Chemical Hygiene Plan Safety Manual

1. Chemical Hygiene PlanSafety Manual Bob Hamilton bob at eecs.berkeley.edu

2. #1 Rule No one may work alone in the NanoLab! • Failure to follow rules can result in suspension of lab privileges. • Will be warned if logging in alone, or if logging out would leave someone alone. • Can find who is in the lab through MercuryWeb. • During non-staff hours, confirm presence of another lab member.

3. Safety Test and Quiz Passing the SAFETY TEST qualifies a NanoLab member to work in the NanoLab. Qualified on “NANOLAB” and virtual equipment “chp” Passing an annual, online Safety Quiz is required to renew membership. Lab members receive an automatic email reminder when your safety quiz is due. Revisions to Chemical Hygiene Plan are posted in Revision history and should be regularly reviewed:

4. Telephone System Information • The laboratory has an independent telephone system: • You cannot dial campus numbers with only 5 digits. • You can dial lab numbers with only 3 digits. • Use “all call” to page staff or other members in the lab. • During staff hours dial “0” to reach the NanoLab office • You must dial “9” to dial an outside number: • Both “9 – 911 and 911 will reach an emergency operator. • For emergencies dial 9-1-1 from any lab phone. • If you use your cellular phone, call campus police at 510-642-3333

6. Emergency Response • In event of fire: • Pull a red fire alarm pull station. • Pull a blue Hazmat alarm pull station. • Evacuate the building. • In event of medical emergency: • Call 911 if life threatening. • Visit Tang Center for minor injuries. If Tang Center closed, the Trauma Center at Alta Bates Hospital on Ashby and Telegraph is at all hours. • In event of flooding or utility problem: • Contact staff. • Shutoff water supply if you can identify the source. • If there is a non-NanoLab building issue: • Contact campus hotline at 510-642-1032. • Follow up with call to building manager Domenico Carmagno at 510-502-6025. • If you call an EMERGENCY phone number on left, follow-up with a call to a number on right.

7. Blue Hazmat Evacuation Pulls • Blue Hazmat pull stations are located at every emergency exit • and at several locations throughout the lab. Lab members should • use these pulls when they believe the lab should be evacuated: • hazmat activates blue lights and audible alarm. • hazmat seals all hazardous gases. • hazmat notifies a 24 hour alarm company. • that then contacts laboratory staff. • - hazmat does not call 911. • - If blue light is flashing upon arrival, • you may NOT enter the lab. • At each lab entrance is a Firefighter Restricted • “break glass” emergency ventilation pull station. • This station turns off air recirculation and puts • the lab in a state of maximum exhaust. • Lab members are Never allowed to activate • this pull station!

8. NanoLab Evacuation Procedure Secure your process. As you proceed to a blue emergency exit door ask other lab members to follow. Exit the building. If after hours, bring a phone list from the exit door. The assembly area for an Emergency Exit from the NanoLab is NE of the Hearst Ave stairwell. The assembly area for SDH is to the West of the Qual Comm Café Remain available to pass on details you have about events that lead to an evacuation. Such information is useful.

9. NanoLab Evacuation Routes

10. NanoLab Assembly Area

11. SDH Building & NanoLab Office Emergency Assembly Area X

12. Clean Gowning • Proper attire requires before entering cleanroom: • Goggles, bouffant cap, nitrile gloves, shoe covers, gown, boot covers. • Safety glasses must be worn at all times! Safety Glasses must comply with OSHA standard: 1910.133 • Prescription Safety glasses available through UC Optometry Department • Contact lenses discouraged: They can trap abrasive chemicals next to eyes. • No sandals, open toe shoes, hi-heels or bare feet. Shorts allowed under full coverall suits.

13. Cleanroom Face Mask Is Not A Safety Device!

14. General Laboratory Practices • Walk, do not run while in the lab. • Food or drinks are not allowed in the NanoLab. • Cellular phone use is permitted in gowning area and main lab aisle, along west-windows. • Use of music players is allowed only in the gowning area only. • Visitors are allowed on by pre-approval. Request permission request via: visitor at silicon.eecs.berkeley.edu • Always remove your gloves as you exit the laboratory. • It is recommended lab users wash their hands after leaving the NanoLab or other Campus labs.

15. Eyewash, Showers, Safety Stations • The laboratory is equipped with ten safety • Shower/eyewash systems. • Five of these are sited in fully-equipped • Safety Stations located between bays. • Each safety station is equipped with: • Safety shower • Eyewash • First Aid Kit • Chemical Spill clean up kit • HF burn paste and pH test strips • * Two Safety Stations are equipped with • defibrillators

16. Chemicals • Common chemicals are supplied by the NanoLab. • For use in NanoLab ONLY. • Chemicals are stored in lab member accessible labeled cabinets throughout the lab. • Chemicals are also stored in rolling carts under the sinks. • View available chemicals on Mercury.

