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COSMOS Co mponents and S mart Machines with M icro-Nan o Surface Embedded S ensors

COSMOS Co mponents and S mart Machines with M icro-Nan o Surface Embedded S ensors. The Vision. Improved interaction between human and machines. Smart machines with imbedded sensors will improve safety, lifetime and performance .

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COSMOS Co mponents and S mart Machines with M icro-Nan o Surface Embedded S ensors

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  1. COSMOS Components and Smart Machines with Micro-Nano Surface Embedded Sensors

  2. The Vision • Improved interaction between human and machines. • Smart machines with imbedded sensors will improve safety, lifetime and performance. • Short periods with improper operation with critical parameters may be avoided. • Create intelligent surfaces of the future.

  3. The Goal Develop a sensor embedded into a strong, self lubricating, diamond like carbon (DLC) coating. CVD DLC CCr-CrN layer Embedded Sensor Substrate

  4. Cross-disciplinary task Sensor design and technology 3D structurization Sensor test Surface embedded sensors Coating test Interface: Wiring and electronics DLC coating technology

  5. The Team • Acreo • Peter Leisner • Sintef, • N. Peter Østbø • Danish Technological Institute • Lars Pleth Nielsen • VTT • Helena Ronkainen

  6. Danish Technological Institute (DTI) Responsible: Centre Manager, M.Sc., Ph.D. Lars Pleth Nielsen Contribution: • Plasma-enhanced Si3N4 as a potential electric insulator • Wear-resistant PVD/CVD coatings • Ion beam accelerator for metal doping of DLC • Thermocouple based on e.g. copper/constantan • Testing of sensors and coatings

  7. Acreo AB, Sweden Responsible: Manager, Ph.D. Peter Leisner Contribution: • 3D-micro structuring • Sensor design • Wiring and electronic connectors to sensor unit • Interface to the surrounding

  8. Sintef/MiNaLAB, Norway Responsible: Research Scientist, Ph.D. (Dr. ing.) N. Peter Østbø Contribution: • Know-how and capability within piezoelectric thin films • Plasma-enhanced Si3N4 (restricted to compatible substrates) • ALD coatings (advanced oxides, nitrides etc.) • 2D-3D micro structuring • Sensor design • Materials and chemistry (polymers, wear-resistant coatings)

  9. VTT Technical Research Centre of Finland Responsible: Senior Research Scientist, Dr. (Tech.) Helena Ronkainen Contribution: • Sensor design • Wear-resistant coatings: Diamond like carbon coatings • Integration of piezoelectric material (e.g. AlN) with patterned MEMS structures • Integration of electronics • Tribological test of sensor structures

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