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Equipment Automation 半導體設備及 LCD 機台自動化 PowerPoint Presentation
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Equipment Automation 半導體設備及 LCD 機台自動化

Equipment Automation 半導體設備及 LCD 機台自動化

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Equipment Automation 半導體設備及 LCD 機台自動化

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  1. Equipment Automation 半導體設備及LCD機台自動化 陳建志

  2. Agenda ●晶圓製造流程 ●電腦整合製造 Computer Integrated Manufacturing (CIM) ●半導體機台通訊協定 (SECS) ●機台自動化 (Equipment Automation)

  3. 晶圓製程流程

  4. Resist Coat Resist Coat Resist Coat Resist Coat Thin/Film Exposure Exposure Exposure Exposure Develop Develop Develop Develop PI Coat Rubbing Spacing LC Cell Final Assemble Scribe Injection Grinding Inspection Sealing TAP Final Aging Inspection TFT-LCD製程流程 前段的 Array 製程與半導體製程相似,但不同的是將薄膜電晶體製作於玻璃上,而非矽晶圓上 Array Glass 以前段Array的玻璃為基板,與彩色濾光片的玻璃基板結合,並在兩片玻璃基板間灌入液晶 Cell Module Color Filter 後段模組組裝製程是將Cell製程後的玻璃與其他如背光板、電路、外框等多種零組件組裝的生產作業

  5. IC相關產業 台灣應材 ASML TEL/漢民 帆宣系統 蔚華 均豪 東捷 Qualcomm Nvidia 聯發科 奇景光電 珠海炬力 中星微電子 設備 投資 順德 百容 化學原料 導線架 IC 設計 光罩 製造 封裝 日月光 矽品 飛信 超豐 南茂 材料 晶圓 測試 台積電 聯電 力晶 茂德 華亞/南亞 中芯 宏力 和艦 台灣光罩 中華凸版 SHE信越 SUMCO 台塑勝高 崇越

  6. 薄膜區 (Thin-Film) –氧化沉積製程 化學氣相沉積 擴散區 (Diff) - 擴散, 離子植入製程 離子植入機 爐管 黃光區 (Litho) -微影製程 微影機 蝕刻區 (Etch) 量測機台 機台設備

  7. 廠房 Layout 製程設備 Bay (tunnel) P P A P P P P S 倉儲系統 (stocker) 晶盒 (Cassette, Carrier) M M M 量測設備 S S S 環行載具 P P (loop vehicle) P P A P P P 搬運車 P P A P

  8. 生產製造

  9. 製造部門 (MFG) 晶圓製造, 生產 製程部門 (PE) 製程設定, 產品規劃 先進製程控制 (Advanced Process Control) 設備部門 (EE) 設備維護, 保養 資訊部門 (IT, MITD) 電腦整合製造(Computer Integration Manufacture) 製造執行系統(Manufacture Execution System) 機台自動化 (Equipment Automation) 搬運自動化 (Auto. Material Handling System) 工程部門 (IE) 資料 Modeling 晶圓製造組織 V.S. 管理資訊部門(MIS)

  10. 製造執行系統-(Manufacture Execution System, MES) 生產管理, 製程管理, 機台設備管理 Work In Process (WIP) 追蹤 資料收集 設備自動化控制系統 (Equipment Automation) 機台自動化 自動搬送系統 (AMHS) 搬運自動化 設備工程系統-(Equipment Engineering System, EES) 製程與設備之操作效能 設備異常控管 電腦整合製造系統 (CIM)

  11. 生產流程(Scenario) Process Data Mgmt Server (MES) Shop Floor Control 3 6 9 (MES) Transport Request 2 Dispatch List Request Material Control System AMHS Equipment Stocker Lot Location Update 4 9 5 7 1 Ready to Process 8 Process Tools Dispatch List Lot Location Update Processing Results Equipment and lot status info Initiate Process Process Results

  12. Reservation (Operator, MES) Dispatching (MES, AMHS) Carrier Placement (AMHS delivers or Operator Manually deliver) (Operator, AMHS, Stocker, EQP) Carrier ID Verification (Operator, EQP) Slot map Verification (Operator, EQP) Job Creation (Operator, EQP) Track In (Operator, MES) Job Processing (Operator, EQP) Substrate state transition and location state transition as substrate are processed (Operator, EQP) Data Collection (Operator, EQP, MES) Track Out (Operator, MES) Carrier Removal (Operator, AMHS, Stocker, EQP, MES) 標準作業流程

