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Nano-Zoom

Nano-Zoom

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Nano-Zoom

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    1. Nano-Zoom JMAR Precision Systems, Inc. 9207 Eton Avenue, Chatsworth, CA 91311 Phone: 1.818.700.8977 Fax: 1.818.700.8984 www.jmar-psi.com JMAR Precision Systems presents the Nano-Zoom. Welcome to the nanometer world, made possible by JMAR Precision Systems. JMAR Precision Systems presents the Nano-Zoom. Welcome to the nanometer world, made possible by JMAR Precision Systems.

    2. Nano-Zoom The Nano-Zoom combines a high quality optical microscope and a state-of-the-art scanning probe microscope (SPM) into a single system. The Nano-Zooms SPM is capable of Atomic Force Microscopy Lateral Force Microscopy Magnetic Force Microscopy (optional) Electric Force Microscopy (optional) Use the optical microscope to find a feature on your sample. Press a button to move that feature precisely under the SPM. Scan your sample with the SPM at Angstrom resolution. The Nano-Zoom can be equipped with a vacuum chuck for holding disk media or semiconductor wafers, or fixtures for a variety of other materials.

    3. Nano-Zoom The Nano-Zoom combines a high quality optical microscope with a state-of-the-art atomic force microscope, or AFM. The atomic force microscope renders Angstrom resolution 3 dimensional images of your sample. The Nano-Zoom can be equipped with a vacuum chuck for holding disk media, or with a fixture for holding a semiconductor wafer. Place your sample on the precision motion platform. Find a feature using the optical microscope. Then, on the touch of a button, that feature moves directly underneath the atomic force microscope. The Nano-Zoom combines a high quality optical microscope with a state-of-the-art atomic force microscope, or AFM. The atomic force microscope renders Angstrom resolution 3 dimensional images of your sample. The Nano-Zoom can be equipped with a vacuum chuck for holding disk media, or with a fixture for holding a semiconductor wafer. Place your sample on the precision motion platform. Find a feature using the optical microscope. Then, on the touch of a button, that feature moves directly underneath the atomic force microscope.

    4. Why use an AFM? Resolution. The resolving power of an optical microscope is about 300 nm. AFM offers the best resolution and fidelity. The sharp, crisp high definition edge sets the stage for good measurement. Material independence. Versatility. Surface topography Height measurements Width measurements Profiles Non-Destructive. Compare to SEM, whose cross section measurements are destructive.

    5. How Does an AFM Work? Instead of using light or electrons to probe the sample, the AFM uses a tip suspended above the surface. The attractions or repulsions between the tip and the surface cause the tip to deflect. A laser senses the deflection. Scanning the tip across the surface generates the image.

    6. Scanned Disk Media The next slide shows a 5 mm 5 mm Nano-Zoom Atomic Force Microscope (AFM) image of rigid disk media. The AFM renders a 3-dimensional image of the surface of the media. Features that are too small to see in an optical microscope are clearly visible in the AFM scan.

    7. AFM Image of Disk Media Here is a sample atomic force microscope scan of rigid disk media. Features that are too small to see in an optical microscope are clearly visible in the AFM scan. Here is a sample atomic force microscope scan of rigid disk media. Features that are too small to see in an optical microscope are clearly visible in the AFM scan.

    8. AFM Image of Disk Media 3D View

    9. AFM Image of Disk Media -- 3D View The Nano-Zooms software provides a variety of ways of displaying your scan results. Here is a 3 dimensional view of the same rigid disk media scan. The Nano-Zooms software provides a variety of ways of displaying your scan results. Here is a 3 dimensional view of the same rigid disk media scan.

    10. Surface Roughness Calculation The Nano-Zoom includes software with many features for analyzing AFM data. The next slide shows a height histogram and surface roughness calculations for the same AFM scan of rigid disk media. For this sample, the RMS deviation of the surface height is 4 Angstroms.

    11. Surface Roughness Calculation AFM Data on Rigid Disk Media The Nano-Zooms software provides capabilities to analyze data from the AFM scans. This screen displays calculated surface roughness parameters along side a height histogram analysis. The Nano-Zooms software provides capabilities to analyze data from the AFM scans. This screen displays calculated surface roughness parameters along side a height histogram analysis.

    12. AFM Image of Grating Pattern The next slide shows an AFM image of a metallic grating imprinted on a film substrate.

    13. AFM Image of Grating Pattern Slope View Here is a sample atomic force microscope scan of a grating pattern imprinted on a thin film. Once again, features that are too small to see in an optical microscope are clearly visible in the AFM scan. Here is a sample atomic force microscope scan of a grating pattern imprinted on a thin film. Once again, features that are too small to see in an optical microscope are clearly visible in the AFM scan.

    14. AFM Image of Grating Pattern 3D View The next slide shows a 3 dimensional rendering of the same AFM scan.

    15. AFM Image of Grating Pattern 3D View Here is a 3 dimensional view of the same AFM scan. Here is a 3 dimensional view of the same AFM scan.

