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Ch. 12 Filter Installation Leak Testing

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Ch. 12 Filter Installation Leak Testing. HEPA test. Manufacturer's factory and packed OK Unpacked and fitted into the filter housings  maybe damage Leakage problems casing housing Testing : artificial test aerosol. Leakage areas in a HEPA filter.

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Ch. 12 Filter Installation Leak Testing

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  1. Ch. 12 Filter Installation Leak Testing

  2. HEPA test • Manufacturer's factory and packed OK • Unpacked and fitted into the filter housings maybe damage • Leakage problems • casing • housing • Testing : artificial test aerosol

  3. Leakage areas in a HEPA filter A - filter paper-to-case cement area C- gasket D - frame joints. B - filter paper (often at the paper fold)

  4. Gasket and casing leaks from filter inserted up from cleanroom Gasket leaks from filters inserted down from ceiling

  5. Figure 12.4 Filter-housing gel seal method

  6. Artificial Smoke and Particle Test • Cold-generated oils • Di-octyl phthalate (DOP)鄰苯二甲酸二辛酯 • oily liquid, potentially toxic effects, no longer used • Di-octylsebacate (DOS)葵二酸二辛酯 • 常用 • poly alpha olefin (PAO)聚烯茎油 • 常用

  7. Cold-generated oil Test Air+ oil particle Laskin nozzle air (high pressure) 0.5mm Air pump oil

  8. Hot generated smokes inert gas: CO2 vaporize Evaporation chamber oil smoke condense oil aerosol 0.3mm

  9. Hot oil smoke generator

  10. Semiconductor manufacturing • 'outgassing' • chemical products harmful to filter • 使用Polystyrene Latex Spheres (PLSs) 聚苯乙烯乳膠球(0.1 ~ 1mm)

  11. Apparatus for Measuring Smoke Penetration • Photometer光度計 • 28 1/min (1 ft3/min) of airborne particles • particles refract the light • electrical signal • concentration: between 0.0001 μg/1 and 100 μg/1.

  12. Single particle counters • sample a volume of air and this is collected in a set time

  13. Methods of Testing Filters and Filter Housings • Scanning methods • a probe with a photometer, or single particle counter, • Scan speed : not more than 5cm/s • leaks : media, filter case, its housing • The most common leaks: • around the periphery of the filter • the casing-to-housing seal, • the casing joints

  14. Repair of leaks • Filter media leak • at the fold of the paper • repaired on site with silicon • replaced

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