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Sensors Software Service

10 years. Dr. rer. nat. Klaus Veit. Sensors Software Service. agenda. company deflectometry CTA mirror inspection other products: WLI, fringe projection. company. advanced optical 3D-sensors since 2001 – spin-off from Chair for Optics, University of Erlangen

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Sensors Software Service

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  1. 10 years Dr. rer. nat. Klaus Veit Sensors Software Service

  2. agenda • company • deflectometry • CTA mirror inspection • other products:WLI, fringe projection

  3. company • advanced optical 3D-sensors • since 2001 – spin-off from Chair for Optics, University of Erlangen • cooperation with Chair for Optics

  4. deflectometry SpecGAGE3D products • white light interferometer KORAD3D • fringe projection sensors FaceSCAN3D

  5. deflectometry intrinsic data: local slope

  6. projector phase measuring deflectometry (PMD) camera principle ground glass surface under test

  7. deflectometry • direct measurement of local slope:information efficient, simple, low noise • 1 Mio points measured in 10 sec • scaleable from mm to meter advantages

  8. deflectometry SpecGAGE3D • field 80 mm • accuracy 0.5µm • local sensitivity ~ 20 nm • measuring time 10 sec

  9. A B eye glass measurement local refractive power

  10. eye glass measurement: tool traces

  11. deflectometry for car windows curvature map

  12. CTA mirrors Institute of Optics, Information and Photonics – University of Erlangen Images: courtesy of the CEA Saclay, France. 1.2 m flat-to-flat focal length 16 m

  13. CTA mirrors Institute of Optics, Information and Photonics – University of Erlangen compact setup for climate chamber height, slope and curvature maps from one single measurement

  14. CTA mirrors Institute of Optics, Information and Photonics – University of Erlangen shape z(x,y) local curvature

  15. CTA Mirror: shape deviation 20 µ

  16. Deflectometry – CTA Mirrors Results

  17. Deflectometry – CTA Mirrors Results calculated fromdeflectometric data direct PSF from 2f setup

  18. white-light-interferometry (WLI) measuring principle

  19. white-light-interferometry (WLI) • measurement uncertainty ~ 1µm: independent from aperture, distance, material • coaxial optics: measurement in deep boreholes possible • all types of surfaces (smooth, rough, volume scatterers, …) • up to 4 Mio data points • Field up to 110 mm advantages

  20. KORAD3D-L • area: 55x55 mm² • lat. Res.: up to 30 µm • camera: up to 3 MPix • uncertainty: ~ 1µm • speed: up to 500µm/sec white-light-interferometry (WLI)

  21. WLI – applications • offline system – production line • FoV 3 x 3 mm² • Ø = 3mm, depth = 45mm • measuring of cone angles • high precision ( = 0.02°) injection nozzle

  22. WLI – applications • inline system – 24/7 • FoV 13 x 13 mm² • dimensions of bumps (coplanarity) • warpage • high-speed (1 sec) bumps and solder paste (electronics)

  23. WLI – applications • inline system • FoV 15 x 15 mm² • flatness <1 µm • measuring time: 5 sec. sealing surfaces

  24. WLI – applications rotary valve • semi-automatic system • Close to the production line • FoV 50 x 50 mm² • flatness 5 µm • step height 15-20 µm

  25. fringe projection for medical applications FaceSCAN3D /BodySCAN3D

  26. www.3d-shape.com contact information Dr. Klaus Veit +49 (0) 9131 / 977 959 - 16 +49 (0) 9131 / 977 959 - 11 www.3d-shape.com veit@3d-shape.com General Manager: Mr. Benno Knapp

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