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Nanoimprint lithography (NIL)

Nanoimprint lithography (NIL). UV-curable NIL. Resists for UV-NIL. Mold fabrication for thermal and UV-NIL. ECE 730: Fabrication in the nanoscale : principles, technology and applications Instructor: Bo Cui, ECE, University of Waterloo; http://ece.uwaterloo.ca/~bcui/

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Nanoimprint lithography (NIL)