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High Performance 300mm EFEM- Performix System

Kensington Laboratories is an advanced technology leader<br>committed to developing and manufacturing the highest quality, most reliable, and cost-effective automation solutions in the industry.

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High Performance 300mm EFEM- Performix System

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  1. High Performance 300mm EFEM- Performix System

  2. About Us Kensington Laboratories is an advanced technology leader committed to developing and manufacturing the highest quality, most reliable, and cost effective automation solutions in the industry. Our technical innovation along with investment in capital infrastructure ensures that our customers receive products with superior performance, high reliability, and low cost of ownership. All Kensington Labs products are backed by our global service and support network.

  3. Reputation for Leadership in Robotic Technology Performixis backed by Kensington Laboratories’ reputation for high quality design and high performance technology. With a large installed base of robots and systems, Kensington Labs Performixsub-systems ensure faster start-up times and improved placement accuracies, in an ISO Class 1 mini-environment. Based upon a history of cutting-edge system design, Performix integrates the highest quality components to achieve performance unrivaled in the marketplace. Kensington has a large installed base of robotic systems with robots numbering in the thousands and wafer sorters exceeding 1,500.

  4. Configurable Solutions Flexible load port and robotic components designed for configurable solutions allow Performix to be easily tailored to a variety of automation requirements. Features that make the PerformixEFEM configurable to your specific needs include: • ADO load port with or without wafer mapping option. • MultiLinkDual Arm (4 axes of motion) and MultiLinkSingle Arm (3 and 4 axes of motion) robots. • End effector options: 300mm edge grip, 300mm vacuum grip, 300mm supinator wafer flipper, and 300mm batch edge grip – all with through-beam wafer mapper. The integrated through-beam wafer mapper uses an eye safe LED that optically maps the entire FOUP and detects common storage errors. • Yaw axis robots (trackless) or Track configurations.

  5. Zero Preventative Maintenance is an integral part of all Kensington robot systems. No periodic lubrication or adjustments are required under standard operating conditions. • Performix integrates the highest quality components based upon a history of cutting-edge system design. • The Performix 300mm EFEM is an innovative, high quality equipment front end solution that provides exceptional throughput and world class tool availability. • Kensington Laboratories The Leader in Robotic Technology

  6. Specifications

  7. CONTACT US Sales – Kensington Robots & Stages, Newport PM500 Stages, Spare Parts sales@kensingtonlabs.com Service - Kensington robot and stage repairs, Newport PM500 stage repairs service@kensingtonlabs.com Kensington Laboratories, LLC 6200 Village Parkway Dublin , CA 94568 Phone: 510.324.0126 Fax: 510.324.0130 www.kensingtonlabs.com Our Toll Free Number 1-888-977-7800

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