1 / 23

Microelectronics Processing Course Introduction

Microelectronics Processing Course Introduction. Conductivity in solids. Resistivity  [  cm]. 10 -8. 10 18. 10 8. 10 -3. Glass. Ag. Si. Pure Diamond. Cu. GaAs. Al. Quartz. 10 -18. 10 3. 10 -8. 10 8. Conductivity  [  cm] -1. Conductors. Insulators.

syshe
Télécharger la présentation

Microelectronics Processing Course Introduction

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. Microelectronics Processing CourseIntroduction Microelectronics Processing Course J. Salzman Fall 2006

  2. Microelectronics Processing Course J. Salzman Fall 2006

  3. Conductivity in solids Resistivity  [  cm] 10-8 1018 108 10-3 Glass Ag Si Pure Diamond Cu GaAs Al Quartz 10-18 103 10-8 108 Conductivity  [  cm] -1 Conductors Insulators Semiconductors Microelectronics Processing Course J. Salzman Fall 2006

  4. History • 1904 Vaacum Tube • Concept of Field Effect Transistor • 1947 Bipolar Transistor • Bipolar IC • MOS Transistor • 1961 IC-MOS Technology • 1972 MOS Microprocessor Microelectronics Processing Course J. Salzman Fall 2006

  5. Microelectronics Processing Course J. Salzman Fall 2006

  6. Microelectronics Processing Course J. Salzman Fall 2006

  7. Moore Law(Gordon Moore 1965) The number of transistors in a chip will be doubled every 18 months Microelectronics Processing Course J. Salzman Fall 2006

  8. Microelectronics Processing Course J. Salzman Fall 2006

  9. Microelectronics Processing Course J. Salzman Fall 2006

  10. Microelectronics Processing Course J. Salzman Fall 2006

  11. MOS Transistor Gate Source Drain Microelectronics Processing Course J. Salzman Fall 2006

  12. MOS Transistor Gate Source Drain Electrons in inversion layer Microelectronics Processing Course J. Salzman Fall 2006

  13. W Drain L Gate tox Source Substrate Schottky contact Metal contact Si2O Microelectronics Processing Course J. Salzman Fall 2006

  14. Optical Measurements • Photometric • Interferometric • Polarization • Spectroscopic Microelectronics Processing Course J. Salzman Fall 2006

  15. Basic Optical Instruments • Microscope • Reflectometer (Nanospec) • Ellipsometer Microelectronics Processing Course J. Salzman Fall 2006

  16. Microelectronics Processing Course J. Salzman Fall 2006

  17. Microelectronics Processing Course J. Salzman Fall 2006

  18. Microelectronics Processing Course J. Salzman Fall 2006

  19. Microelectronics Processing Course J. Salzman Fall 2006

  20. Microelectronics Processing Course J. Salzman Fall 2006

  21. Microelectronics Processing Course J. Salzman Fall 2006

  22. Microelectronics Processing Course J. Salzman Fall 2006

  23. Microelectronics Processing Course J. Salzman Fall 2006

More Related