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黃光微影室
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國立嘉義大學 應用物理學系、光電暨固態電子研究所. 黃光微影室. 可進行微米加工 ， 製作微米級半導體 / 金屬結構. 電子束微影機 (NPGS) 實體照片. 電子束微影機 (NPGS) 規格資料. Hitachi S-3000H : magnifications to 300,000x, 3.5 nm image resolution, with Nanometer Pattern Generation System (NPGS).
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國立嘉義大學 應用物理學系、光電暨固態電子研究所 黃光微影室 • 可進行微米加工，製作微米級半導體/金屬結構
電子束微影機(NPGS)規格資料 Hitachi S-3000H : magnifications to 300,000x, 3.5 nm image resolution, with Nanometer Pattern Generation System (NPGS). http://www.hitachi-hitec.com/em/sem/s3000nh.htmlhttp://www.hitachi-hitec.com/global/em/sem/sem_index.htmlNPGS: http://www.jcnabity.com/
電子束微影機(NPGS) • 可進行奈米微細加工，製作奈米級半導體/金屬結構
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