1 / 2

MCP Parameters

MCP Parameters. Al2O3+ZnO Table 1: Dielectric constants [1] and resistivities [2] for Al2O3/ZnO ALD films. *) DEZ -- Diethylzinc (Zn(CH2CH3) 1. Herrmann et al, Proc. of SPIE Vol. 5715 (2005) p.159. 2. Elam et al, J. Electrochem. Soc. 150, pp. G339-G347, 2003. Bulk Material Borosilicate glass

stacy-holmes
Télécharger la présentation

MCP Parameters

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. MCP Parameters Al2O3+ZnO Table 1: Dielectric constants [1] and resistivities [2] for Al2O3/ZnO ALD films *) DEZ -- Diethylzinc (Zn(CH2CH3)1. Herrmann et al, Proc. of SPIE Vol. 5715 (2005) p.159. 2. Elam et al, J. Electrochem. Soc. 150, pp. G339-G347, 2003. Bulk Material Borosilicate glass Dielectric Const 5.8 Channel Resistive Layer Material 30% Al2O3, 70% ZnO

  2. MCP conductivity MCP resistance: R = 18-100 MW N = 5106 pores R1=R*N = (18-100MW)x5x106 = (90-500)1012W R1

More Related