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Troubleshooting Gas Leak in Mass Flow Controller: 7% CO2, 93% Ar

Discovering a 17.1 SCCM leak in a mass flow controller handling a gas mixture of 7% CO2 and 93% Ar. Learn how to troubleshoot and resolve the issue effectively.

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Troubleshooting Gas Leak in Mass Flow Controller: 7% CO2, 93% Ar

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Presentation Transcript

  1. Test of mass flow controller Jiaming Yu

  2. Gas: 7%CO2 93%Ar

  3. * : There is a leak of 17.1 SCCM.

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