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Crossbeam User’s Group Meeting 10/06/2006

Crossbeam User’s Group Meeting 10/06/2006 . Crossbeam User’s Group Meeting 10/06/2006. Agenda Introduction: Who is David Frey? Plans, Ideas, and Status: What do we want to get out of the 1540 EsB? Potential projects Future needs Proposed changes Current System Status Suggestions

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Crossbeam User’s Group Meeting 10/06/2006

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  1. Crossbeam User’s GroupMeeting 10/06/2006

  2. Crossbeam User’s GroupMeeting 10/06/2006 • Agenda • Introduction: • Who is David Frey? • Plans, Ideas, and Status: • What do we want to get out of the 1540 EsB? • Potential projects • Future needs • Proposed changes • Current System Status • Suggestions • Feedback

  3. Crossbeam User’s GroupMeeting 10/06/2006 • Introduction: • ~ 9.5 years with Carl Zeiss SMT (LEO) • Conventional/Environmental SEM • FESEM • XB • 2 Years @ Jackson Labs Bar Harbor, ME • Light Microscopy • IA • SEM • TEM • Webpage publishing • Desktop publishing • 2.5 Years @ OCG Microelectronic Materials • SEM • Metrology • Desktop Publishing • Lawrence University, Appleton, WI • Bachelor’s Degree in Biology • TEM sample prep, and imaging • Light Microscopy

  4. Crossbeam User’s GroupMeeting 10/06/2006 • Plans, Ideas, and Status: • What do we want to get out of the 1540 EsB? • Defect Analysis • Sample Analysis • TEM Sample Prep • Sample modification • Circuit Edit? • Work with the Zyvex Systems • TEM Sample Preparation

  5. Crossbeam User’s GroupMeeting 10/06/2006 • Plans, Ideas, and Status: • Potential projects: • Your Suggestions Here:

  6. Crossbeam User’s GroupMeeting 10/06/2006 • Plans, Ideas, and Status: • Future needs: • Airlock • Cryo System • Plasma Cleaner • Different TEM Sample LO System • Suggestions Welcome

  7. Crossbeam User’s GroupMeeting 10/06/2006 • Plans, Ideas, and Status: • Proposed changes: • Move the STEM Detector to the SUPRA • Add an airlock • Faster sample turn around • Quicker use of GIS • Semi-Weekly Maintenance checks • i-Beam • e-Beam • Stage • Vacuum system • GIS

  8. Crossbeam User’s GroupMeeting 10/06/2006 • Plans, Ideas, and Status: • Current System Status • FIB Column i-probes checked, and adjusted • Currents look good • 20nA is low • Others are cutting well, and are close to stated value • Vacuums look good on both columns. • Gemini Image appears to be good • GIS Status • Pt Deposition: Good • W Deposition: Non-functional • Insulator: Untested to date • H2O and XEF2 Etches untested • Suggestions

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