1 / 14

ZMT

ZMT. Zero Metrology Time. Problem Domain. Intel manufacture process includes many steps in the way from raw material to a complete product. The key material in the fabrication of semiconductors is wafers which are grouped in lots. Problem Domain.

darius
Télécharger la présentation

ZMT

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. ZMT Zero Metrology Time

  2. Problem Domain • Intel manufacture process includes many steps in the way from raw material to a complete product. • The key material in the fabrication of semiconductors is wafers which are grouped in lots.

  3. Problem Domain • Every lot is processed by many production and testing machines, in more than 400 steps. • The lots path through the machines is determined by a scheduling algorithm. • In order to simulate the fabrication factory production we use the AutoSched system.

  4. Current Situation • Intel’s current scheduling algorithm is the MPLM which plans ahead a shift of twelve hours. • Forced changes and problems in real time causes by the workers that change the lots path manually, using their own reasoning.

  5. Current Situation • A planed shift consequence is that only 70% of the scheduling process is determined by the algorithm. • Today a lot is ready in more than two months, though can be ready within two weeks.

  6. Current Situation • When a user wants to run a simulation, he has to give the AutoSched a huge excel file. • The output of the simulation’s run is also an excel file. The user has to copy and paste the data into MATLAB in order to analyze it.

  7. Proposed Solution • To reduce the cycle time of the lot in the Fab we want to reduce the time a lot spends in waiting for metrology machines. • An important issue is to maintain the overall yield of the Fab though the algorithm changes. • To examine the different aspects we will develop algorithm component that will interface with the AutoSched.

  8. Proposed Solution • We will write GUI application which will make running the simulations much easier for the user. • The application will enable experiments management for multi users, and intuitive data analysis.

  9. Simulation System AutoSched Configuration file (STD-S1) Algorithms implementation System architecture and Technologies

  10. Main Functional Requirements • Algorithm implementation: • Implement a scheduling algorithm that sends lots to metrology based on real-time events. • Same, but with taking yield into consideration. • Simulation running environment: • User can enter the variables for the algorithms we have implemented through an application. • Saving and loading simulation variables and results. • Analyzing simulation results – making graphs, tables, etc… • Running the simulations from our application instead of AutoSched.

  11. Non-Functional Requirements • Algorithms implementation: • Speed: should give an answer for each lot within less than a second. • Portability: if anyone would like, he can write extensions to our algorithms using an API we will provide. • Simulation running environment: • Speed: saving & loading simulations shouldn’t take more than 3 seconds. • Usability #1: it should be easier now to run simulations. • Usability #2: the user will not need to do any analysis by himself or with a 3rd party program.

  12. Major Use-Cases UC1: Request for a new AP from the simulation. When an AutoSched simulation runs, an event happens, that is part of the event that needs a new AP solution. The simulation sends information about its current state to the system and after doing its calculation it returns the result (the new AP solution) to the AutoSched simulation.

  13. Major Use-Cases UC2: Researcher runs experiments. When the researcher wants to examine new inspection policies he enters new configuration with the right parameter throw the GUI application and run the experiment. After the system run he can analyze the experiment results.

  14. Risks • The algorithm wouldn’t give better cycle time results than the current position. • The yield would be harmed as a result of the changes.

More Related