  13. 製造執行系統-(Manufacture Execution System, MES) 生產管理 即時且正確反映製造現場活動的狀態 訂單->工單 投料生產 生產追蹤批號 製程管理 處方設定 參數紀錄 機台設備管理 機台狀況 定期保養 Work In Process (WIP) 追蹤 資料收集 機台稼動率、產品良率 製造執行系統- MES(Manufacture Execution System)

  14. Workstream (Unix) Brooks PROMIS (Unix) IBM SiView (Unix) Brooks FactoryWorks (Unix) Applied FAB300 (Windows) In-House MES 製造執行系統- MES(Manufacture Execution System)

  15. CIM Solution Architecture ERP/MIS • Manufacturing -- What to make and When • Financial -- Cost Impact of manufacturing • Company Wide Scope • MIS -- Customizing Report System ERP Implement ERP/MIS Scheduling Scheduling System • Supply Chain Management (Order Entry) • Planning & Schedule (Production Plan) • Plan Execution (Reactive Dynamic Schedule) • Company Wide Schedule System with MES Scheduling/ MES System MES System • Management of WIP, Equipment, People • Local Scheduling, Quality/Spec. Control • Record of Manufacture/Reporting • Ensure ERP Assumptions are carried out to the • maximum extent possible Factory Wide Scope MES System Test System Test System • Data Automation -- Test Data Collection • Wafer Map file management (No-Inking) • Test Probe Card Management Cell Controller (EAP) SECS HSMS SECS TCP/IP SECS AGV Automation Project Cell Controller Stocker • AGV, Equipment System Integration • Inter-Bay System Interface • Cell (Bay) Control • Establish SEMI or Full-Automation for Inline Tester Equipment Interbay System

  16. 降低人員誤動作的風險 (MO: Miss – Operation) 流程控制 (Flow Control) 晶圓放置 (Carrier Handling) 選擇配方 (Recipe Selection) 程式執行 (Job Creation) 資料收集 (Data Collection) 降低污染 (Particle) 晶圓, 玻璃尺寸越來越大 節省人力 生產自動化、無人化 為何要自動化 半導體廠的目標是生產而非自動化,但自動化卻可以使產品更有競爭力(產能&良率)。

  17. 機台自動化- EAP(Equipment Automation Program) Manufacturing Execution System (MES)/ Factory Shop Floor Control (SFC) Database TCP/IP on Ethernet Factory “EAP” GEM/SECS Controllers SECS I/F Protocol HSMS, SECS-1) “Equipment” GEM/SECS Controllers Manufacturing Equipment

  18. SEMI Equipment Communication Std : SECS

  19. Relationship Application E87, E40 E94, E90 GEM ( SEMI E30 ) Equipment Behavior SECS-II ( SEMI E5 ) Message Protocol SECS-I ( SEMI E4 ) HSMS-SS ( SEMI E37.1 ) Data Transfer Protocol RS-232C 4-Wire Serial Cable TCP/IP Ethernet Physical Link

  20. Compared with Open Systems Interconnect (OSI) “Stack” (SECS-1 Case) SEMI Protocols OSI Host or Equipment Apps, GEM and 300mm Scenarios Application Presentation SECS-II Session Transport SECS-I Network Data Link Physical RS-232

  21. Compared with Open Systems Interconnect (OSI) “Stack” (HSMS Case) OSI SEMI Protocols Host or Equipment Apps, GEM and 300mm Scenarios Application Presentation SECS-II HSMS Session Transport TCP/IP Network Data Link Ethernet Physical

  22. Found in the SEMI Equipment Automation Software Standard (Vol. 1 & 2) See www.semi.org for downloadable pdf standards (fee rqd.) SECS-I - Message Transport on RS-232 (SEMI E04) SECS-II - Message Content (E05-0299 ) GEM - Generic Equipment Model (E30-0298) HSMS - High-Speed Message Services (E37-0298) SECS-1 replacement on TCP/IP E37 HSMS Generic Services E37.1: HSMS-SS, Single Session E37.2: HSMS-GS, General Session Cluster Tool specific (allows for multi-session) SEMI Standards Documents

  23. Relationship CIM systems Host Application E87, E40 E94, E90 GEM ( SEMI E30 ) Equipment Behavior SECS-II ( SEMI E5 ) Message Protocol SECS-I ( SEMI E4 ) HSMS-SS ( SEMI E37.1 ) Data Transfer Protocol RS-232C 4-Wire Serial Cable TCP/IP Ethernet Physical Link

