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Layout Small-Angle Rotation and Shift for EUV Defect Mitigation

Layout Small-Angle Rotation and Shift for EUV Defect Mitigation. Hongbo Zhang 1 , Yuelin Du 2 , Martin D.F. Wong 2 , Yunfei Deng 3 , Pawitter Mangat 3 1 Synopsys Inc., Hillsboro, OR 2 Dept. of ECE, University of Illinois at Urbana-Champaign 3 GlobalFoundries Inc., Sunnyvale, CA.

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Layout Small-Angle Rotation and Shift for EUV Defect Mitigation