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Anhydrous hydrogen - PowerPoint PPT Presentation

SiO 2 properties and applications. Thermal oxidation basics. Manufacturing methods and equipment.

Chapter 6 Thermal oxidation and the Si/SiO 2 interface. SiO 2 properties and applications. Thermal oxidation basics. Manufacturing methods and equipment. Measurement methods (mechanical, optical, electrical). Deal-Grove model (linear parabolic model).

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Anhydrous hydrogen - PowerPoint PPT Presentation

SiO 2 properties and applications. Thermal oxidation basics. Manufacturing methods and equipment.