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SFB…

SFB…. DRIE. #6701. #6839. DRIE - exploded channels. #6844. KOH <100>. #2981. # 3022. KOH - exploded channels. exploded channels. DRIE ~ 7 bars. KOH ~ 18 bars.

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SFB…

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  1. SFB…

  2. DRIE #6701 #6839

  3. DRIE - exploded channels #6844

  4. KOH <100> #2981 #3022

  5. KOH - exploded channels

  6. exploded channels DRIE ~ 7 bars KOH ~ 18 bars

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