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Dirk Beernaert, European Commission Brussels, 16 December 2010

Dirk Beernaert, European Commission Brussels, 16 December 2010. Advanced MM, MtM and Beyond CMOS Manufacturing Workshop Challenges, Strategies, R&D Topics. Outline. A look at the higher policy level Micro- and Nanoelectronics – A changing landscape

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Dirk Beernaert, European Commission Brussels, 16 December 2010

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  1. Dirk Beernaert, European CommissionBrussels, 16 December 2010 Advanced MM, MtM and Beyond CMOS Manufacturing Workshop Challenges, Strategies, R&D Topics

  2. Outline • A look at the higher policy level • Micro- and Nanoelectronics – A changing landscape • Micro- and Nano-electronics – EU policy and funding • Objectives of the Workshop • Summary

  3. From 10 year Lisbon Strategy… to EUROPE 2020 • UPDATE VISION TO POST-CRISIS WORLD • IMPROVE DELIVERY • Smart Growth: knowledge and innovation economy • Sustainable growth: greener and competitive economy • Inclusive growth: high employment, knowledge people and social and territorial cohesion EUROPE 2020: A EU strategy for smart, sustainable and inclusive growth 5 EU Targets – translated into national ones 7 Flagship initiatives – EU & national action COMMUNICATION FROM THE COMMISSION COM(2010) 2020 http://ec.europa.eu/eu2020/pdf/COMPLET%20EN%20BARROSO%20%20%20007%20-%20Europe%202020%20-%20EN%20version.pdf

  4. Europe 2020: 5 EU Headline Targets(translated in national and regional ones) By 2020: • 75 % (now 69) employment rate(% of population aged 20-64 years) • 3% (now 1,8) Investment in R&D (% of EU’s GDP) • “20/20/20”climate/energy targets met (incl. 30% emissions reduction if conditions are right) • < 10% (now 15) early school leavers & min. 40% (now 31) hold tertiary degree • 20 million less people (now 80) should be atrisk of poverty

  5. Communication COM(2010)2020 of 3.3.2010 Europe 20203 priorities, 7 flagship initiatives A strategy for smart, sustainable and inclusivegrowth • Innovation Union • Youth on the move • A Digital Agenda for Europe • Resource efficient Europe • An industrial policy for the globalisation era • An Agenda for new skills and jobs • European Platform against Poverty http://ec.europa.eu/eu2020

  6. EU2020 Flagship TOWARDS AN INNOVATION UNION Communication COM(2010)546 of 6.10.2010 • Innovation Union will advance scientific boundaries, increase European competitiveness and help solve societal challenges such as climate change, energy and food security, health and an ageing population. • Around 16,000 participants from research organisations, universities and industry, including about 3,000 SMEs, will receive funding. It is expected to create more than 165.000 jobs. From idea to the market Excellent Knowledge Base Access to finance Innovation Market European innovation partnerships & international cooperation

  7. Strengthen knowledge base, complete ERA joint programming, education, skills, mobility researchers, cross border cooperation, research infrastructures, … Improving framework conditions for business to innovate single EU Patent, access to capital (VC), risk sharing, standards setting, pre-commercial innovation procurement, … Set up 'European Innovation Partnerships' Societal priorities and competiveness ! Development and deployment of the technologies. Link research and innovation Better use of financial EU instruments to support innovation structural and social funds, rural development funds, R&D framework programme, CIP … EIB … and streamline administrative procedures … Strengthen partnerships in knowledge triangle (education, business, research and innovation) and between knowledge clusters people, institutions, infrastructures, regions, … The Innovation Union: targets EU2020 Flagship http://ec.europa.eu/research/innovation-union

  8. Industrial Policy for the Globalisation Era  Putting Competitiveness and Sustainability at Centre Stage. Ensuring timely modernisation of industry Innovation, knowledge and capital intensive industries Master Globalisation: emerging market competition, international value chains, raw materials, energy, new Framework conditions for global competitiveness incl. SMEs Strengthen the single market and access to finance Achieving a low-carbon resource efficient economy Respond to emerging societal challenges: security, health, aging, mobility Strengthen industrial innovation performance Key Sector initiatives Transport, energy, environment Exploit cooperation between (regional)innovation clusters EU2020 Flagship Communication COM(2010)614 of 28.10.2010

