringing anything in or taking anything out of the cleanroom. • DO NOT modify equipment without the approval of the NMDC Staff. • IF YOU AREN’T SURE HOW IT WORKS, ASK BEFORE YOU USE IT! • FOLLOW THE NMDC and UAH LAB SAFETY GUIDELINES. • This lab course qualifies you only to enter the lab and use the computer. Everyone qualifies separately to use any piece of equipment needed. Nano and Micro Device Center (NMDC) UAH

  7. POLICIES AND PROCEDURES HIGHLIGHTS (4) • NMDC requires from each member a donation of 4 hours to help lab cleaning in each semester. • Members learn from each other and, in turn, teach others. Nano and Micro Device Center (NMDC) UAH

  8. I—Terminology • MSDS—Material Safety Data Sheet • A MSDS is a document that describes a chemical’s properties, hazards, and safe use policies • Partial Listing • Chemical Property Terms • Exposure, toxic effects, & exposure levels • Storage & handling • Emergency procedures • Safe disposal & transportation Nano and Micro Device Center (NMDC) UAH

  9. Sources of Chemical Information • NMDC cleanroom website • Vender website • Manufacturers/suppliers • Include a MSDS with the first shipment of that chemical Nano and Micro Device Center (NMDC) UAH

  10. II—Cleanroom Hazards • While working in the cleanroom, you will use various chemicals to process your wafers and the following (potential) hazards • Hydrofluoric Acid (HF) • Acids and bases • Solvents • Electrical • Sharps—razor blades, broken wafers • Toxic, flammable, and corrosive gases Nano and Micro Device Center (NMDC) UAH

  11. Specific Chemical Hazards • Hydrofluoric Acid • Acetone and Flammable Solvents • Chlorinated Solvents Nano and Micro Device Center (NMDC) UAH

  12. Hydrofluoric Acid (HF) 1 • Highly corrosive, readily penetrates the skin, causes deep tissue layer destruction and destruction of bone, pain may be delayed from 1 to 24 hours, therefore early treatment is very important. Use Calcium Gluconate gel for treatment—tubes are located near each fume hood. Calcium Gluconate is not a burn ointment • Literature indicates that HF exposures of as little as 2% of body area have been fatal. Nano and Micro Device Center (NMDC) UAH

  13. Hydrofluoric Acid (HF) 2 • Protective gloves. Even pin-hole leaks through gloves may result in significant damage to the skin, especially if contact under the finger nails occurs. If hands are sweaty, leakage may not even be noticed. Gloves should be dedicated for HF use only, and should be discarded if any contact with the acid occurs. They should be inspected prior to use and changed frequently. • Glove breakthrough times vary with material, thickness,and manufacturer. Contact the glove manufacturer or EMS for information on specific gloves. In general, long gauntlet-type nitrile, neoprene, and natural rubber gloves should provide adequate protection against splashing and during the clean-up of small hydrofluoric acid spills. Nano and Micro Device Center (NMDC) UAH

  14. Hydrofluoric Acid (HF) 3 • Eye and Face Protection: Contact lenses may not be worn when handling HF. Splash-proof chemical goggles or safety glasses with side shields are required. In addition, face shields must be worn during HF use. • Protective Clothing: A lab coat, in addition to long gauntlet-type gloves, is the minimum required protection for the small quantities of HF (i.e., a few ml) typically handled at the NMDC. Neoprene aprons with attached sleeves shall be worn while transferring quantities in excess of 10 ml of HF. Nano and Micro Device Center (NMDC) UAH

  15. Acetone and Flammable Solvents • Solvents have a high vapor pressure • These fumes can make breathing difficult • They are extremely flammable • Solvents often cause extreme pain if splashed in the eye • Like alcohol (a solvent), they attack the liver • Extreme care should be used with using solvents at high temperatures. Improper use may result in fire or explosions Nano and Micro Device Center (NMDC) UAH

  16. Chlorinated Solvents • Chlorinated solvents are very useful and thus often found in cleanroom environments • However they are extremely toxic and often flammable • Use extreme care when processing these chemicals • Do NOT use these chemicals if you are or think you are pregnant • Example: Trichloroethylene • Extremely useful for cleaning metals and disolving polymers • Known to cause cancer in humans • Must be covered at all times during use and placed at the rear of the hood • Reacts exothermically and should not be used in conjunction with a hotplate Nano and Micro Device Center (NMDC) UAH

  17. III—Safety Practices • Chemical usage • Safe chemical practices • Proper (improper) methods • User chemical storage • Personal protective equipment—PPE • Buddy system Nano and Micro Device Center (NMDC) UAH

  18. Chemical Usage • Chemical practice • NMDC wet benches for chemical use • Establishing your work environment • Proper use of labware • Chemical storage • Chemical supplies Nano and Micro Device Center (NMDC) UAH