  24. Request to send ENQ 05 Ready to receive EOT 04 Send message Message Correct reception ACK 06 SECS-ITransfer Protocol (Normal) SENDER RECEIVER

  25. ENQ 05 EOT 04 Message(Req.) ACK 06 Reply ENQ 05 EOT 04 Message(Reply) ACK 06 SECS-IPrimary/Secondary Message Request HOST Equipment Primary Message Secondary Message

  26. HOST Equipment ENQ 05 T2 EOT 04 Primary Message T2 Message(Req.) T2 ACK 06 T3 ENQ 05 EOT 04 Secondary Message Message(Reply) ACK 06 SECS-ITimeouts (T1,T2,T3,T4)

  27. SECS-1 Message Format ByteType Length Byte Header Bytes Data Bytes Checksum Bytes 1 10 0-244 2 Number of Bytes Device Id identifies the equipment uniquely for the entire factory Block Length Byte refers to Header + Data Checksum Bytes refer to Header + Data R Bit (Reverse Bit) indicates Direction of Message Eqp to Host (1) orHost to Eqp (0) SECS-1 Header Format Block Number identifies which block in a multi-block message Bit within Byte W Bit (Wait Bit) indicates whether sender expects a reply (1=yes) Byte Number System Bytes (7-10) identify the source and transaction index of each primary message (Appendix A5 of E4) E Bit (End Bit) indicates whether this is the last block (1=yes) in a multi-block message

  28. CONNECT DATA ACTIVE PASSIVE HSMS SECS-II Data Message (Primary) Send Connect TCP/IP Connect Recv Accept TCP/IP Accept T3 T7 Send HSMS SECS-II Data Message (Reply) Select.req Send Recv T6 Send Recv Select.rsp Recv DISCONECT LINKTEST Send Send Linktest.req Separate.req Recv Recv T6 Send Linktest.rsp Close Close Recv HSMS-SSTransfer Procedures

  29. SECS-2 Introduction • SECS II Data Structure • Data Item Formats • Stream/Functions • SECS-2 Message Conversations

  30. Length NLB=1~3 bytes Data Data Item Data Item Type NLB SECS-II Contents of TEXT Format (Type) : (000000) List (01,02,03) (001000) Binary (21,22,23) (001001) Boolean (25,26,27) (010000) ASCII (41,42,43) (010001) JIS-8 (45,46,47) (011000) 8-byte Int(s) (61,62,63) (011001) 1-byte Int.(s) (65,66,67) (011010) 2-byte Int.(s) (69,6A,6B) (011100) 4-byte Int.(s) (71,72,73) (100000) 8-byte Float (81,82,83) (100100) 4-byte Float (91,92,93) (101000) 8-byte Int.(u) (A1,A2,A3) (101001) 1-byte Int.(u) (A5,A6,A7) (101010) 2-byte Int.(u) (A9,AA,AB) (101100) 4-byte Int.(u) (B1,B2,B3) TEXT (Contents of TEXT) Format NLB: No. of Length Block: 1 (max:255Bytes):01 2 (max:64K) :10 3 (max:7.9M) :11

  31. SECS-2 Streams • Stream 0 (Function 0) - Close Transaction • Stream 1 - Equipment Status • Stream 2 - Equipment Control and Diagnostics • Stream 3 - Material Status • Stream 4 - Material Control • Stream 5 - Exception Handling • Stream 6 - Data Collection • Stream 7 - Process Program Management • Stream 8 - Control Program Transfer • Stream 9 - System Errors • Stream 10 - Terminal Services • Stream 11 - Host File Services (deleted) • Stream 12 - Wafer Mapping • Stream 13 - Data Set Transfers • Stream 14 - Object Services • Stream 15 - Recipe Services • Stream 16 - Processing Management • Stream 17 - Equipment Control and Diagnostics Streams 1-63, F 64-255 Streams 64-127, F1-255 • Reserved for the SEMI UsageUser Definable • Streams 0 all Functions • Streams 1-63, Functions 0-63 • Streams 64-127, Function 0

