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Investigation of ZnSnOx Thin Films through Experimentation and Future Work Iterations

This study documents experiments conducted in 2011 using ZnSnOx (ZTO) films synthesized via different methods, including Sn precursor and Tin(IV) chloride at 300ºC. The results show low mobility (~0.003) in initial samples and poor bias stress stability. Further research considerations include mobility enhancement to 0.026 cm2/vs, solution optimization, the role of acetic acid catalyst, and bias stress hysteresis analysis.

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Investigation of ZnSnOx Thin Films through Experimentation and Future Work Iterations

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  1. Experiment ZnSnOx (ZTO) SnPrecursor-SnCl4 300ºC Tin isopropoxide 2011.2.25 300ºC Tin(IV) chloride 2011.3.1

  2. Experiment Low mobility yet ~0.003 Sample 1 Sample 2

  3. Experiment Poor bias stress stability Sample 3, 1st measure Sample 3, 2nd measure

  4. Experiment No UV irradiation effect Sample 3 (UV treated)

  5. Future work • Mobility 0.026cm2/vs • Solution optimization • Acetic acid catalyst • Bias stress hysteresis – origin analysis

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