  19. Safe Chemical Practices • Chemicals are to be used in their appropriate stations ONLY! • Be aware of possible chemical reactions • New chemicals must be approved by NMDC staff before bringing them into the cleanroom • Read MSDS before using chemicals • MSDS are available from web site • Users must provide an electronic copy of MSDS before brining a new chemical into the cleanroom Nano and Micro Device Center (NMDC) UAH

  20. Wet Sinks/Fume Hoods • Chemical bench operation • Four benches in the NMDC: Acid, Base, Solvent, RCA clean • NMDC process benches are labeled for use with their specific chemical type and/or use. Be sure you are using the proper hood for the your processes. • Chemicals used in the NMDC should be clearly labeled at all times and covered when not in immediate use. • Chemicals in use may be left unattended if labeled for short periods of time (30 min or so), however the user is not allowed to leave the cleanroom without storing or wasting the chemical and cleaning the appropriate dishware. • Personal storage of chemicals between uses is allowed in appropriated sealed containers that are labeled with the users name, date, and common chemical name. • The hoods are shared equipment: they should be clean when you arrive, and wiped down before you leave Nano and Micro Device Center (NMDC) UAH

  21. Hot Plate use in Wet Sinks/Fume Hoods • Hot plates • Can cause sever burns. • Be sure to turn hot plates off after use. • If you leave a hotplate unattended for short periods of time (10min or so) place an “IN USE” sign in front of it to warn others. • Keep flammables away from the hot plates. • The maximum temperature of hotplates in the solvent hood is 50 oC without express permission of the staff. • The use of Acetone on a hotplate requires specific staff permission and two people monitoring the process at all times. Nano and Micro Device Center (NMDC) UAH

  22. Establishing Your Work Environment • Be sure while working in the NMDC that you are thoughtful and courteous of others’ needs. • Each person working with chemicals in a hood should use approximately 1/3 of the bench at any given time • All containers should be clearly labeled PRIOR to use using a erasable marker with: • Your Name • Date • Chemistry contained • Labeling can be done on the container or on wipes placed below the container. • The label must be clearly visible and readable at ALL times. • All chemicals should be placed in such a way that allows safe operation without risk of spillage or inhalation. • Lids should be placed close by so that chemicals covered between uses. • Be sure you are aware of, can get to, and use proper hazardous waste/storage containers for your chemical operations • Clean as you GO!!! Allot can be said for maintaining a clean working environment. Nano and Micro Device Center (NMDC) UAH

  23. Labware • Make sure that the labware you use is compatible with the chemicals (or mixtures) you pour into them • Example: HF will attack (etch) a glass container, always use a plastic container Nano and Micro Device Center (NMDC) UAH

  24. Proper (Improper) Methods • Improper (shown) • Do not rinse wafer, or pour solvents down the drain • Proper • Use the solvent waste jug or beaker • Pour the contents of the beaker into the jug Nano and Micro Device Center (NMDC) UAH

  25. Personal (Personnel) Safety • Personal Protective Equipment • Buddy System • Contact Lenses Nano and Micro Device Center (NMDC) UAH

  26. Personal Protective Equipment (PPE) • The following PPE is required while using chemical in any hood: • Eye protection • Gloves • Face shield • Apron • Your cleanroom garment is NOT protective equipment Nano and Micro Device Center (NMDC) UAH

  27. Buddy System • Two or more people must be in the lab at any one time • It is a cleanroom violation to be in the lab alone • This is for your safety—and it’s the law Nano and Micro Device Center (NMDC) UAH

  28. Additional Issues • Irresponsible people endanger everyone • Report unsafe practices to the cleanroom staff • Contact lenses • They are allowed—with a warning • Contact lenses may trap chemicals, making eyewash more difficult • Wear a face shield over your safety glasses when working in the hoods Nano and Micro Device Center (NMDC) UAH

  29. What’s Wrong With This Picture? • Do not put yourself in a position that increases the risk of chemical exposure • Putting your face at sink top level is dangerous • Splash hazard • Inhalation hazard • Do not rest your hands/arms on the sink surface Nano and Micro Device Center (NMDC) UAH

  30. What’s Wrong With This Picture? • Do not lean into the hood • You expose yourself to harmful fumes • Stay behind the sash • (The plastic screen) Nano and Micro Device Center (NMDC) UAH

  31. Electrical Concerns • Do not operate equipment with cover panels removed • Do not operate equipment with frayed wires • For example: • E-beam evaporator--10,000 volts • Plasma etchers--high power RF • Most equipment runs on 208 volts 60+ amps • It only takes 0.1 amps to kill you! Nano and Micro Device Center (NMDC) UAH

