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GLAST SSD mechanical measurements

GLAST SSD mechanical measurements. Instruments and methods: 15cm X 30cm micrometric computer assisted table with 5 m m resolution over the whole range Microscope with a computerized CCD camera with 768 X 576 pixels pixel size = 0.64 m m view area = 500 m m X 370 m m

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GLAST SSD mechanical measurements

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  1. GLAST SSD mechanical measurements Instruments and methods: 15cm X 30cm micrometric computer assisted table with 5mm resolution over the whole range Microscope with a computerized CCD camera with 768 X 576 pixels pixel size = 0.64mm view area = 500 mm X 370 mm Dimensional check: distance from strip 1 to strip 384 Nominal distance = 87324 mm Measured distance = 87329 ± 5 mm Measured pitch = 228.01 ± 0.01 mm

  2. DICING MEASUREMENTS d a c b

  3. STATISTICS OF THE DICING ERRORS Front cut orthogonal to the strips Side cut parallel to the strips

  4. Relevant measurements for ladder’s assembly: Dx = marker_edge dist.-300mm Dy = marker_edge dist.-200mm Requirement : -20mm < Dx, Dy < 20mm Selection parameters Shift = (Dya+Dyd)/2 Rotation = Dyd-Dya

  5. WAFER THICKNESS (10mm sensitivity measurement)

  6. A moderate bending (<10mm) has been measured on a wafer

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