    16. Measurement View of Grating Pattern The next slide shows the measurement screen of the AFM software, along with a sample measurement of two periods of the grating. The grating pitch is 40 mm, conforming to specification!

    17. Measurement View of Grating Pattern The Nano-Zooms software provides the capability to measure length, width, and height or depth of features in the AFM scan. Here is a sample measurement showing the pitch of the grating pattern in the same AFM scan. The Nano-Zooms software provides the capability to measure length, width, and height or depth of features in the AFM scan. Here is a sample measurement showing the pitch of the grating pattern in the same AFM scan.

    18. Defect View The next slide shows the Defect Screen of the Nano-Zoom software. Several software features are illustrated, including the following: A defect table with imported data. A Polar View of the entire sample surface indicating the current field of view and the defect locations. Live video from the microscope. Big Digital Readouts showing the position in the sample parts coordinate system.

    19. Nano-Zoom Defect View The defect inspection screen displays a table of defect locations and properties, a diagram of the entire disk or wafer with defect locations shown in red dots, and live video from the microscope. The software can import tables of defects, in text format, from other software or from other machines. The defect inspection screen displays a table of defect locations and properties, a diagram of the entire disk or wafer with defect locations shown in red dots, and live video from the microscope. The software can import tables of defects, in text format, from other software or from other machines.

    20. Defect Review CMP Process Verification IC Failure Analysis Width, Depth, and Height Measurements Surface Roughness Fiber Optic Gratings Pole Tip Recession CD/DVD Inspection Disk Media Inspection Wafer Inspection Thin Film Inspection Etc. Nano-Zoom Applications The Nano-Zoom can be used for a wide variety of applications. The Nano-Zoom can be used for a wide variety of applications.

    21. Specifications AFM & Optics Scanning Probe Microscope (SPM) Specifications: X,Y Scan Size: 80 m x 80 m standard, extendable to 200 m. Z Range: 8 m standard, extendable to 20 m. X,Y resolution: 1 nm (smaller resolutions are available). Z resolution: < 1 . Variety of probe tips available Operational modes: Contact, Intermittent Contact, Broadband, etc. Lateral Force Microscopy. Optional Magnetic Force Microscopy. Optional Electric Force Microscopy. Easy probe tip installation and alignment. Automatic probe tip engage feature. Top Quality Optical Microscope: Dark field and bright field illumination. 5 position lens turret. Objective lenses: 5x, 20x, 50x, 100x standard. Other lenses are available. 10X eyepieces standard. Optional Differential Interference Contrast (DIC). Live video from the microscope is displayed on the computer screen. Field of view is 64x48 m (100X lens) to 1.28x0.96 mm (5X lens). Optional high contrast video system with dedicated monitor. The high quality optical microscope supports a variety of objective lenses, bright field and dark field illumination, and optional differential interference contrast. The atomic force microscope supports a variety of scan modes, including contact mode, intermittent contact mode, Broadband mode, optional magnetic force microscopy, and optional electric force microscopy. A variety of probe tips are available. The scan head boasts an 80 by 80 micron scan window, which is extendible to 200 by 200 microns. The standard Z range is 8 microns, extendible to 20 microns. A Z resolution of less than an Angstrom, or 10-10 meters, is possible. The high quality optical microscope supports a variety of objective lenses, bright field and dark field illumination, and optional differential interference contrast. The atomic force microscope supports a variety of scan modes, including contact mode, intermittent contact mode, Broadband mode, optional magnetic force microscopy, and optional electric force microscopy. A variety of probe tips are available. The scan head boasts an 80 by 80 micron scan window, which is extendible to 200 by 200 microns. The standard Z range is 8 microns, extendible to 20 microns. A Z resolution of less than an Angstrom, or 10-10 meters, is possible.

    22. Additional Specifications Precision Motion Platform: Computer-controlled R, ?, Z precision motion platform. R Stage: 0.1 micron resolution, 10 inches travel. Z Stage: 0.1 micron resolution, 6 inches travel. ? Stage: 0.001 resolution. For 150 mm wafers or disks (extendible to 200 mm). Acoustic and vibration isolation included. Other features: Optional scriber with diamond or steel tips to etch your sample. Acoustic and vibration isolation. Small equipment foot print. Measurements are non-destructive. The high quality optical microscope supports a variety of objective lenses, bright field and dark field illumination, and optional differential interference contrast. The atomic force microscope supports a variety of scan modes, including contact mode, intermittent contact mode, Broadband mode, optional magnetic force microscopy, and optional electric force microscopy. A variety of probe tips are available. The scan head boasts an 80 by 80 micron scan window, which is extendible to 200 by 200 microns. The standard Z range is 8 microns, extendible to 20 microns. A Z resolution of less than an Angstrom, or 10-10 meters, is possible. The high quality optical microscope supports a variety of objective lenses, bright field and dark field illumination, and optional differential interference contrast. The atomic force microscope supports a variety of scan modes, including contact mode, intermittent contact mode, Broadband mode, optional magnetic force microscopy, and optional electric force microscopy. A variety of probe tips are available. The scan head boasts an 80 by 80 micron scan window, which is extendible to 200 by 200 microns. The standard Z range is 8 microns, extendible to 20 microns. A Z resolution of less than an Angstrom, or 10-10 meters, is possible.