  32. The Bottom Line on Safety • Safety is everyone’s responsibility • You are responsible for your own safety • Do your homework • Read the Material Safety Data Sheet (MSDS) for every chemical you work with • If you do not understand, ask questions Nano and Micro Device Center (NMDC) UAH

  33. IV—Storage and Disposal of Chemicals • Label all individual containers • Change label quarterly • Place old chemicals on storage cart Nano and Micro Device Center (NMDC) UAH

  34. User Chemical Storage • Chemicals • Photoresist • Polymers • No acids/bases • Store them in the appropriate cabinets Nano and Micro Device Center (NMDC) UAH

  35. Chemical Waste • Acids and Bases • Pour down the drain with running city (gray tap) water • Solvents & photoresist • Pour into the solvent waste jugs • DO NOT POUR SOLVENTS DOWN THE DRAIN Nano and Micro Device Center (NMDC) UAH

  36. Empty Waste Bottles • Empty acid and bases • Triple rinse with water, pour down the drain and dispose of the bottle • Empty solvent bottles (one gallon bottles) • Leave the empty bottle in the hood with the cap off • Staff will dispose of the bottle • Refill the squirt bottles—do no throw away Nano and Micro Device Center (NMDC) UAH

  37. Waste Containers • Place all used/waste chemicals on the chemical cart • Do not pour plating solutions down the drain • Place them on the waste chemical cart Nano and Micro Device Center (NMDC) UAH

  38. Gas hazards (partial listing) • Pyrophoric (Silane)—burns in contact with air • Flammable (Hydrogen) • Corrosive (Chlorine) • Asphyxiant (Nitrogen, Argon)—not hazardous as described above; but will not support life • You will not handle these gases (cylinders) in the cleanroom, but you will use them in process tools—etch and deposition systems Nano and Micro Device Center (NMDC) UAH

  39. Toxic Gas Alarms • Located on the cleanroom walls • Sensors located near the gas source • Plasma etchers • Plasma Deposition • Gas cabinets • If the alarm goes off, evacuate immediately Nano and Micro Device Center (NMDC) UAH

  40. Gas Safety • Do not cycle any valves • Do not loosen any fittings • Do not disconnect any gas lines • Be aware of alarms or any unusual odors Nano and Micro Device Center (NMDC) UAH

  41. Toxic Gases Used—Partial Listing • Phosphine • Silane • Chlorine • Boron Trichloride • Silicon Tetrachloride • Ammonia • Do not take the alarms lightly Nano and Micro Device Center (NMDC) UAH

  42. V—Accidents/Emergencies • Emergency Phones • Emergency Response Equipment • Chemical Accidents • Responding to a spill • Escalation • Transporting victims • Toxic Gas Alarms • Safety Showers • Evacuation Routes Nano and Micro Device Center (NMDC) UAH

  43. Emergency Phones • Emergency phones • Cleanroom entrance • Center cleanroom isle • Dial 6911 for UAH Police • Add this number to your mobile phone • State the nature of the emergency • Do not dial 911—they will not know where you are Nano and Micro Device Center (NMDC) UAH

  44. Emergency Response Equipment • Spill response kits • Location • Acid neutralizer • Base neutralizer • Absorbent material Nano and Micro Device Center (NMDC) UAH

  45. Responding to a Spill • You are expected to clean up small spills you made yourself • You know what you spilled • If you cannot, or are not sure what to do, call the staff • Report all spills regardless of size • Report all found spills, water leaks, or unknown materials Nano and Micro Device Center (NMDC) UAH

  46. Escalation • First person—you—clean it if you can • NMDC staff • UAH Environmental Health and Safety • HAZMAT • Important—report all spills • Call UAH police after hours—as well as NMDC staff Nano and Micro Device Center (NMDC) UAH

  47. Emergency Showers/Eyewash • Use the eyewash if you get any chemicals in your eyes • Force your eyes OPEN! • Buddies—make sure the victim stays in the eyewash for at least 15 minutes, they will lose track of time in the eyewash and think a few seconds is a long time Nano and Micro Device Center (NMDC) UAH

  48. Emergency Shower • Use the emergency shower whenever you are exposed on the torso, head or legs • Take ALL of your clothes off • Your clothing will trap the chemicals next to your body • Anyone not directly assisting the victim must leave the cleanroom Nano and Micro Device Center (NMDC) UAH

  49. Transporting a Victim • Minor injuries—other than chemical exposures—require attention commensurate with the injury • All chemical exposures require hospitalization Nano and Micro Device Center (NMDC) UAH

  50. Transportation Procedure • Call UAH police 6911 and state the nature of the emergency • For chemical exposures, use the Emergency Instruction Booklet located by the phone • Place a MSDS of the exposed chemical into the booklet • Print extra copies for the police and ambulance drivers Nano and Micro Device Center (NMDC) UAH

More Related