  9. EU2020 Flagship A Digital Agenda for EuropeEvery European Digital ! Communication COM(2010)245 of 19.05.2010 A vibrant digital single market Fast and ultra fast internet access Interoperability and standards Trust and security Enhancing digital literacy, skills and inclusion Research and innovation ICT-enabled benefits for EU society http://ec.europa.eu/information_society/digital-agenda

  10. Outline presentation • A look at the higher policy level • Micro- & Nano-electronics – the global situation • Micro- & Nano-electronics – EU policy plus FP & ENIAC • Objectives of the Workshop

  11. Service Providers WW$6300B / Europa $1600B Automotive - Industrial - Defense Medical - Space Electronics WW$1500B / Europa $315B Semiconductors $256B / Europa $41B Semiconductors as key enabling industry - Broadcast - Telecom Operators - Internet Services Providers - Games Semiconductors provide the knowledge & technologies that generate some 10% of global GDP. 2007 World GDP=65200BUS$ (ppp based) Source: IMF, ESIA, WSTS, Decision

  12. The Supply Chain Today Data Processing Communications Industrial and Medical Consumer Automotive Military, Civil Aerospace, Security

  13. But Fab Cost Entry Barrier Explodes ! Source: IC-Insights, 01/2008

  14. Global Consolidation: Number of Logic IDMs with Fabs.European Chip makers are moving up the value chain: From the hardware supply side into the final application Legislator regulations Content provider Gateway mgmt Service provider Content protection Delivery network System integrator Application System mgmt Infrastructure Chip maker Software Semi equipment Wafer foundry Semi materials Changing business models IBS 2009, ST 2010

  15. Academia, Scientific Research Institu- tions Eq.& Materials • IP Providers: • IP blocks • Software • (firmware, stacks, • middleware, OS) • Design houses • EDA • S/C Mfg • Services: • Foundry • SATS IDM Academia, Scientific Research Institu- tions Eq.& Materials IDM Fabless DISTI DISTI Logistics service providers ODM EMS Module makers (branded) OEM • Content • Industry: • Providers • Aggregators • Service prov. (branded) OEM Service providers (virtual) Network op. (Consumer) Retail Service providers/ (virtual) network op. Distrib. Businesses, Consumers, Authorities (Consumer) Retail Businesses, Consumers, Authorities The evolving SC value chain / landscape From a linear chain... ...to a networked model Source: ESIA

  16. Intel Dublin

  17. Recommendations & Actions Mastering Innovation Develop a European industrial innovation policy - with nano- / microelectronics at its core Lead markets Stimulate ‘market pull’ across Europe in chosen lead markets Health and wellness; transport and mobility; security and safety; energy and environment; communication; infotainment R&D Give priority to the European-wide micro- / nanoelectronics R&D in framework programmes, public-private partnerships(EUREKA, ETPs, JTIs),national programmes Manufacturing Launch a strategic European industry plan that aims at revitalising sc manufacturing capabilities in Europe. Upgrading /converting of existing fabs. Developing technology and manufacturing capabilities for devices in areas where Europe has strengths. Education Make micro- and nanoelectronics in education an objective Stimulate science and technology; awareness of the micro-/nano-electronics innovation potential; foreign talent; research infrastructure as invention incubators Shaping the Future Source: ESIA

  18. Nanoelectronics: Challenges”Small, smaller, smarter” • Keep research, manufacturing, integration & system competence in Europe?IPR, lead markets, user-supplier relationships, regional innovation clusters. • Our part of global value chain:equipment, manufacturing (incl. 450mm), SMEs Policy & more efforts to keep Europe attractive for investments in semiconductor research & manufacturing and for its application in key lead markets. High on EU 2020 Agenda -

  19. Outline presentation • A look at the higher policy level • Micro- & Nano-electronics – the global situation • Micro- & Nano-electronics – EU policy plus FP & ENIAC • Objectives of the Workshop

  20. What can the European Commission do ? ? • policy • funding EU levers for sustainable growth and jobs

  21. Why an industrial policy for Nanoelectronics NOW? - financial & economic crises (B€ losses – lack of capital for risk taking!) - globalisation (loss of jobs, loss of value added, loss of government income!) - fierce and growing competition from industry clusters in other regions driven by increased political and financial support. “If Europe wants to achieveglobal competitiveness it has to have direct access to state of the art processing technology and manufacturing competencies. Therefore the European Community should extend their Industrial Policy Framework by similar programs as in the Rest of the World in order to keep Europe’s Innovation driven Industry sustainably and globally competitive.” Dr. J. Knorr Urgent need for a competitive industrial policy, a project plan with detailed Objectives and estimated amount of resources !