    23. System Isolation Vibration Isolation: Standard: passive vibration isolation system, natural frequency 1 Hz. Optional AVI-150 active vibration isolation system. Active isolation: 1-200 Hz. Passive isolation >200 Hz. Correctional forces to 8N horizontal, 4N vertical. Isolation in 6 degrees of freedom. Virtually no resonance. Acoustic Isolation: Foam-lined enclosure isolates the system against acoustic noise and air currents. The high quality optical microscope supports a variety of objective lenses, bright field and dark field illumination, and optional differential interference contrast. The atomic force microscope supports a variety of scan modes, including contact mode, intermittent contact mode, Broadband mode, optional magnetic force microscopy, and optional electric force microscopy. A variety of probe tips are available. The scan head boasts an 80 by 80 micron scan window, which is extendible to 200 by 200 microns. The standard Z range is 8 microns, extendible to 20 microns. A Z resolution of less than an Angstrom, or 10-10 meters, is possible. The high quality optical microscope supports a variety of objective lenses, bright field and dark field illumination, and optional differential interference contrast. The atomic force microscope supports a variety of scan modes, including contact mode, intermittent contact mode, Broadband mode, optional magnetic force microscopy, and optional electric force microscopy. A variety of probe tips are available. The scan head boasts an 80 by 80 micron scan window, which is extendible to 200 by 200 microns. The standard Z range is 8 microns, extendible to 20 microns. A Z resolution of less than an Angstrom, or 10-10 meters, is possible.

    24. Easy to Use Windows-based software. 3D Visualization of AFM images. Image refinement with tilt removal, streak and spot removal, smoothing and user defined filter. Fourier transform analysis for analyzing and modifying the frequency spectrum of SPM images. Histogram analysis and surface roughness measurements. Dimensional analysis for measuring feature height, width, and length. Image storage and retrieval. Optional Pax-It image archival software maintains a database of images, makes it easier to organize, analyze, network, transmit and print images. Defect classification system. Defect table displays list of defects, allows user to move to a defect manually or automatically and classify it. Reads/writes text files containing defect positions. Easy to export/import defect data to/from other machines. Polar view displays a diagram of your sample with all defect locations. Large digital readouts display part position continuously. Software Features The system includes easy-to-use Windows-based software, a computer-controlled precision motion platform, acoustic and vibration isolation, and a number of other features.The system includes easy-to-use Windows-based software, a computer-controlled precision motion platform, acoustic and vibration isolation, and a number of other features.

    25. Choosing an AFM Probe Tip

    26. JMAR Probe Tips

    27. JMAR-PSI Sales Address: JMAR Precision Systems, Inc. 9207 Eton Ave. Chatsworth, CA 91311-5808 Web: www.jmar-psi.com E-Mail: salesjpsi@jmar-psi.com Phone: 1-800-793-0179 1-818-700-8977 Fax: 1-818-700-8984 We hope you have enjoyed this presentation. Please contact JMAR Precision Systems at 1-800-793-0179 today. Our sales team is ready to help.We hope you have enjoyed this presentation. Please contact JMAR Precision Systems at 1-800-793-0179 today. Our sales team is ready to help.

    28. Image Gallery

    29. Alumina Layer

    30. CeO2 Film

    31. Crystals on Pr-Ce Pellet Surface

    32. Sapphire Substrate

    33. SiO2 Film

    34. SiO2 on Re Crystal Substrate

    35. Northrop-Grumman Test Pattern

    36. Alumina Layer With Vias

    37. Line Heights

    38. Pits on CD Media

    39. Via Height Measurements

    40. Photoresist Residue on 1-D Refill Lithography

    41. GaN

    42. Homoepitaxial SiC

    43. Polished SiC

    44. SiC Film

    45. Corrosion

    46. Chrome on Glass

    47. Stainless Steel

    48. Ti Film

    49. JMAR-PSI Sales Address: JMAR Precision Systems, Inc. 9207 Eton Ave. Chatsworth, CA 91311-5808 Web: www.jmar-psi.com E-Mail: salesjpsi@jmar-psi.com Phone: 1-800-793-0179 1-818-700-8977 Fax: 1-818-700-8984 We hope you have enjoyed this presentation. Please contact JMAR Precision Systems at 1-800-793-0179 today. Our sales team is ready to help.We hope you have enjoyed this presentation. Please contact JMAR Precision Systems at 1-800-793-0179 today. Our sales team is ready to help.

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