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Lecture 1a Role of Structures and Mechanisms in MEMS

Lecture 1a Role of Structures and Mechanisms in MEMS. A general overview of structural aspects of MEMS. Contents. Structures, Mechanisms, and MEMS Early MEMS devices Kinematic pairs and mechanisms in MEMS: excitement vs. practicality Deformable structures in MEMS

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Lecture 1a Role of Structures and Mechanisms in MEMS