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Pt as a release layer for IXO thermally formed glass optics: preliminary results

Pt as a release layer for IXO thermally formed glass optics: preliminary results.

nadine-morse
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Pt as a release layer for IXO thermally formed glass optics: preliminary results

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  1. Pt as a release layer for IXO thermally formed glass optics: preliminary results Platinum and boron nitride are two of the materials being considered as release layers for thermally slumping glass substrates for IXO. SAO is investigating the use of platinum as a release layer for IXO glass substrates. Recent experimental results using dc magnetron sputtered platinum coatings will be presented. S. Romaine, R. Bruni, P. Gorenstein, S. Park, P.Reid Harvard-Smithsonian Center for Astrophysics

  2. Test Substrates: D263 schott glass 400 µm thick 5cm diameter Process • Clean substrates • dc magnetron deposit ~ 450 Å Pt on glass • Characterize (XRR, AFM, WYKO) • Thermal anneal – flat mandrel (fused silica) • Characterize (XRR, AFM, WYKO)

  3. SAO Coating Facility RandD Chamber Cross Section Magnetron1 Magnetron2 Substrate1 Substrate2 Variable Height Rotary Platen Chamber I.D. = 23.5 in. ; height = 13 in Turbo pump, base pressure = 1x10-7 Torr R&D chamber – small substrates

  4. Max temp = 580 54 hour slumping cycle 17.5 cm diameter fused silica flat mandrel 5 cm diameter D263 coated glass

  5. Pre vs. Post slumped 8 keV XRR data Graze angle (deg) Red = pre-slump data; Green = post-slump data

  6. 8 keV XRR data+ models525 Å thick Pt film on D263 400 µr thick glass substrate Pre-slump Post-slump Red = data Green = model Red = data Green = model Reflectivity Reflectivity Model: µr(Pt) = 5.5 Å µr(sub) =4.0 Å Model: µr(Pt) = 14.0 Å µr(sub) = 7.0 Å Graze angle (deg) Graze angle (deg) 8 keV XRR data - taken at SAO XRR facility Data Fit using D. Windt IMD software

  7. 3 µm AFM scans: uncoated, pre-slump, post-slump Pt coated, pre-slump, µr =4.0 Uncoated D263, µr =2.1 Pt coated, post-slump, µr =9.1

  8. AFM 1 µm scans: Uncoated, Pre-slump, Post-slump Pt coated, pre-slump Uncoated D263 Pt coated, post-slump

  9. Microroughness data for Pt films pre and post slumping *Sample 5b was a control sample. It was coated with Pt and characterized, but was not slumped ** all WYKO data taken at MSFC (B.Ramsey, T. Kester)

  10. Summary • These are first – preliminary - results of this study • Obvious advantages if release layer is also X-ray reflector – • M.Ghigo/G. Pareschi found smaller effect (of roughness) with thicker substrates • Work continues …….

  11. END

  12. Pt on 400 µm D263 (Preslumped) 10 µm scan 3 µm scan

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