  32. SECS-2 ExampleActual Message Content /* 5/6/2000 1:45:13 PM Sent */ CR: 'S1F13' W /* Name=CommRequest */ <L [2] /* Name=Params */ <A [5] ’Quartet' > /* Name=MDLN Keyword=modelType */ <A [9] 'Version 1' > /* Name=SOFTREV */ > . /* 5/6/2000 1:45:14 PM Rcvd */ CRA_H: 'S1F14' /* Name=CommRequestAck_Host */ <L [2] <B 00 > /* Name=COMMACK Keyword=AckCode */ <L [0] > > . /* 5/6/2000 1:45:14 PM ** Communications Established */ /* 5/6/2000 1:45:14 PM Sent */ AYT: 'S1F1' W /* Name=AreYouThere */ . /* 5/6/2000 1:45:15 PM Rcvd */ OLD_H: 'S1F2' /* Name=OnlineData_Host */ <L [0] > .

  33. Relationship Application GEM ( SEMI E30 ) Equipment Behavior SECS-II ( SEMI E5 ) Message Protocol SECS-I ( SEMI E4 ) HSMS-SS ( SEMI E37.1 ) Data Transfer Protocol RS-232C 4-Wire Serial Cable TCP/IP Ethernet Physical Link

  34. GEM - Generic Equipment ModelGEM Capabilities • 100% support defines “Fully GEM Capable” • Includes the following capabilities: • Establish Communications • Dynamic Event Reports • Variable Data Collection • Trace Data Collection • Status Data Collection • Alarm Management • Remote Control • Equipment Constants • Process Program Management • Material Movement • Equipment Terminal Services • Clock • Limits Monitoring • Spooling • Control (Host Initiated)

  35. SxFy S9F5 S9F1 S9F7 S9F3 Unrecognized FunctionType Illegal Data Unrecognized Device ID Unrecognized Stream Type GEMError Messages HOST Equipment Error ? OR OR OR OR ...

  36. S1F1 S6F11 S1F2 S6F12 GEMControl ( Operator-Initiated ) HOST Equipment Request On-Line Grant On-Line Control State Change Acknowledge

  37. S1F14 S1F13 S1F13 S1F14 GEMEstablish Communications HOST Equipment Connect Request Connect Acknowledge Connect Request Connect Acknowledge

  38. S7F3 S7F1 S7F6 PP Request S7F2 S7F5 S7F4 PP Data PP Load Grant PP Load Inquire PP Send PP Acknowledge GEMExamples (cont.)  Process Program Download HOST Equipment OR

  39. S7F4 S7F2 S7F5 PP Data S7F1 S7F6 S7F3 PP Request PP Load Inquire PP Send PP Load Grant PP Acknowledge GEMExamples (cont.)  Process Program Upload HOST Equipment OR

  40. Factory Automation Factory Automation Internal Components SECS-II configuration Custom Objects & Functions User Interface Customer Host Scenario ScenarioLib Host GEM OCX sdiStation EVENT BUS Event Bus Cell Administrator GEM ActiveX/COM Objects sdiSMS SECS-II ActiveX/COM Objects sdiSMS SECS-I/HSMS Daemon Other Fab Systems (MES, SPC, Maintenance..) To solutions To Process Equipment

  41. Equipment Communication Software Picture in Year 2000 Equipment Supplier Control Application w/ 300mm and GEM/SECS I/F E30 Generic Equipment Model (GEM) E5 (SECS-II), E37 (HSMS), and E4 (SECS-1) SECS Specific Transport Layer Host

  42. Equipment Communication Software Picture in Year 2001-2004 Equipment Supplier Control Application w/ 300mm and GEM/SECS I/F 300mmModules E87, E90, E40, E94 E39 Object Service Standard (OSS) E30 Generic Equipment Model (GEM) E5 (SECS-II), E37 (HSMS), and E4 (SECS-1) SECS Specific Transport Layer Host

  43. 300mm Standards • E40 – Process Job Management • Recipe ID and Recipe Parameters • E84 – AMHS Parallel I/O Handoff • Hardware PIO signal handshake for carrier handoff • E87 – Carrier Management (Provisional) • Carrier control scenario for Fixed/Internal Buffer equipment • ProceedWithCarrier, CarrierIn, CarrierOut, and etc. • E90 – Substrate Tracking • Wafer Level Tracking • E94 – Control Job Management (Provisional) • Multiple lots/Recipes in one carrier and more … • E99 – Carrier ID Read/Write • SECS message definitions for Carrier ID Read/Write • EPM and e-Diagnostics • GEM300 – SECS/GEM for 300-mm

