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بسم الله الرحمن الرحيم

بسم الله الرحمن الرحيم. Micro Opto-Electro-Mechanical Systems (MOEMS) Hamdy Fadl 500512011. Outlines. MOEMS overview Applications Packaging. الحسن بن الهيثم. al-Ḥasan ibn al-Haytham. al-Ḥasan ibn al-Haytham. مخطوطة Manuscript. What is MOEMs ?.

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بسم الله الرحمن الرحيم

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  1. بسم الله الرحمن الرحيم Micro Opto-Electro-Mechanical Systems (MOEMS) Hamdy Fadl 500512011 Hamdy Fadl 500512011

  2. Outlines • MOEMS overview • Applications • Packaging Hamdy Fadl 500512011

  3. الحسن بن الهيثم al-Ḥasan ibn al-Haytham Hamdy Fadl 500512011

  4. al-Ḥasan ibn al-Haytham Hamdy Fadl 500512011

  5. مخطوطة Manuscript Hamdy Fadl 500512011

  6. What is MOEMs ? • Micro-opto-electromechanical systems (MOEMS), or optical MEMS, are systems involving micromachining of structures in the micro- to millimeter range whose purposes are to manipulate light. • Itis not a special class of Micro-Electro-Mechanical Systems (MEMS) but in fact it is MEMS merged with Micro-optics which involves sensing or manipulating optical signals on a very small size scale using integrated mechanical, optical, and electrical systems . Hamdy Fadl 500512011

  7. Today’s MOEMS devices include Optical Switch , waveguides, moving mirrors and diffractive gratings ______________________ *Micromachining : techniques for fabrication of 3D structures on the micrometer scale • Applications include MEMS devices • Most methods use silicon as substrate Hamdy Fadl 500512011

  8. MOEMS Fabrication • MOEMS devices are typically made using standard lithography methods giving the advantages of a compact design and fabrication at a low cost. • These devices are usually fabricated using micro-optics and standard micromachining technologies using materials likesilicon, silicon dioxide, silicon nitride andgallium arsenide. Hamdy Fadl 500512011

  9. MEMS+MO=MOEMShow is that ? • During early 1990s, Rockwell Science Center, with government sponsors, contributed to the development of micro-optics technology Teamed with MIT/Lincoln-Lab. • 1992, Rockwell applied micro-optics to the system development of several industrial applications, including: • microlenses for silicon focal planeshigh speed binary microlens in GaAs, antireflection surfaces in siliconthin film microlens arrays, etc. Hamdy Fadl 500512011

  10. Rockwell Science Center also developed refractive microlens technology, including gray scale photolithography. • Diffractive microlenses based on binary optic structures are typically fabricated in bulk material by multiple sequential layers of photoresist patterning and reactive ion etching (RIE), to form a multi-step phase profile. • This profile approximates the ideal kinoform lens surface. A special staircase process, called binary optics, is used to fabricate diffractive components. Hamdy Fadl 500512011

  11. With so many successes in Micro-optics and MEMS, Rockwell researchers who were involved in both MEMS and Micro-optics, initiate development of several of innovative photonics ideas combing both technologies. • This was behind the acronym of MOEMS, when both MEMS and Micro-optics were merged in one single IC processing lab. Hamdy Fadl 500512011

  12. MOEMS is a promising multi technology for miniaturization of critical optical systems. • The acronym is defined of three high tech fields of micro-optics, micromechanics, and microelectronics. • MOEMS indirectly could merge in micromachining, microsensors and microactuators if their processes are compatible with integrated circuits. Hamdy Fadl 500512011

  13. Merging all these multi technologies, made MOEMS an ideal knowhow for many industrial demonstrations of commercial devices, such as optical switches, digital micromirror devices (DMD), bistable mirrors, laser scanners, optical shutters, and dynamic micromirror displays. Hamdy Fadl 500512011

  14. Hybridization Figure 1 : Merging Technology Hamdy Fadl 500512011

  15. MEOMS and commercial applications • Attractive for comercial application because of : • batch processing and embossed replication • enabling technology for applications that cannot be addressed, using micro-optics • The trend toward miniaturization and integration of conventional optical systems • desirable elements of optical communication. Hamdy Fadl 500512011

  16. What is the difference between Optical MEMS and MOEMS? • Optical MEMS could include bulk optics but MOEMS is truly based on microtechnology • where MOEMS devices are batched processed exactly like integrated circuits, but this is not true in most cases for Optical MEMS. Hamdy Fadl 500512011

  17. Time for Applications! Hamdy Fadl 500512011

  18. Applications • Optical switch • Wave guide • Moving mirror • Diffractive grating • Microlens arrays • Microbolometers • Bistable Fabry Perot resonator for high accuracy measurement of gas concentration • Micro-optical microphone to measure air pressure. Hamdy Fadl 500512011

  19. Optical Switch • Many optical components are required in the rapid development of optical networks, including optical switches. • Optical switches in micro-opto-electro-mechanical systems (MOEMS) have many applications because of their excellent features, including low insertion loss and crosstalk. • Intelecommunications,insertion lossis the loss ofsignalpowerresulting from the insertion of a device in atransmission lineoroptical fiberand is usually expressed indecibels(dB). Hamdy Fadl 500512011

