1 / 9

GP AlkaTex Plus

GP AlkaTex Plus. Problems of the standard process Reproducibility Bath life time ~ 4 to ~ 30 runs Small process window  For the most wafer qualities a different recipe. Problems of the standard alkaline process. Problems with standard KOH / IPA process

drake-olsen
Télécharger la présentation

GP AlkaTex Plus

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. GP AlkaTex Plus

  2. Problems of the standard process Reproducibility Bath life time ~ 4 to ~ 30 runs Small process window  For the most wafer qualities a different recipe Problems of the standard alkaline process

  3. Problems with standard KOH / IPA process - Small process window – large amount of recipes necessary - Oftentimes defects visible Process specification Wafer from one supplier texture with standard KOH / IPA solution. Significant difference in texture quality on wafer to wafer.

  4. Problems with standard KOH / IPA process - Small process window – large amount of recipes necessary - Oftentimes defects visible Process Specification Different textured parts on the same material

  5. Pro Shorter process time 20-30’ Less bath change necessary Up to 40 Bath runs Higher throughput Less chemical consumption - IPA - KOH or NaOH - DIW More wafer qualities with one basic recipe combinable Increase of cell efficiency (0.05 – 0.1%) Increase of optical yield, due to more homogeneous texture Con No CON’s known Process with AlkaTex Plus

  6. Standard vs. GP AlkaTex Plus texture  Better process control for pyramidal size. Process is tunable.  Very small defect rate for new texture process  Very stable run to run repeatability, not depending on wafer surface condition (only slight adjustments necessary). Microscope pictures A good standard texture (l. ~6-8µm) and a standard GP AlkaTex Plus texture (r. ~2-3µm)

  7. SEM pictures of alkaline texture SEM picture 45° tilted view 1000x (l.) and 5000x (r.) of a standard GP AlkaTex Plus textured wafer.

  8. SEM Pictures of alkaline texture SEM picture (2500x) (same material) of a standard KOH/IPA (l.) and GP AlkaTex Plus (r.) textured wafer.

  9. Reflectivity measurement Reflection curve of standard KOH / IPA textured wafer and new GP AlkaTex Plus textured wafer

More Related