  22. Industrial PolicyKey Enabling Technologies Communication COM(2009)512 of 30.9.2009 Micro- and nanoelectronics, including semiconductors Preparing for our future: Developing a common strategy for key enabling technologies in the EU Advanced materials Photonics Biotechnology Nanotechnology Advanced manufacturing Systems http://ec.europa.eu/enterprise/sectors/ict/key_technologies

  23. Identified Key Enabling Technologies (KET) Nanotech,Micro- and Nanoelectronics, Photonics, Advanced Materials, Biotech Communication COM(2009)512 of 30.9.2009 • Driving our competitiveness, our innovation potential and knowledge-based economy delivering new goods and services • Modernization of the industrial and research base • Creating regional knowledge eco-systems incl. clusters of SMEs. Importance of KETs Defining KETs • Knowledge intensive • R&D intensive • Capital intensive • (Multi-)Skill intensive • Enable innovation, • Multipliers • Systemic relevance High Level Group (25#): • industries, incl. SMEs, • research community • member states • EIB Make policy recommendations using existing instruments existing state aid rules, improve access to finance Shared long term vision and A sense of partnership Make policy recommendation for EU2020, flagships and FP 8 http://ec.europa.eu/enterprise/sectors/ict/key_technologies

  24. Key enabling technologies and their contribution to Europe’s grand societal challenges

  25. FP7-CIP/ICT Budget Profile: 70% increase in period 2011-13 Financial support • FP7: master & shape research & development • CIP: ensure wider uptake & better use of research • + Regional and Structural Funds,…

  26. Nanoelectronics”Small, smaller, smarter” - Advanced communication & computing components enabling pervasive applications - Lower cost, higher performance and more functionality performance Enabled by Smart design and Smart manufacturing of Smart Components Digital Society • Power consumption More than Moore: Diversification Analog/RF Passives HV Power Biochips SensorsActuators 130nm Interacting with people and environment Non-digital SoC & SiP - 90nm 65nm Combining SoC and SiP: Higher Value Systems Moore’s Law: Miniaturization 45nm Information Processing Digital content SoC Baseline CMOS: CPU, Memory, Logic 32nm 22nm Beyond Moore

  27. Advanced Nanoelectronics Technology • To stimulate interaction of system and technology to better explore European system competences. • To address energy efficiency needs for mobile applications • Nanoelectronics products as system enablers and solution providers for global challenges as aging society, global warming, growing population or sustainable manufacturing. • To prepare for “beyond” traditional shrinking (ITRS roadmap) 35 nmGate Length

  28. Metrology Using X-Ray Techniques Jordan Valley, CEA-LETI, STMicroelectronics Crolles II, NXP Crolles R&D Ruthenium Atomic Vapor Deposition Competitiveness in Nanoelectronic Device Generations AIXTRON, Fraunhofer IISB, Infineon Munich Semiconductor Equipment for Wafer Bonding with Plasma Activation EV Group, CEA-LETI, Soitec 3D Integration of Bulk Si Wafers EV Group, CEA-LETI, STMicroelectronics Crolles II Low Energy and Dose Implant Test SEMILAB, Fraunhofer IISB, ST Microelectronics Crolles II, NXP Crolles R&D Manufacturing and Equipment assessment and Access • Access to nano-manufacturing and to advanced technologies to be assured in Europe. • Access to world wide equipment market for European suppliers, especially SMEs, need to be stimulated. • Access to design tools and multi-project wafers fabrication for education, PhD and SMEs.

  29. Very Advanced NanoE Components 2011-12(Call 8: 26/07/11 - 17/01/12) Topics and Target Outcome: a)- Very advanced Si and non-Si switches, memories and interconnects (perf/ee) - Co-integration of non-Si, charge, spin, photon based devices on Si b) - Combined modelling, technology+ design work at circuit, device, material level for monolith and 3D integr of BeyondC + very adv. MtM on Si backbone c)- Mfg solutions for integration/interfacing of Beyond CMOS + MtM with NanoCMOS - E&M solutions to manufacture and measure 1D + 3D Si, E&M assessment including 450 mm d)- CSAs to support 450 mm coordination, develop strategies, attract young ones and link up globally to support IP creation and manufacture in Europe 2011 60M€ STREPs, IPs, CSAs