  44. 製造執行系統-(Manufacture Execution System, MES) 生產管理, 製程管理, 機台設備管理 Work In Process (WIP) 追蹤 資料收集 設備自動化控制系統 (Equipment Automation) 機台自動化 (SECS/GEM/300mm stds) 自動搬送系統 (AMHS) 搬運自動化 (SECS/GEM) 設備工程系統-(Equipment Engineering System, EES) 製程與設備之操作效能 設備異常控管 New standards for EES !!! 電腦整合製造系統 (CIM)

  45. Alarm Server (Email & Pager) RMS (Recipe Management System) FDC (Fault Detection) APC (Advanced Process Control) PMS (Preventive Maintenance) 設備工程系統- EES (Equipment Engineering System)

  46. Components in A Complete CIM Automation • Real-Time Dispatcher • Rule-Based Batching • Lot Dispatching Based on Factory-wide Scheduler • Real-time Dispatching Based on Configurable Business Rule • Q-timer Exceed Checking • Hot Lot • Lot State Transition Modeling • Reticle Scheduling Equipment Group Priority Selection • Reticle Management Server • Reticle Location Tracking • Reticle Usage Tracking • Reticle Stocker Control • Reticle Life-cycle Tracking • MES Function • Work In Process • Process Flow Creation • Resource Tracking • Material Control Server • Inter-Bay Stocker Interface • Intra-Bay AGV Controller Interface • Alternate Stocker Selection • Optimized Batch Move • EDC/SQC • Raw Data Storage • In/Out of Spec Check with Action Triggering • Process Data Inquiry • Feedforward & Feedbackward Data Calculation • Western Electric Rules • Customer Specific Rules • Real-time SPC Chart • Recipe Server • Physical Recipe Mapping • Recipe Scheduling • Recipe Grouping Control Message Bus • Equipment Manager • SECS/GEM Equipment Interface • On-Line Local Mode Support • Trace Data for Real-time SPC • Equipment State Transition Handling • Alarm Action Sequence Triggering • Special Event/Action Handling • Process Data Spooling • Normalize All Equipment Behavior • In-Line Control • Reticle Inventory Download • Host Command Support • Special Equipment Message Scenario Handling • 3rd Parties I/F Server • SPEC Interface • Ordering/Inventory Interface • ERP/Financing Interface • EDA Interface • Fab-wide Scheduler/Planner Interface • OA Interface • Preventive Maintenance • Equipment Usage Tracking • Dummy/Monitor Wafer Usage Tracking • PM Schedule Forecasting • PM Expiration Notification • Special Post-PM Material Notification • Critical PM Triggering • Alarm Server • User Message Broadcasting (Kan-Ban System) • E-mail, Pager, Voice Notification, Terminal Broadcasting • Occurances Statistics • Repeated Pending Alarm Notification • Alarm Status Tracking (Closed, Acknowledged, etc.)

  47. Automation Solution-Cell Controller Equipment PM User Interface Reticle Management Cell Controller Alarm Management Local Scheduling Recipe Management Automatic Data Collection Real Time SPC • Microsoft Development Tools • ASP網頁開發 • C Programming • Client-Server programming • 資料庫應用 • 系統分析 • 軟體工程

  48. e-Diagnostics

  49. Equipment Spec. Definition and Negotiation with EQP vendor 200mm/300mm SEMI Standards EQP Functional Requirements EAP Scenarios Coordination with FAB Users Users Requirements Interface with MES or CIM systems Vendor Site Test Vendor Site Test Plan Perform Vendor Site Test EA Responsibility Boundary

  50. Equipment SECS Readiness SECS Spec. Compliance Check (Compliance List) Automation Requirement Check (User Requirement Document) SECS cabling, HSMS configuration procedures SECS Readiness Test (SECS Test Plan, Test Log and Test Report) E84/E87 Access Auto Test (Full Auto Test Plan, Gate Controller Log and Test Report) Scenarios Test (Normal scenario and abnormal scenarios) CCS Test EAP Development SECS Message Definition File (SMD) Configuration File (SECS Driver config. File, EAP config. File, EM/TCS config. File) EAP coding (Scenarios) Design Document Test Unit Test (Test Plans, Test Scenario, Test Log and Test Report) LAB Test (Test Plans, Test Scenario, Test Log and Test Report) FAB/Integration Test (Test Plans, Test Scenario, Test Log and Test Report) Semi / Full-Auto Online Test EA Responsibility Boundary (Cont.)