17. Special Chemicals • A “Special Chemical” is a proper name for any chemical not supplied by the NanoLab. • Special Chemicals must be approved prior to bringing them into the NanoLab. • Approval Process: • Obtain a Material Safety Data Sheet (MSDS). • Email MSDS to Chemical Safety Officer Bill Flounders (bill at eecs.berkeley.edu) and request special chemical review. • If approved, when you obtain your chemical, visit the NanoLab office to obtain a red “Approved Special Chemical” label. • Even if previously approved, additional purchases of the same chemical must go through the approval process to maintain up to date chemical inventories. • It is recommended that you complete the approval process prior to ordering chemical. • Special Chemicals may require special hazardous waste disposal methods.

18. Transporting Chemicals • Lab members are NEVER allowed in the chemical storage areas within the gas vaults, rooms 399 and 599 without staff escort or prior approval. • Make sure there are no open bottles of desired chemical already in the area. • Use safety carriers to move bottles within the NanoLab. • Store opened standard chemicals in designated areas near the sinks. • Notify staff if there is no stock of a chemical. • Chemical transport between levels is to be minimized: • Nochemicals are allowed in the lab passenger elevator. • Always use bottle carriers in the stairs or the chemical “dumb waiter”.

19. Chemical Transport “Dumb Waiter”

20. Working with Chemicals • All wet chemical work must be performed at a NanoLab sink.: • You must wear protective equipment (PPE) when working with any chemicals: • Chemically resistant gloves, face shield & apron. • You must wear chemically-rated gloves, chemical resistant apron and a face shield when working with any chemicals. • The only exception to this rule is the tri-polymer chemically resistant gloves are not required when handling small amber bottles of photoresist.

21. Working with Chemicals • Respirators are not required when working with standard or approved Special Chemicals at NanoLab sinks. • NanoLab sinks are annually certified as fume hoods. • If your process requires you to handle chemicals outside of a NanoLab sink, review your process with Chemical Safety Officer Bill Flounders. • Incidental use of isopropanol, methanol, or acetone squeeze bottles outside of NanoLab sinks is permitted. • Cal-OSHA requires all chemical containers to be labeled with their content!

22. Working with Chemicals • Always add acid to water. • Exception being Piranha • Do not use glassware with HF acid. • Ongoing processed must be labeled for chemical content, contact information date and time of return. • Place setups toward the back of fume hood where there is maximum exhaust. • Clean unidentified spills by: • Checking pH with a test strip. • If strongly acidic or basic (pH <4 or >10) use a sink hose to flush into the sink. • If neutral, mop up with Techni-cloths. All chemicals must be stored in proper containers with the contents identified!

23. Dry Chemicals • Measure dry chemicals by pouring into weigh boat or weighing paper: • Always use a clean spatula if scooping is necessary. • Never return chemicals to the source bottle. • All chemicals must be labeled and stored in proper containers, i.e. no beakers with foil or unlabeled dry chemicals.

24. Storing Chemicals

25. Chemical Disposal Is it water immiscible or halogenated solvent? Is Organic waste bottle more than 75% full? yes Take to msink 1, 16,18 no Replace full with empty bottle, capping full one lightly yes no yes Did you receive Special Chemical approval? Does it contain metal ions? Pour in funnel Take full to Chemical Disposal Cabinet in 582A yes no no Is it non-halogenated water soluble solvent or acid or base? Complete and attach HAZMAT sticker, fill out Chemical Disposal Manifest Stop, see Chemical Safety Officer no Follow disposal guidelines provided during Special Chemical review yes Aspirate in sink Collect separately Treat as photoresist

26. Chemical Bottle Disposal • Take empty bottles of drain disposable chemicals to the automated bottle rinse station in 582a. • Rinse using the in foot-peddles of the bottle rinse station. • Wearing a face shield and gloves. • Cross out label with an ‘x’ and place in bins near the rinse station. • Empty bottles of non-drain disposable solvent bottles should be placed in rear of fume hood to allow bottle to dry out, then put in a trash can. • Bottles of silicon etch should be washed and placed in marked bin in 582A for refilling.

27. Chemical Waste Bottles

28. Photoresist & Spin Coatings Residues from spin coating such as aluminum foil, cleanroom wipes, swabs, etc, that contain volatile solvents should be disposed of in the vented waste cans located at msink1 and msink3.

29. Chemical Exposures • Remove the affected clothing. • Rinse the exposed areas with water for 15 minutes using a safety shower or eyewash. • Notify staff after exposure using the posted Emergency Contact Information. • In an emergency, the deck hoses are usually your closest source of water.

30. Eye Exposure • If eyes are exposed: Flush eyes for at least15 minutes – NOT LESS! • Use an eye-wash. • Sinks have DI deck guns which can be used followed by an eye wash. • Contact staff for assistance or cal 911. • Follow up eye exposures with visit to a medical professional. • All eye exposures require a follow up visit to Tang Center or a hospital emergency room. Lab members should assist a colleague in the event of an eye exposure!

31. HF Burns • HF acts as an anesthetic, you may not feel the burn until damage is already done. • If exposed: • Remove affected clothing, flush with cold water for 15 minutes. • Massage calcium gluconate ointment from safety stations onto exposed area. • Notify staff after exposure, using posted Emergency contact information.

