1 / 15

Hydrogen Measurement in PV Applications Using ERDA

Explore the role of hydrogen in passivation, measuring dielectric coatings, and silicon-dielectric interfaces with ERDA. Learn about ERD physics, resolution limits, setup at ANSTO, modeling spectrums, and plans for PV applications. Discover the potential of ERDA in hydrogen characterization for various applications.

arich
Télécharger la présentation

Hydrogen Measurement in PV Applications Using ERDA

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. ERDA, for measurement of hydrogen in PV applications -- DERF 06/08 -- Presented by: Andrew Thomson Supervisor: Dr Keith McIntosh

  2. Introduction • Specialised form of ion beam analysis. • Understand the role of H in passivation. • Measuring SC dielectric coatings and silicon—dielectric interfaces, after various treatments. • Overview:

  3. Really what is ERD – fancy RBS • Measurement of backscattered particle energy. • Gives energy count and yield. • Knowing “R cross-sections” give quantative measurement.

  4. Generalised ERD setup • Forward scatter measured. • Incident ion suppressed. • Experimental cross-sections. • RBS and ERD combined. • Generally energy only is measured.

  5. Resolution limits • Detection limits: • For an optimised sample 20 ppm, up to 1000nm depth. • Comparative techniques: • SIMS, similar resolution, better depth resolution. • FTIR, measures bonds, unsure of resolution.

  6. The physics of ERD – descriptively • Single atomic layer • Multiple layers add spread • Increased variance. • Straggle lowers energy. • Measured spectrum convolution of input spectrum with straggling function.

  7. The physics of ERD – descriptively • Example of an ideal RBS spectrum: • Generalised two part dielectric on a substrate. • Example of an actual silicon substrate.

  8. Setup at ANSTO – Lucas Heights

  9. Setup at ANSTO – Lucas Heights • 3 MeV tandem accelerator with a He ion source • So far we have used an incident power of 1.8 MeV. • Mylar foil • RBS: • Θ = 170 °, β = 60 °, α = 70 °. • ERD: • Θ = 30 °, β = 80 °, α = 70 °.

  10. RBS and ERD measurements • RB Spectra of a TiO2 dielectric layer on. • ERD specra • Shows surface absorption of H

  11. Modelling Spectrums • Guess work: • Layers. • Energy per channel. • Incident flux. • Substrate. • Experience needed:

  12. Modelling Spectrums – RBS TiO2

  13. Modelling Spectrums – ERD TiO2

  14. PECVD vs. TiO2 • PECVD • Optimised TiO2

  15. Plans for PV applications of ERDA • Hydrogen characterisation: • Basic PV processing steps. • PV dielectrics. • Hydrogenated TiO2 • Degradation processes. • Other applications: • Boron, and phos profiles. • Densification of TiO2.

More Related