1 / 4

What is MEMS Technology

What is MEMS ?. Micro Electro Mechanical Systemsmicro scale dimensions (1mm = 1000 microns)electrical and mechanical featuressystems (features combined to perform a function)MEMS fabrication techniquesOriginally used IC (computer chip) fabrication techniques and materialsMore MEMS-specific f

giuseppe
Télécharger la présentation

What is MEMS Technology

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

    1. What is MEMS Technology?

    2. What is MEMS ? Micro Electro Mechanical Systems micro scale dimensions (1mm = 1000 microns) electrical and mechanical features systems (features combined to perform a function) MEMS fabrication techniques Originally used IC (computer chip) fabrication techniques and materials More MEMS-specific fabrication techniques and materials are now in use MEMS is an enabling technology Smaller device size Batch processing for low cost, uniform production Distributed device placement More precise sensing

    3. Why is MEMS useful? Sensors and Actuators - two classes of MEMS Sensors - measure the environment SMALL => interfere less with the environment it is measuring SMALL => redundancy, batch fabricated, Actuators - perform work on the environment SMALL => small motion but very precise SMALL => can be placed in small spaces

    4. How are MEMS made? Surface Micromachining - additive process (2-D) Create device by adding materials on top of a wafer Easily mixed with IC fabrication techniques Limited to film thickness less than 4 microns (human hair 50-75 microns, IC gate ~ 0.15 microns) Typically used for high volume, low precision, low cost devices

More Related