1. Institute of Physics & Technology Russian Academy of Sciences Director academicion Kamil Valiev

2. IPT RAS • Lab of Microstructuring & Submicron Devices • Lab of MEMS • Lab of Micro- and Nanostructures Characterization • Lab of Technological Processes Simulation • Lab of Quantum Computers Physics

3. Fundamental Quantum computers physics Low temperature plasma physics Semiconductors devices physics Nanomagnetics physics X-ray diffraction theory Applied HDP based processing HDP and ion sources Equipments for deposition, etching, and ion implantation Plasma diagnostics and end-point detection Metals and silicides Modelling of technological processes and devices IPT RAS: Main fields of Activities