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Small solenoids cause plasma scrape-off. F.F. Chen, X. Jiang, and J.D. Evans , Plasma injection with helicon sources , J. Vac. Sci. Technol. A 8 , 2108 ( 2000 ). Large coil allows all plasma to be injected.
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Small solenoids cause plasma scrape-off F.F. Chen, X. Jiang, and J.D. Evans, Plasma injection with helicon sources,J. Vac. Sci. Technol. A 8, 2108 (2000)
Large coil allows all plasma to be injected F.F. Chen, X. Jiang, and J.D. Evans, Plasma injection with helicon sources,J. Vac. Sci. Technol. A 8, 2108 (2000)
The low-field peak can be seen with a large coil Original low-field peak we were trying to reproduce F.F. Chen and G. Chevalier, Experiments on helicon plasma sources, J. Vac. Sci. Technol. A10, 1389 (1992) Result with single tube + large coil F.F. Chen, X. Jiang, and J.D. Evans, Plasma injection with helicon sources,J. Vac. Sci. Technol. A 8, 2108 (2000)
A multitube source with small solenoids gave low n F.F. Chen, J.D. Evans, and G.R. Tynan, Design and performance of distributed helicon sources,Plasma Sources Sci. Technol.10, 236 (2001)
Large coil + stubby sources work very well! F.F. Chen, J.D. Evans, and G.R. Tynan, Design and performance of distributed helicon sources,Plasma Sources Sci. Technol.10, 236 (2001)
Details of 7-tube distributed helicon source F.F. Chen, J.D. Evans, and G.R. Tynan, Design and performance of distributed helicon sources,Plasma Sources Sci. Technol.10, 236 (2001) m = 0 antenna
Azimuthal uniformity at various radii F.F. Chen, J.D. Evans, and G.R. Tynan, Design and performance of distributed helicon sources,Plasma Sources Sci. Technol.10, 236 (2001)
+/- 3% over 40 cm diameter F.F. Chen, J.D. Evans, and G.R. Tynan, Design and performance of distributed helicon sources,Plasma Sources Sci. Technol.10, 236 (2001)
> 1012 cm-3 at 20 G, 5 mTorr, 13.56 MHz F.F. Chen, J.D. Evans, and G.R. Tynan, Design and performance of distributed helicon sources,Plasma Sources Sci. Technol.10, 236 (2001)
Even smoother at 27 cm downstream F.F. Chen, J.D. Evans, and G.R. Tynan, Design and performance of distributed helicon sources,Plasma Sources Sci. Technol.10, 236 (2001)