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Presentation to ESTECH 2005 Tengfang (Tim) Xu, Ph.D., PE Lawrence Berkeley National Laboratory

Presentation to ESTECH 2005 Tengfang (Tim) Xu, Ph.D., PE Lawrence Berkeley National Laboratory. Investigating the Performance of a Minienvironment System Tengfang (Tim) Xu, Ph.D., PE Environmental Energy Technologies Division Lawrence Berkeley National Laboratory May 3, 2005.

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Presentation to ESTECH 2005 Tengfang (Tim) Xu, Ph.D., PE Lawrence Berkeley National Laboratory

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  1. Presentation to ESTECH 2005 Tengfang (Tim) Xu, Ph.D., PE Lawrence Berkeley National Laboratory

  2. Investigating the Performance of a Minienvironment System Tengfang (Tim) Xu, Ph.D., PE Environmental Energy Technologies Division Lawrence Berkeley National Laboratory May 3, 2005

  3. Investigating the Performance of a Minienvironment System • Introduction • Scope and Objectives • Case Study Methods • Results • Conclusions and Recommendations

  4. Introduction • Minienvironment • A minienvironment is a localized environment created by an enclosure to isolate a product or process from the surrounding environment • Separative Devices

  5. Why Minienvironment? • Minienvironment - Separative Devices • Gaining wide adoption in various industries • Knowledge about energy efficiency • Emerging technologies and strategies to improve efficiency

  6. Cleanroom Electric Power Cleanroom Measured Power

  7. Cleanroom Contamination Control

  8. Efficient Air Systems • Reduce initial costs • optimized sizing • Reduce utility costs while benefiting productivity • Other non-energy benefits • Energy efficient design can be considered as a strategy in the industry to achieve cost savings and improve bottom line

  9. ISO Standards from IEST The Institute of Environmental Sciences and Technology (IEST) • ISO 14644 (1 through 8): Cleanrooms and Controlled Environments • ISO 14698 (1 through 3): Bio-contamination

  10. Minienvironment within a Ballroom (Cleanroom)

  11. Background • Energy information on minienvironments is essentially non-existent • Understand energy efficiency opportunities in minienvironments • Key metrics: W/cfm

  12. Objectives • Develop an understanding of the key parameters contributing to energy performance of a minienvironment • Quantify energy performance of the minienvironment air system and identify opportunities for improving its energy performance.

  13. Approaches • Literature reviews • Develop a case study on minienvironment system performance • Collaborate with industry leaders and Sematech in research actions

  14. Case Study Method • Minienvironment • 4 FFUs of 1’x2’ • Dimensions (2’x4’x 7’7’’) • Electric Power • True RMS energy analyzer (±3%) • Airflow and Pressure • electronic micro-manometer (±3% of reading plus ±7 fpm) • Pitot tube (±2% of reading + 0.25Pa)

  15. Case Study Results Total fan power vs. Airflow rate

  16. Case Study Results Power factor vs. Airflow rate

  17. Case Study Results EPI vs. Airflow rate

  18. Case Study Results Static pressure vs. Airflow rate

  19. Case Study Results Pressure difference vs. airflow rate

  20. Conclusions • Measure up with Cleanrooms: EPI

  21. Recommendations - i • Improve energy performance of minienvironment systems • Fan-filter Unit • Airflow path

  22. FFU: Wide Range of Efficiencies

  23. FFU: Performance

  24. Recommendations – ii • Understand energy implications of minienvironment vs. cleanroom through demonstrations • Electric power usage • Size of minienvironment • Cleanliness requirements

  25. Recommendations - iii • Develop demonstration for approach and tools to tackle and implement energy efficiency throughout planning, construction, installation, design, commissioning, O&M, re-commissioning, reuse of minienvironment and integration with process and cleanroom facility

  26. Recommendations - iv • Develop and identify strategies in energy efficiency for effective environmental control

  27. Interaction with IEST • Interact with IEST to possibly adopt energy efficiency in recommended practice (RP) guidelines • IEST WGs

  28. Questions TTXU@LBL.GOV Lawrence Berkeley National Laboratory

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