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Intro_0

Intro_0. Klocke. Nanotechnik. CANEUS 2004. Manufacturing Technologies in Nanoscale. Louis P. Shu, Ph.D. President, Weise Labs, Inc. Taiwan Co-Founder of NanoSpire, Inc., USA Executive Advisor, Klocke Nanotechnik, Germany. Intro_0. Klocke. Nanotechnik. What is Cavitation?.

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Intro_0

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  1. Intro_0 Klocke Nanotechnik CANEUS2004 Manufacturing Technologies in Nanoscale Louis P. Shu, Ph.D. President, Weise Labs, Inc. Taiwan Co-Founder of NanoSpire, Inc., USA Executive Advisor, Klocke Nanotechnik, Germany

  2. Intro_0 Klocke Nanotechnik What is Cavitation? • Cavitation bubbles are created when an object passes through a liquid rapidly or when a liquid is brought to its boiling point • Bubbles collapsing next to an object cause a microjet to shoot towards the object • The microjet comes out at up to mach 4 and is capable of drilling a hole through a diamond • This behavior is very predictable and the size, force and direction of the microjet can be controlled and induced at will using a laser, ultrasound, x-rays, etc. Photo: L. A. Crum

  3. Photos: Motivational Concepts, AquaCam Examples of Cavitation Natural and Manmade Photo on right: Snapping shrimp generate cavitation to kill prey Photo: Shrimp - BBC News

  4. Intro_0 Klocke Nanotechnik Cavitation Collapse Sequence Photo: W. Lauterborn

  5. Intro_0 Technology Issues Addressed Klocke Nanotechnik • Nanofabrication • Mill & Assemble materials from 1 micron to 1 nanometer • Cut, drill, weld, anneal, shotpeen • Wide range of materials (diamond, glass, ceramics, metals and Si) • 10 MHz cutting potential of 1 meter/second • Create new opportunities • Advancements in existing industries • Enable new industries to emerge

  6. Intro_0 Klocke Nanotechnik NanoSpire Product Schematic

  7. Intro_0 Klocke Nanotechnik PrototypeCapabilities • Current Electric Discharge Prototype • Microjet Diameter 20 Microns • YAG/Ruby Laser Alpha Prototype • Microjet Diameter 50-100 Nanometers • Anticipated Registration Accuracy +/- 5-10 Nanometers • Anticipated Repeat Rate up to 400 Hz • UV Laser Beta Prototype • Microjet Diameter 1 -15 Nanometers • Ultimate Registration Accuracy +/- 1-2 Nanometers • Ultimate Repeat Rate 75 MHz

  8. SEM Microphotograph of Cavitation Microjet Impact in Steel Produced by NanoSpire Prototype Picture Courtesy of Albany NanoTech

  9. Intro_0 Klocke Nanotechnik Nanofabrication Cavitation vs Existing Technology Resolution AFM X-ray Electron/Ion Beam EUVL Cavitation LASER Process Speed

  10. Intro_0 Klocke Nanotechnik Limitations Existing Technologies • EUV and Laser Lithography are Diffraction Limited by the Wavelength of Light • Electron and Ion Beam have Similar Resolution but are not Scalable • Both Electron and Ion Beam Require a Vacuum and a Conductive Substrate

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