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Application Book (1/2)

Application Book (1/2). Silicon dioxide : Thermal oxide, TEOS, PETEOS, SOG, BSG, BPSG, repeatability, stability, mapping, multi-layers. Nitride : SiNx, GAP measurement. ONO, OPO and ONOPO stacks : ONO, OPO, ONOPO, crystallinity of Poly-Si, rugged poly,mappings, repeatability.

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Application Book (1/2)