  30. Automotive & Transport Communication & Digital Lifestyles Energy Efficiency Health & the Aging Society Safety & Security Design Technologies Semiconductor Process & Integration Equipment, Materials & Manufacturing ENIAC Joint Undertaking as Public-Private Partnership Executive Dir. and secretariat Industry and R&D actors Commission and Public Authorities

  31. Contracted public funding for cooperative projects in Nanoelectronics • First half of FP7 & first 3 calls of Eniac (2007-10): More than 500 M€ invested by EC in Semiconductors cooperative R&D! Photonics and Micro-/Nano-systems excluded

  32. Outline presentation • A look at the higher policy level • Micro- & Nano-electronics – the global situation • Micro- & Nano-electronics – EU policy plus FP & ENIAC • Objectives of the Workshop

  33. Potential issues in the Manufacturing Workshop Not exhaustive, just to sharpen the minds • Next generation of manufacturing plants (MM) • automation • clean room, green, energy, water, waste, … • 450 mm – upgrade in 300mm fabs - … • introduction next generation technology (equipment, materials, EUV-e-beam,…..) • Next generation manufacturing plants (MtM, smart components - SoC) • 300 mm, upgrade of existing fabs • 3 D • flexibility, product mix,… • introduction next generation technologies (dimension, …) • product specific issues • Next generation manufacturing plants (MtM, SiP, integrated smart systems) • packaging • 3D packaging • test, • system integration • Prototyping issues, foundry issues, …

  34. Objectives of the Workshop • Discuss Mfg Strategies of the SC Industry under changing R&D and • business models • Learn about specific (adv. MtM, adv. MM/BC) challenges for all parts • of the value chain • Discuss possible derived R&D topics • Define collaboration schemes (multi-disciplinarity, system level • integration) • Produce, distribute Workshop report describing discussions and results • Use results as input for FP7 ICT WP2013, for FP8 and also for Eniac

  35. Summary • At Policy level understanding is developed that R&D and Innovation are the basis for prospering economies and societies • The SC industry has changed its R&D and business models • The public research programmes need use the opening opportunities by • linking new policy and new industrial challenges • Specifics in the area of nanoelectronics manufacturing: • Find a balance between advancement of MM and diversification and • development of new MtM technologies. • This workshop should discuss the different strategies of industry and • Research and related challenges and R&D topics.

  36. THANK YOU Dirk.Beernaert@ec.europa.eu Information Society and Media: http://ec.europa.eu/information_society http://cordis.europa.eu/fp7/ict/nanoelectronics/mission_en.html European research on the web: http://cordis.europa.eu http://www.eniac.eu

  37. EU2020 Flagship Innovation UnionEuropean Innovation Partnerships Communication COM(2010)546 of 6.10.2010 • Strenghten the knowledge base • Education & Skills - Completing ERA • Mobility of researchers • Cross-border operation • Research Infrastructure • A better equilibrium between Research & Innovation • Strong societal priorities • Reinforce industrial competitiveness • A good usage of financial instruments • Venture capital, risk sharing • Pre-commercial procurement for innovation • Structural funds & social funds to promote R&I • Framework, CIP http://ec.europa.eu/research/innovation-union

  38. EU2020 Flagship Innovation UnionEuropean Innovation Partnerships • European Innovation Partnerships (EIPs) • challenge driven, stakeholder commitment, EU added value • Across the whole research and innovation chain • Strong focus on results, outcomes and impacts • 1 pilot • Active and healthy ageing • Potential others: • Smart Cities • Water-Efficient Europe • Supply of raw materials • Smart mobility • Agriculture

  39. EU2020 Flagship An industrial policy for the globalisation era • A new approach: • Policies directly targeting cost, price and innovative competitiveness of industry & sectors • Specific focus on key sectors (transport, energy, environment,…) • Promoting industrial innovation, closer linkage to industrial research Communication COM(2010)614 of 28.10.2010

  40. A Digital Agenda for Europe The Research & Innovation Pillar The Commission will leverage more private investment through pre-commercial procurement and public-private partnerships structural funds 20% yearly increase of ICT R&D budget (at least for FP7) The Commission will also reinforce coordination and pooling of resources with Member States and industry focus on demand- and user-driven partnerships put measures for 'light and fast' access to EU funds support joint ICT research infrastructures and innovation clusters, eInfrastructures and cloud computing strategy develop new generation of web-based applications and services by supporting standards and open platforms The Member States should double annual public spending on ICT R&D in ways that leverage an equivalent increase in private spending engage in large scale pilots in areas of public interest ••• 40

