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WAFERMAP

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  1. Supported File Formats WAFERMAP We add customer imports upon request • Award winning software package • Collect, edit, visualize and analyze measured physical parameters on semiconductor wafers • Import data from various metrology tools • Ellipsometers • 4 point probes • Thickness gauges

  2. WAFERMAP • 9 different visualization plots from 1D to 3D • Data operations and filtering • File comparison • Statistical Process Control SPC • Browser • Trend chart • Inter-application Communication (Active X)

  3. WAFERMAP New Release: Version 3.0 • New features: • New easy to use XML-based Boin file format • Multiple wafers and multi-measurements in one file • Import of multi-measurement wafers at once • Free rotation of 3D plots

  4. WAFERMAP New Release: Version 3.0 • New features: • Export of *.jpg and *.bmp • Export of *.html • … and many more

  5. WAFERMAP • Compare your measurements • Work off-line • Work outside the clean room • WAFERMAP is your choice

  6. WAFERMAP References – Partial List of WAFERMAP Customers • Advanced Micro Devices • ASM • Atmel • Canon • Hitachi • Hypernex • Infineon • Intel • Jordan Valley SC • LSI Logic • Mattson Technology • Motorola/ Freescale • Nicolet • Osram • Philips, Philips Analytical • Mitsubishi • Seagate • Sematech • ST Microelectronics • Sumitomo Eaton Nova • Silicon Valley Group • Thermawave • Tokyo Electron • Tru-Si • Varian

  7. WAFERMAP References – OEM Customers • Cyrium • Foothill Instruments • Jenawave • Jordan Valley • KLA - Tencor • LayTec • Napson • Sigmatech • SOPRA • Technos • Tepla AG • Thermawave • Thermo Electron • Carl Zeiss • Sell WAFERMAP as analysis and visualization tool together with your equipment

  8. Thank you very much for your interest in WAFERMAP

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