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Ken Gilleo PhD ET-Trends LLC

MEMS MOEMS Nano. Workshop. “What are the possibilities of small but movable machines?” - R. Feynman 1959 Feynman described MEMS and “Nano”. 1 Introduction & Overview. Ken Gilleo PhD ET-Trends LLC. Sections. MEMS/MOEMS Introduction/overview Nanotechnology Overview MEMS Fabrication

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Ken Gilleo PhD ET-Trends LLC

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  1. MEMS MOEMS Nano Workshop “What are the possibilities of small but movable machines?” - R. Feynman 1959 Feynman described MEMS and “Nano” 1 Introduction & Overview • Ken Gilleo PhD • ET-Trends LLC

  2. Sections • MEMS/MOEMS Introduction/overview • Nanotechnology Overview • MEMS Fabrication • MEMS Mechanisms & Operation • Introduction to Packaging • MEMS Special Packaging Requirements • Nano Packaging • MEMS Packaging • Commercial Packages for MEMS • Summary & Future

  3. Outline • What’s MEMS? • MEMS/MOEMS Fundamentals • Features & Attributes • Mechanics & Motion • Applications

  4. MEMS • Micro: small scale; similar to IC feature size* • Electro: electrical power & electronics • Mechanical: adds mechanical motion • System: integrated; can be a System-on-Chip Mechanical MOTION must be involved Retains electronic features while adding mechanical structures * Micro – not yet Nano -- NEMS

  5. MEMS; Electro vs. Electronic • All MEMS must have “electro” feature • Electro: power, control, sense and compute • MEMS devices can have on-chip electronics • Electronic circuitry for MEMS • Control, amplification, conditioning, etc. • Electronics Locations • Integrated CMOS; iMEMS; • Wafer-level connected • Separate chips

  6. Accelerometer MEMS ADI Gyroscope

  7. The Center of Convergence Physics Chemistry MEMS Electronics Mechanics Biotech MOEMS Telecom OE OM Nano- technology Medicine Optics Where all Sciences & Technologies will Converge

  8. Key Attributes • Hear • Talk • Feel • Move • Walk • Grab • Think • See • Sense beyond • Control • Energize • Extract energy • Manufacture • Cut-pierce-etc. • More… • Convergence of electronics, mechanics, & (optics) • Leverages semiconductor industry • Mass-production in existing fabs • Extreme “density”, highly scalability • Extraordinary versatility and richness • sensors • energy devices • logic functions • motion • control • micro-manufacturing systems

  9. MEMS Can: • Hear • Talk • Feel • Move • Fly • Walk • Grab • Think • Sense • See • Control • Pump • Synthesize • Align • Cut • More

  10. MEMS Structures

  11. Best MEMS Features • Massively parallel manufacturing • Can use Semi fabs; even older, smaller fabs • Highly scalable; smaller = faster (less mass) • Integrate everything; or bond wafers together • Extraordinary functionality • Ideal size for: optical, biological, chemical and human interaction

  12. MEMS Advantages • Taps the “mega” semiconductors infrastructure • Merges motion & electronics & energy • Can combine MEMS + CMOS logic on one chip • Multifunctional; separate or combinations • Sense; movement, energy, molecules, microbes • Compute;electronic logic, memory • Move; motion to solids, liquids, gases, and MEMS devices • Control; energy, signals, matter, motion • Produce; reagents, drugs, life forms

  13. Major Products • Sensors (largest class; ~ 70%) • Motion detection; vehicles, machines, life forms • Position; gyroscopes, accelerometers • Force/pressure: gases, fluids, solids • Molecules; chemical, biological (emerging) • Energy; heat, light, mechanical • Control • Energy; light, electrical, RF, sound, mechanical • Fluids; pumps for machines, biomedical, other • Gases; even MEMS rockets have been built • Reactions; for synthesis & analysis (incl. pharma)

  14. MEMS Motion (actuation) • Deformable; cantilevers, beams - “no wear out” • Sliding; linear • Rotating; partial, full, multi-plane • Rotating Inter-contact; gears, wheels • Hinges • Ejectors; fluids, gas, solids • Combinations More on ACTUATION Later

  15. JPL Micro-gyro Military – US Gov’t. Motion-interactive Motion Dongle Motion sensor - Moto 2-axis sensor - ADI MEMS Sensors Game and computer input MEMS enabled iPhone Security Earthquake – warn, power, fuel shutoff Air Bag sensor - ADI Vehicle; crash, roll-over, ride, mechanical wellness Precise pedometers Military; vehicle, ordnance monitor Robots; movement

  16. MEMS Demo Sandia National Laboratories presents… Can the Government solve the overload problem? Sandia Sequel Video may not run unless file is downloaded BUG still wins!

  17. Complex MEMS Demo Video may not run unless file is downloaded Sandia National Laboratory

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