  41. ITRS-ERD vision of the role of Beyond CMOS and More than Moore elements to form future extended CMOS platforms. Advanced Nanoelectronics Technology • Future developments in Beyond CMOS and More than Moore as an extended-CMOS vision. No disconnection from the advanced silicon CMOS in order to keep impact of its results on the applications and markets. • Needs of hybridizing silicon with molecular switches, ferromagnetic logic, spin devices and sensors in order to enable heterogeneous and morphic system architectures. • Integrate-abilityof novel technology with CMOS and their reliability become key factors.

  42. Semiconductors as key enabling industry Communications – wired and wireless, mobile, RF connectivity solutions (Bluetooth, GPRS..), telecommunications, traditional telecom equipment, home networking equipment Consumer - entertainment, radio, TV, VCR, personal or home appliance, cameras, games, etc. Automotive – powertrain, safety management, body and convenience, engine controls entertainment... Industrial & Instrument - lab, test, control and measurements Semiconductors are for the Information Society what grain was for the agrarian, and iron & steel were for the industrial society… Shanghai Museum of Urban Development, 2004 Computer & Office - mainframe, peripheral office equipment and personal computers Source WSTS

  43. Europe 2020 – Innovation Challenge(European Commission (2010); Communication from the Commission: EUROPE 2020 - A strategy for smart, sustainable and inclusive growth; COM(2010) 2020; Brussels, 03/03/2010) • For effective deployment of KETs, it is, amongst other aspects, • important to: • focus on an increased technology transfer and EU-wide supply chains; • focus on increased joint strategic programming and demonstration projects; • combine the deployment of KETs and climate change policy; • promote demand through public procurement and via the Lead Market Initiative (e.g. protective textiles); • exchange experiences and best practices between Member States and at international level; • stimulate increased financial investment via EIB’s loan policy and venture capital financing; and • upgrade skills and provide appropriate training and education. • equal and global playing fields • cooperation between knowledge clusters

  44. The changing global landscape for the SC industry • Rapidly changing global landscape for the Semiconductor industry • Since 10 years, Europe is steadily loosing market shares • Slowing down of market growth in value terms • Increasing demand from consumer applications creates market potential while generating SC price decrease • Increased pace of innovation & electronic product penetration • Skyrocketing cost increases are forcing alliances: CAPEX 20% sales • Deverticalisation of the value chain and financial markets • The landscape is driving the industry to 3 different manufacturing models, while maintaining and enhancing its process expertise is key • Memories and microprocessors manufacturing • Logic products manufacturing • More than Moore manufacturing

  45. Summary of Trends & Convergence of Interests

  46. Alternative scenarios based on an assessment of selected competitiveness factors R&D Spending R&D & innovation policies, research investment targets Global Strength of European End-User Industry Global industry leadership, Electronics value added driven Pre-competitive Co-operation / Partnership Effectiveness Joint research and design centres, framework programmes, technology Globally Effective EU Monetary Policies Stability of exchange rates relative to other currencies Educational System Reinforcement Curricula, industry-university research, exchange programmes, brain retention Strength of European Internal Market End-user / consumer demand in Enlarged 25 EU Internal Market Target Investment Support / Incentives Levels Tax havens, access to capital, property incentives EU Legislative Environment Environment, safety & health,customs & security, IP rights Free & Fair Trade Policy Reciprocal world free trade Environment, elimination of tariffs European Labour Policies Sectoral flexibility of working hours and employment conditions

  47. ICTs require raw materials: The dynamics of two decades of computer chip technology development and their mineral and element impacts. In the 1980s, computer chips were made with a palette of twelve minerals or their elemental components. A decade later, sixteen elements were employed. Today, as many as sixty different minerals (or their constituent elements) are used in fabricating the high-speed, high-capacity integrated circuits that are crucial to this technology. Source: CT IC

  48. Key enabling technologies and their contribution to Europe’s grand societal challenges

  49. Key Enabling Technologies Get involved ! in 2011! Europe 2020 A strategy for smart, sustainable and inclusive growth An Industrial Policy for the Globalisation Era FP8 / CIP II Regional Policy for Smart Growth (Structural Funds) Trade / External Policies/ Single Market Multi-Annual Financial Framework 2014+

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