  20. Optical Switch Hamdy Fadl 500512011

  21. Then , what is Optical switch? • Intelecommunication, anoptical switchis aswitchthat enablessignals inoptical fibersorintegrated optical circuits (IOCs) to be selectively switched from onecircuitto another. • Away from telecom, an optical switch is the unit that actually switches light between fibers • Fast optical switches, may be used to perform logic operations. Hamdy Fadl 500512011

  22. Example : 3D-MEMS Optical Switch • In a MEMS optical switch, a micro-mirror is used to reflect a light beam. The direction in which the light beam is reflected can be changed by rotating the mirror to different angles, allowing the input light to be connected to any output port. Hamdy Fadl 500512011

  23. 3D-MEMS Optical Switch Hamdy Fadl 500512011

  24. 3D-MEMS Optical Switch Features • Can switch optical signals without converting them into electrical signals. • Allows compact low-loss switches to be formed on any scale. • Switching can be performed in 10-30 msec. Hamdy Fadl 500512011

  25. 3D-MEMS Optical Switch usages • Since this device can switch large numbers of optical signals simultaneously, • it can be used as a trunk switch for handling large amounts of traffic, • and as a switch in large urban communication networks. Hamdy Fadl 500512011

  26. Another Application : Waveguide • Awaveguideis a structure that guides waves, such aselectromagnetic wavesorsoundwaves. There are different types of waveguides for each type of wave. Hamdy Fadl 500512011

  27. Waveguide Dispersion, whale, shark Hamdy Fadl 500512011

  28. Some naturally occurring structures can also act as waveguides. The SOFAR channel layer in the ocean can guide the sound of whale song across enormous distances. TheSOFAR channel (short forSound Fixing and Ranging channel), ordeep sound channel(DSCis a horizontal layer of water in the ocean at which depth thespeed of soundis at its minimum. The SOFAR channel acts as awaveguidefor sound, and low frequencysound waves within the channel may travel thousands of miles before dissipating. Hamdy Fadl 500512011

  29. Waveguide in MOEMS • Fiber-optic waveguides based (MOEMS) form a significant class of biosensors which have notable advantages like • light weight, • low cost • and more importantly, the ability to be integrated with bio-systems. Hamdy Fadl 500512011

  30. Example :integrated microfluidic fiber-optic waveguide biosensor . • The fiber-optic waveguide is integrated with bulk micromachined fluidic channel across which different chemical and biological samples are passed through. • The significant refractive index* change due to the presence of biological samples that causes the evanescent field condition in the waveguides leads to optical intensity attenuation of the transmitted light. Hamdy Fadl 500512011

  31. Representative image for waveguide in biosensor Hamdy Fadl 500512011

  32. Refractive index • Inopticstherefractive indexorindex of refractionnof a substance (optical medium) is a dimensionlessnumber that describes howlight, or any otherradiation, propagates through that medium. It is defined as • n= c/v • wherecis thespeed of lightinvacuumandvis the speed of light in the substance. • For example, the refractive index ofwateris 1.33, meaning that light travels 1.33 times as fast in vacuum as it does in water Hamdy Fadl 500512011

  33. The speed of light • The speed of light in vacuum, commonly denoted c, is a universal physical constant. • Its value is 299,792,458 meters per second Hamdy Fadl 500512011

  34. Speed of light Sunlight takes about 8 minutes 19 seconds to reach the Earth (based on the average distance). Hamdy Fadl 500512011

  35. Evanescent waves • Anevanescent waves are formed at the boundary between two media with different wave motion properties, and are most intense within one third of a wavelength from the surface of formation Hamdy Fadl 500512011

  36. evanescent waves The exponential dependence of the electromagnetic field intensity on the distance away from the interface Hamdy Fadl 500512011

  37. Micro lenses • Microlens is a small lens, generally with a diameter less than a millimetre (mm) and often as small as 10 micrometres (µm). • The small sizes of the lenses means that a simple design can give good optical quality Hamdy Fadl 500512011

  38. Micro lens and Microlens Array • Single microlenses are used to couple light to optical fibres • while microlens arrays are often used to increase the light collection efficiency of CCD arrays. They collect and focus light that would have otherwise fallen on to the non-sensitive areas of the CCD*. ___________________ *A charge-coupled device (CCD) is a device for the movement of electrical charge, usually from within the device to an area where the charge can be manipulated, for example conversion into a digital value. Hamdy Fadl 500512011

  39. Microlens in Digital Camera Hamdy Fadl 500512011

  40. Hamdy Fadl 500512011

  41. Applications of Microlenses • Microlens arrays are in digital projectors, to focus light to the active areas of the LCD used to generate the image to be projected. • Current research :microlenses act as concentrators for high efficiency photovoltaics for electricity production. • Form compact imaging devices for applications such as photocopiers and mobile-phone cameras. • 3D imaging and displays Hamdy Fadl 500512011

  42. 3D imaging Display Hamdy Fadl 500512011

  43. 3D imaging Microscope using Microlenses Array Hamdy Fadl 500512011

  44. MOEMS packaging • Encapsulation of electronics and sensors has traditionally been used as a protection against the outside environment, but through integration of other functions (e.g. lenses, electric and optic conductors) • Advanced polymer technique has the potential to realize multifunctional encapsulation in combination with 3D-silicon technique and surface technology. Hamdy Fadl 500512011

  45. THANK YOU Hamdy Fadl 500512011

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