32. TMAH • TMAH is used in photoresist developer @ ~ 3% • It is hazardous by ingestion, inhalation, skin exposure or eye contact • Exposure to concentrations > 15% may cause respiratory or heart failure – a ganglion inhibitor • Flush expose area with water for 15 minutes. • Notify staff after exposure, using posted Emergency contact information.

33. Chemical Spills • During staff hours, contact a staff member. • Contain spills using the Spill Containment Kit available at Safety Stations. • Contact staff for assistance using the posted emergency contact information posted at every phone. • Final spill cleanup must be done by trained staff certified for spill cleanup.

34. Toxic Metals • General practices for handling metals: • Consider all metal dust as potentially hazardous • Minimize quantities • Protect bench top with disposable covers. • Confine material as you work • Change gloves when leaving the area • Solutions used for etching of toxic materials requires proper disposal • Confine dust - use dampened lab wipes to collect metal dust • Contact staff for proper disposal of cleaning materials contaminated with toxic metals • Mechanical cleaning should be done with fume hood at 200 ft per minute face velocity and a HEPA vacuum • Do not use N2 blowoff guns - use a HEPA vacuum • New evaporation sources or sputter targets must be reviewed as Special Chemicals

35. Work with Gallium Arsenides or other highly toxic metals must first be reviewed with Bill Flounders!Follow the same procedures as outlined for: SPECIAL CHEMICALS

36. Sharps & Dangerous Objects • Dispose broken glassware in yellow trash pails labeled “broken glass”. • Dispose Si wafers in the blue Si wafer recycle bins. • Dispose needles, razor blades, and other sharp objects in red “SHARPS” bins. • Mercury thermometers are banned from the lab. • Contact lab staff in event of a mercury spill. • Batteries and electronic waste disposal is via the NanoLab office to assure proper disposal.

37. Cylinder Gases • Lab members are not allowed to handle compressed gas cylinders. • Corrosive and Toxic Gases are kept in the dedicated gas vaults, room 399 and 599. • Gases are stored in ventilated steel gas cabinets. Toxic Gases are monitored by the Toxic Gas Monitoring system, which will shut them off at source if leak is detected or if HAZMAT alarm is pulled. • Lab members are NEVER allowed in the gas and chemical storage areas, rooms 399 and 599 without staff escort or prior approval.

38. Lasers Lasers are allowed after review and approval of Bill Flounders (bill at eecs.berkeley.edu). More information on safe use of lasers at: www.ehs.berkeley.edu

39. Ionizing Radiation Safety MNL has 4 radiation producing machines and one radiation source. • Radiation Producing Machines • LEO 1550 scanning electron microscope (RUA 2501) • FEI 650 Nova Nano scanning electron microscope (RUA 2511) • Crestec CABL-9510CC electron beam writer (RUA 2531) • Siemans D5000 x-ray diffractometer (RUA 1501) • Radiation Source • SemiTest SCA 2500 – Po210 (RUA 3631) • UC policy requires anyone working in the presence of such machines to read UC’s Radiation Safety Guidelines for Non-Users. • http://nanolab.berkeley.edu/public/factsheets/radsafenonuser.pdf • This link is provided in the MNL chemical hygiene plan. To pass the MNL safety test you must confirm that you have read and understand these guidelines.

40. Cryogens • Review EH&S Cryogen fact Sheet before working with cryogens. • Liquid Nitrogen is stored in vacuum jacketed cylinders called dewars. • Hazards are from freezing burns and asphyxiation due to sudden oxygen depletion. • Wear gloves and goggles when transferring to a smaller container. • Use care to avoid spills to minimize damage to the floor in the lab.

41. Flooding in the Lab • Search for the source of the leak and turn off the supply valve. • Use the squeegees located in the freight elevator vestibule area to direct most water to floor drain. • Use the wet vacuum located in the freight elevator vestibule area to vacuum up any remaining water from the floor. • Notify a staff member and report the incident on Mercury as a problem under facilities.

42. Electrical Safety • Report all electrical issues to staff. • In event of electrocution, shutoff the power sources at the east end of each chase. • Use of power strips is regulated in the lab, see Staff. • Never use the ON/OFF, EMO or EPO buttons to reboot tools. Such functions are for emergencies. The use of ON/OFF, EMO/EPO functions runs the risk of equipment damage.

43. Lock out, Tag out • If an equipment is labeled red (fatal) in Mercury, do not attempt to use it or energize it in any way. • Watch for Engineer Photo ID tags on equipment and follow the instructions on these tags.

44. Fire Prevention and Response • Use care with heat lamps or when heating flammable solvents: • Use only digitally controlled hot plates. • Always use a water bath to transfer heat. In event of fire: • Fire extinguishers are clean room “approved”. • Fire extinguishers are located throughout the lab and near every door. • You are not expected to fight fires. Use a fire extinguisher only if you are feel safe doing so. • You are expected to “Notify, Evaluate, Evacuate”. • If clothes are involved use a safety shower.

45. NanoLab Evacuation Routes

46. NanoLab Assembly Area