National Nanotechnology Initiative Interagency Grand Challenge Workshop:

1. National Nanotechnology Initiative Interagency Grand Challenge Workshop: Instrumentation and Metrology for Nanotechnology

2. Summary Day One:Tuesday, January 27, 2004 • Keynote Session • Plenary Session • Short Reports from other NNI Grand Challenge Workshops on Metrology and Instrumentation Issues • Introduction to Breakouts • Lunch (working) • Breakout Sessions Tracks 1 - 5: Current State of the Art • Track 1 - Instrumentation and Metrology for Nanocharacterization • Track 2 - Instrumentation and Metrology for Nanomechanics • Track 3 - Instrumentation and Metrology for Nanoelectronics, Photonics, and Magnetics • Track 4 - Instrumentation and Metrology for Nanofabrication • Track 5 - Instrumentation and Metrology for Nanomanufacturing • Track 6 - Crosscut - Computational Science Issues • Networking Reception – (postponed because of ice storm)

3. Summary Day Two:Wednesday, January 28, 2004 • Plenary Session • Breakout Sessions: Future Needs, Barriers and Grand Challenges • Working Lunch • Challenges Breakouts • Networking Reception - Advanced Measurement Laboratory Foyer • Ahmad Soueid, HDR – Details of the NIST Advanced Measurement Laboratory Summary Day Three:Thursday, January 29, 2004 • Review of Breakouts • Discussion, Holes, Questions and Summary Charge • Tracks 1-5 Report Preparation • Track 6 Breakout Session • Crosscut – Computational Science Issues • Lunch (working) All tracks • Complete Report Preparation

4. Clare Allocca (NIST) James Arnold (NASA) Avram Bar-Cohen (U MD.) Kristin Bennett (DOE) Marylyn Bennett (Texas Instruments) Ronald Boisvert (NIST) Altaf H. (Tof) Carim, (DOE) Richard Cavanagh (NIST) Hongda Chen (USDA) Julie Chen (NSF) Charles Clark (NIST) Stephanie Hooker (NIST) Stephen Hsu (NIST) Bryan Huey (NIST) Alan Karr (National Institute of Statistical Sciences) Robert Keller (NIST) John Kramar (NIST) Jorn Larsen-Basse (NSF) T. J. Mountziaris (NSF) Jon Pratt (NIST) Nora Savage (EPA) Nell Sedransk (NIST) Kevin Lyons (NIST) Mark Lundstrom (Purdue) David Seiler (NIST) Richard Silver (NIST) Robert Shull (NIST) Douglas Smith (NIST) Dennis Swyt (NIST) Guebre Tessema (NSF) Peter Votruba-Drzal (NIST) James Whetstone (NIST) David Wollman (NIST) Xiang Zhang (UCLA) John Sargent (DOC/TA) Mark Bello (NIST) Kathy Kilmer (NIST) Sarah Bell (NIST) Angela Ellis (NIST) Thelma Allen (NIST) Todd Snouffer (NIST) Geoff Holdridge Steven Gould Sam Gill Jason Barnard Acknowledgements

5. Day One: Tuesday, January 27, 2004 Keynote Session 10:00 Dr. Arden Bement, Jr. Director of the National Institute of Standards and Technology – Welcome 10:15 Hon. Phillip J. Bond, Under Secretary of Commerce for Technology 10:45 Dr. Clayton Teague, Director, National Nanotechnology Coordination Office Plenary Session 11:00 Dr Juri Matisoo – Semiconductor Industry Association - "Grand Challenges as viewed by the Semiconductor Industry" 11:30 Dr. Duncan Stewart – Hewlett Packard - "Metrology for Nanoelectronics and Molecular Electronics" 12:00 Break 12:15 Dr. Thomas A. Cellucci - ZYVEX - "Nanotechnology Tools:  Solving Real-World Needs" 12:45 Dr. Joergen Garnaes - Danish Institute of Fundamental Metrology - "Needs for nanometrology from the European stand point" Reports from other NNI Grand Challenge Workshops on Metrology and Instrumentation Issues 1:15 Dr. Barbara Karn, Environmental Protection Agency – Environmental 1:25 Dr. Cliff Lau, Department of Defense – Chemical, Biological, Radiological, and Explosive 1:35 Dr. Barbara Baird, Cornell University – NanoBiotechnology 1:45 Dr. Robert Hull, University of Virginia – NanoMaterials Introduction to Breakouts 1:55 Breakout session instructions – Joan Pellegrino, Energetics, Inc. Breakout Sessions Tracks 1 - 5: Current State of the Art 2:00 Working Lunch Plenary Talks Organized Brainstorming on State of the Art (Breakouts A1-A5) Stretch Break Continue Brainstorming 4:00 Assignments for Day 2 (Session cut short due to ice storm) 6:00-7:00 Reception (Postponed due to ice storm)

6. Day Two: Wednesday, January 28, 2004 8:25 Dr. Michael T. Postek – Call to Order Plenary Session 8:30 Dr. William Phillips, National Institute of Standards and Technology “Quantum Computing with Atoms in Optical Nanostructures" 9:00 Dr. Lucas Novotony, University of Rochester “Instrumentation for Nanoscale Characterization” 9:30 Dr. Eric Steel, National Institute of Standards and Technology – “Nanoscale Chemical Characterization:  Moving to 3D” 10:00 Break Breakout Sessions: Future Needs, Barriers and Grand Challenges 10:30 Plenary talks (Future Needs) Organized Brainstorming and Prioritization of Future Needs (Breakouts B1-B5) Working Lunch Gap Analysis/Challenges (Breakouts C1-C5) Organized Brainstorming on Technical Barriers Identification of Instrumentation and Metrology Grand Challenges to Overcome Barriers 3:00 Stretch Break 3:15 Completion of Matrices for Grand Challenges 4:45 Preparation for Summary Presentations 5:00 Instructions and Assignments for Day 3 5:30- 7:00 Reception (NIST Lunch Club and Employee Lounge) Arden Bement – Welcoming comments to the AML Ahmad Soueid, HDR – Details of the NIST Advanced Measurement Laboratory

7. Day Three: Thursday, January 29, 2003 8:25 Dr. Michael T. Postek – Call to order 8:30 Review of Combined Breakouts Track 1 Richard Cavanagh 8:45 Review of Combined Breakouts Track 2 Clare Allocca 9:00 Review of Combined Breakouts Track 3 - Robert Shull 9:15 Review of Combined Breakouts Track 4 – Charles Clark 9:30 Review of Combined Breakouts Track 5 James Whetstone 9:45 Review of Track 6 - Ron Boisvert 10:00 Andy Henson NPL 10:15 Discussion, Holes, Questions and Summary Charge 10:30 Break 11:00 Report Preparation (detailed outline) Tracks 1-5 11:00 Track 6 (parallel) Breakout Session: Crosscut – Computational Science Issues Plenary Talks Brainstorm Barriers and Needs 1:00 Lunch (working) All tracks 1:00 Track 6 Develop Recommendations 2:00 Complete Report Preparation Tracks 1-5 2:00 Complete Recommendations Track 6 2:15 Discuss Next Steps 2:20 Adjourn