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A Technical paper Submitted by Ajay Kumar Patra ROLL:EI200117303

MICRO-ELECTROMECHANICAL SYSTEMS. A Technical paper Submitted by Ajay Kumar Patra ROLL:EI200117303 Under the guidance of Ms. Suchilipi Nepak National Institute of Science & Technology Palur Hills, Berhampur.

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A Technical paper Submitted by Ajay Kumar Patra ROLL:EI200117303

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  1. MICRO-ELECTROMECHANICAL SYSTEMS A Technical paper Submitted by Ajay Kumar Patra ROLL:EI200117303 Under the guidance of Ms. Suchilipi Nepak National Institute of Science & Technology Palur Hills, Berhampur

  2. A process technology used to create tiny integrated devices or systems that combine mechanical and electrical components. Have the ability to sense, control and actuate on the micro scale, and generate effects on the macro scale. What is MEMS?

  3. Schematic diagram of MEMS

  4. MST(microsystems technology)

  5. Classification of MEMS • Sensor-device that measures information from a surrounding environment and provides an electrical output signal in response to the parameter it measured. • Transducer-device that transforms one form of signal or energy into another form. • Actuator-device that converts an electrical signal into an action

  6. MEMS Applications • BioMEMS • MOEMS • RF MEMS

  7. DENSO Micro-car

  8. Effect of miniaturization on surface and volume

  9. MEMS Fabrication methods • Photolithography • Bulk micromachining • Surface micromachining • High-aspect-ratio micromachining LIGA Laser micromachining • Computer aided design MEMCAD

  10. MEMS Packaging

  11. mechanical sensor actuator radiation sensor actuator thermal sensor actuator MEMS Transducers

  12. Mechanical Transducer Mechanical sensor piezoresistive piezoelectric capacitive resonant Mechanical actuator electrostatic piezoelectric

  13. Radiation sensor photodiodes charge-coupled devices pyroelectric sensors Radiation actuator Radiation Transducer

  14. Thermal Transducers Thermal sensors thermo-mechanical thermo resistive thermocouples Thermal actuators shape memory alloy actuation

  15. Industry Challenges • Access to foundries • Design, simulation and modeling • Packaging and testing • Standardization • Education and training

  16. CONCLUSION • Despite MEMS being an enabling technology, it is facing challenges in developing and manufacturing because of different set of capabilities and competencies to implement it. • For true commercialization of MEMS, foundries must overcome the critical technological bottlenecks.

  17. THANK YOU

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