Adhesive Bonding with SU-8
Adhesive Bonding with SU-8. Advanced microtechnology course (P) Maria Berdova. Wafer Bonding. Adhesive Bonding. W. Brockmann, P. L. Geiß, J. Klingen , B. Schröder , Adhesive Bonding, Materials, Applications and Technology , 2009. SU-8. Epoxy-based negative photoresist
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