1. 다이아몬드상 카본필름의 잔류응력과 기계적 물성 한국기계연구원 2001. 8. 7 한국과학기술연구원 이 광 렬

2. Outline • 다이아몬드상 카본필름의 소개 • 다이아몬드상 카본필름의 일반적 특성 • 장단점 및 응용 • 박막의 잔류응력 • 잔류응력의 종류 • 잔류응력의 측정 • 다이아몬드상 카본필름의 잔류응력 • 잔류응력의 발생거동 및 영향 • 제삼원소 첨가에 의한 잔류응력의 제어 • 잔류응력을 이용한 박막의 탄성계수평가

3. Carbon Atomic Bond Structure

4. What is DLC ? • Amorphous Solid Carbon Film • Mixture of sp1, sp2 and sp3 Hybridized Bonds • High Content of Hydrogen (20-60%) • Synonyms • Diamond-like Carbon • (Hydrogenated) amorphous carbon (a-C:H) • i-Carbon • Tetrahedral Amorphous Carbon

5. a-C:H ta-C

6. Properties of Solid Carbon

7. Historical Survey • 1972 • Aisenberg and Chabot : Arc Ion Beam • 1979 • Holland and Ohja : PACVD • 1984 • Mori and Namba : Ion Plating • 1986 • Savvides : Sputtering • 1992 • Collins et al : Laser Ablation • Filtered Vacuum Arc

8. 1000 Dense Hydro- Carbon Dense Carbon 100 Impact Energy (eV) Polymer Like Carbon 10 Amorphous Carbon (sp2) 1 Plasma Polymers Carbon Source Hydrocarbon Source Deposition Methods Ion Source Energy Cold Substrate

9. Energy Dependence of DLC

10. Ion Energy Distribution PACVD

11. Examples of Deposition Methods

12. Examples of Deposition Methods

13. 합성방법의 특징

14. Properties of Solid Carbon

15. Major Points of DLC Films • Low Deposition Temperature (R.T. – 200oC) • No limitation of Substrate Materials • Smooth Surface • Roughness : few nm • Wide Range of Physical Properties • Tunability of the Properties • Uniform Large Area Deposition • High Productivity and Low Cost

16. AFM Image of DLC coated Si

17. IR Transmittance of DLC Coated Ge Windows

18. Courtesy of J&L Tech. Ltd

19. Minor Points of DLC Films • Thermal Instability • Degradation at High Temperature (400 – 600oC) • High Residual Compressive Stress • Max. 10 GPa • Poor Adhesion • Stable Chemical Bonds • Especially on Ferrous Materials

20. Structure and Mechanical Properties • Hardness • 3-D interlink of the atomic bond network • Residual Stress • Distortion of bond angle and length • Both are dependent on the degree of 3-D interlinks. 2-D Analogy of the Structure

21. Self Delamination Failure during Tribotest

22. DLC 필름의 특성과 응용 구 분 특 성 응 용 2,000 - 8,000Hv (cf. Diamond 10,000Hv) 비철금속 가공용 공구, 정밀금형의 표면경화코팅 High hardness 치구, GEAR, SURGICAL BLADE, HARD DISK등의 고체 윤활 코팅 마찰계수 0.05 - 0.2 (cf. Stainless Steel : 0.6 - 0.7) Low friction and high wear resist. 산 또는 알카리와 반응치 않는다 Chemical Inertness 부식 방지막, 인체삽입물의 BIO-COMPATIBLE COATING 특히 적외선 영역의 높은 광투과도 Optical Transmittance IR WINDOW, SCANNER WINDOW의 표면보호 코팅

23. 경질박막의 내마모 윤활특성 마모도 마찰계수. DLC WC TiN CrN TiCN 2.0 1.6 1.2 0.8 0.4 (상대비교치) 0.2 0.4 0.6 0.8 1.0

25. DLC 필름의 특성과 응용 구 분 특 성 응 용 2,000 - 8,000Hv (cf. Diamond 10,000Hv) 비철금속 가공용 공구, 정밀금형의 표면경화코팅 High hardness 치구, GEAR, SURGICAL BLADE, HARD DISK등의 고체 윤활 코팅 마찰계수 0.05 - 0.2 (cf. Stainless Steel : 0.6 - 0.7) Low friction and high wear resist. 산 또는 알카리와 반응치 않는다 Chemical Inertness 부식 방지막, 인체삽입물의 BIO-COMPATIBLE COATING 특히 적외선 영역의 높은 광투과도 Optical Transmittance IR WINDOW, SCANNER WINDOW의 표면보호 코팅

26. Applications of DLC Film

27. Video Cassette Recorder

28. DLC코팅 VTR헤드드럼 Courtesy of Daewoo Electronics Co.

29. DLC Coated Digital VCR Tape

30. HDD용 Hard Disk

31. DLC coated Head Slider

32. DLC Coated Razor Blade

33. Schematic of Diesel Engine

34. Results of Wear Test under Dry Lubrication Conditions

35. Result of Dynamo Test (900h) Hard Cr Coated Ring DLC coated Ring Before Test Before Test After Test After test

36. Hard Cr Coated Piston Ring DLC/Cr Coated Piston Ring 6.5mm 100mm Before Test Before Test 5.3mm After Test After Test

37. Sliding Tools for Electron Gun • Grids (2) manipulate the electron beam. • Sliding Tools is used to make spacing between the grids (Tolerance is about 4mm) • Smooth grid surface and parallel positioning are important.

38. DLC Coated Sliding Tools • Low friction • Long life time • Electrical insulation • No corrosion on the shelves Courtesy of J&L Tech. Co., Ltd.

39. IC Packaging • 반도체 packaging용 EMC mold cavity의 이형성 증진 및 수명연장을 위한 코팅

40. DLC Coating on Packaging Tools Courtesy of J&L Tech. Co., Ltd.

41. 인공 고관절 및 무릎관절 무릎관절 고관절

42. Biological Application of DLC DLC Coating for Wear Resistance

43. 인공 심장, 수정체 인공심장 판막 인공수정체

44. DLC Coated Stents

45. Schematic of Wear Tester Load  Load : High &Low  Surroundings : Wet Condition Dry Condition Test disk Ruby Ball Saline

46. Wear Volume Wear Volume DLC on Ti DLC on Ti-Alloy 0.026 mm3 0.021mm3 Condition : High Load 3000 cycle 0.002mm3 0.002 mm3 Dry Wet Dry Wet

47. Life Time of DLC Coatings Fracture Cycle DLC on Ti 92250 cyc DLC on Ti-Alloy Condition : High Load 10250 cyc 6750 cyc 3172 cyc Dry Wet Dry Wet

48. IR Windows for Missile and Night Vision System

49. IR Transmittance of DLC Coated Ge Windows

50. Sand Blast Type Erosion Rig J. E. Field, Carvendish Lab. Cambridge University