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EU Conference on Substitution of Hazardous Chemicals in Products and Processes

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Role of Glycine in Chemical Mechanical Planarization (CMP) of Copper

Role of Glycine in Chemical Mechanical Planarization (CMP) of Copper. SFR Workshop May 24, 2001 Serdar Aksu, Fiona M. Doyle Berkeley, CA. 2001 GOAL: to delineate specific roles of a range of complexing agents and oxidizers in copper CMP by 12/30/2001. Objective and Methods.

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Complexing agents - PowerPoint PPT Presentation

EU Conference on Substitution of Hazardous Chemicals in Products and Processes

Role of Glycine in Chemical Mechanical Planarization (CMP) of Copper