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Latest Results and Advancements with HIPIMS Coatings

Latest Results and Advancements with HIPIMS Coatings. G. Terenziani , S.Calatroni , A. P. Ehiasarian , T. Junginger. Outline. D c Magnetron Sputtering – The Origins From D c Magnetron Sputtering to HiPIMS HIPIMS Samples Analysis: XRD RRR OES MS HIPIMS Cavity Results. Outline.

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Latest Results and Advancements with HIPIMS Coatings

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  1. Latest Results and Advancements with HIPIMS Coatings G. Terenziani, S.Calatroni, A. P. Ehiasarian, T. Junginger

  2. Outline • Dc Magnetron Sputtering – The Origins • From Dc Magnetron Sputtering to HiPIMS • HIPIMS Samples Analysis: • XRD • RRR • OES • MS • HIPIMS Cavity Results

  3. Outline • Dc Magnetron Sputtering – The Origins • From Dc Magnetron Sputtering to HiPIMS • HIPIMS Samples Analysis: • XRD • RRR • OES • MS • HIPIMS Cavity Results

  4. DC Magnetron Sputtering (DCMS)

  5. DCMS Features Pros: • High deposition rate • Good film adherence to the substrate Cons: • Difficulty to coat complex geometry • Columnar growth of the film • Porosity of the film

  6. Outline • Dc Magnetron Sputtering – The Origins • From Dc Magnetron Sputtering to HiPIMS • HIPIMS Samples Analysis: • XRD • RRR • OES • MS • HIPIMS Cavity Results

  7. From DCMS To HIPIMS Based on “Structure Zone Model” - Thornton, J.Vac. Sci. Technol. 11 (1974) 666

  8. From DCMS To HIPIMS To enhance Ions production Higher power Higher Plasma density and higher cathode current Overheating and possible melting of the cathode HIPIMS (High Power Impulse Magnetron Sputtering)

  9. HPIMS Typical voltage and current trace from a high power pulsed magnetron discharge. Example of a duty cycle.

  10. HIPIMS – Characteristics Pros: • Smoother thin film surface • Very good film adherence to the substrate • Possibility to coat complex geometries • Possibility of self-sputtering and resulting removal of defects and impurities Cons: • Low deposition rate

  11. Outline • Dc Magnetron Sputtering – The Origins • From Dc Magnetron Sputtering to HiPIMS • HIPIMS Samples Analysis: • OES • MS • XRD • RRR • HIPIMS Cavity Results

  12. HIPIMS Samples – Optical Emission Spectroscopy (OES)

  13. HIPIMS Samples – Optical Emission Spectroscopy (OES)

  14. Outline • Dc Magnetron Sputtering – The Origins • From Dc Magnetron Sputtering to HiPIMS • HIPIMS Samples Analysis: • OES • MS • XRD • RRR • HIPIMS Cavity Results

  15. HIPIMS Samples – Mass Spectrometer (MS) – Nb+ case Low Energy zone Medium Energy zone High Energy zone

  16. HIPIMS Samples – Mass Spectrometer (MS) – Nb+ case

  17. HIPIMS Samples – Mass Spectrometer (MS) – Nb+ case

  18. HIPIMS Samples – Mass Spectrometer (MS) – Nb+ case

  19. HIPIMS Samples – Mass Spectrometer (MS)

  20. Outline • Dc Magnetron Sputtering – The Origins • From Dc Magnetron Sputtering to HiPIMS • HIPIMS Samples Analysis: • OES • MS • XRD • RRR • HIPIMS Cavity Results

  21. HIPIMS Samples – X-Ray Diffraction Nb <110> Cu <200> Cu <200> Nb <110> Nb <110> Cu <200>

  22. HIPIMS Samples – X-Ray Diffraction

  23. Outline • Dc Magnetron Sputtering – The Origins • From Dc Magnetron Sputtering to HiPIMS • HIPIMS Samples Analysis: • OES • MS • XRD • RRR • HIPIMS Cavity Results

  24. HIPIMS Samples – Residual Resistance Ratio (RRR)

  25. HIPIMS Samples – Residual Resistance Ratio (RRR)

  26. Outline • Dc Magnetron Sputtering – The Origins • From Dc Magnetron Sputtering to HiPIMS • HIPIMS Samples Analysis: • XRD • RRR • OES • MS • HIPIMS Cavity Results

  27. HIPIMS on 1.3 GHz Cavity – Deposition System Central Cathode 413 mm Magnet 1.3 GHz Cavity

  28. HIPIMS on 1.3 GHz Cavity Before coating After coating

  29. HIPIMS on 1.3 GHz Cavity - Results

  30. Thank you for your attention

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